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JP2014160670A Lpp euv light source drive laser system 审中-公开
标题翻译： LPP EUV光源驱动激光系统
公开(公告)号：JP2014160670A
公开(公告)日：2014-09-04
申请号：JP2014084934
申请日：2014-04-16
申请人： Cymer LLC , サイマーリミテッドライアビリティカンパニー
发明人： ERSHOV ALEXANDER I , ALEXANDER N BYKANOV , OLEH V KHODYKIN , FOMENKOV IGOR V
IPC分类号： H05G2/00 , G03F7/20 , H01L21/027
CPC分类号： H05G2/003 , H05G2/005 , H05G2/008
摘要： PROBLEM TO BE SOLVED: To provide a laser produced plasma (LPP) extra ultraviolet (EUV) light source.SOLUTION: An apparatus and method is disclosed which may comprise an LPP EUV system which may comprise: a drive laser producing a drive laser beam; a drive laser beam first path having a first axis; a drive laser redirecting mechanism transferring the drive laser beam from the first path to a second path having a second axis; an EUV collector optical element having a centrally located aperture; and a focusing mirror, in the second path, positioned within the aperture and focusing the drive laser beam onto a plasma initiation site located along the second axis. The device and method may comprise that the drive laser beam is produced by the drive laser having a wavelength such that focusing on an EUV target droplet of about 100 μm or less at effective plasma production energy if not practical in the constrains of the geometries involved utilizing a focusing lens.
摘要翻译：要解决的问题：提供激光产生的等离子体（LPP）超紫外（EUV）光源。解决方案：公开了一种可以包括LPP EUV系统的装置和方法，LPP EUV系统可以包括：产生驱动激光束的驱动激光; 具有第一轴线的驱动激光束第一路径; 驱动激光重定向机构，其将所述驱动激光束从所述第一路径传递到具有第二轴线的第二路径; 具有中心定位的孔的EUV收集器光学元件; 以及位于第二路径内的聚焦镜，位于孔内并将驱动激光束聚焦到沿着第二轴定位的等离子体起始位置。该装置和方法可以包括：驱动激光束由具有波长的驱动激光器产生，使得在有效的等离子体产生能量下聚焦在约100μm或更小的EUV靶液滴上，如果在所涉及的几何形状的约束条件下聚焦镜头。

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