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    • 1. 发明申请
    • Confocal wafer inspection method and apparatus
    • 共焦晶片检查方法和装置
    • US20050156098A1
    • 2005-07-21
    • US11079614
    • 2005-03-14
    • Christopher FairleyTao-Yi FuBin-Ming TsaiScott Young
    • Christopher FairleyTao-Yi FuBin-Ming TsaiScott Young
    • G02B21/00G02B7/04
    • G01N21/9501G02B3/0056G02B21/0024G02B21/0028G02B21/008G02B27/40
    • A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen.
    • 提供了使用多重元件布置的半导体晶片检查系统和方法,例如偏移飞行透镜阵列。 优选实施例使用激光将光能传递到光束扩展器,其扩展光能以产生照明场。 偏移飞行透镜阵列将来自照明场的光能转换成照明点的偏移图案。 包括第一透镜,发射器/反射器,物镜和Mag管的透镜装置将光能量施加到样本上并将光能传递给针孔掩模。 针孔掩模与偏置飞行透镜阵列机械对准。 通过针孔掩模中的每个针孔的光能被引向中继透镜,该中继透镜将光能引导到传感器上。 偏移飞行透镜阵列对应于针孔掩模。 选择偏移飞行透镜阵列的偏移图案,使得所产生的斑点可以重新组合成连续图像,并且系统利用时间延迟和积分电荷耦合器件与快速感测以及自动对焦系统一起测量和消除拓扑特征 标本。
    • 2. 发明申请
    • Confocal wafer inspection method and apparatus using fly lens arrangement
    • 共焦晶片检查方法和使用飞行透镜装置的装置
    • US20070007429A1
    • 2007-01-11
    • US11521930
    • 2006-09-15
    • Christopher FairleyTao-Yi FuBin-Ming TsaiScott Young
    • Christopher FairleyTao-Yi FuBin-Ming TsaiScott Young
    • G02B27/40
    • G01N21/9501G02B3/0056G02B21/0024G02B21/0028G02B21/008G02B27/40
    • A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen.
    • 提供了使用多重元件布置的半导体晶片检查系统和方法,例如偏移飞行透镜阵列。 优选实施例使用激光将光能传递到光束扩展器,其扩展光能以产生照明场。 偏移飞行透镜阵列将来自照明场的光能转换成照明点的偏移图案。 包括第一透镜,发射器/反射器,物镜和Mag管的透镜装置将光能量施加到样本上并将光能传递给针孔掩模。 针孔掩模与偏置飞行透镜阵列机械对准。 通过针孔掩模中的每个针孔的光能被引向中继透镜,该中继透镜将光能引导到传感器上。 偏移飞行透镜阵列对应于针孔掩模。 选择偏移飞行透镜阵列的偏移图案,使得所产生的斑点可以重新组合成连续图像,并且系统利用时间延迟和积分电荷耦合装置,以及自动对焦系统,该自动对焦系统测量和消除 标本。
    • 5. 发明授权
    • Digital pathology system
    • 数字病理系统
    • US09041930B1
    • 2015-05-26
    • US13112956
    • 2011-05-20
    • Scott YoungEliezer RosengausAshok Kulkarni
    • Scott YoungEliezer RosengausAshok Kulkarni
    • G01N21/25G01J3/51G01J3/02G01J3/28
    • G01J3/51G01J3/02G01J3/0208G01J3/0237G01J3/2803G01J3/36G01J3/513G01J2003/1213G02B7/28G02B21/244G02B21/365G02B27/40
    • The present invention may include an illumination source; a TDI sensor having a plurality of rows of TDI pixels, wherein each of the TDI pixels have a 1:1 aspect ratio; a multicolor filter contacted to the surface of the TDI sensor, wherein the multicolor filter has alternating sections of a first color filter, a second color filter, and at least a third color, wherein adjacent rows of TDI pixels are grouped in order to form a plurality of rows of integrated multicolor pixels; an objective having a first end positioned proximate to the specimen; a second lens configured to focus light from the image path onto the TDI sensor; and an anamorphic optics element configured to magnify an image of the one or more specimens such that the image is magnified by a factor of three along a direction orthogonal to an integrating direction of the TDI sensor.
    • 本发明可以包括照明源; 具有多行TDI像素的TDI传感器,其中每个TDI像素具有1:1的纵横比; 与TDI传感器的表面接触的多色过滤器,其中所述多色过滤器具有第一滤色器,第二滤色器和至少第三颜色的交替部分,其中相邻的TDI像素行被分组以形成 多行集成多色像素; 具有靠近所述样本定位的第一端的物镜; 第二透镜,被配置为将来自图像路径的光聚焦到TDI传感器上; 以及变形光学元件,被配置为放大一个或多个样本的图像,使得图像沿着与TDI传感器的积分方向正交的方向被放大三倍。
    • 6. 发明授权
    • Solar metrology methods and apparatus
    • 太阳能计量方法和装置
    • US08604447B2
    • 2013-12-10
    • US13557047
    • 2012-07-24
    • Scott YoungGuoheng ZhaoAdy LevyMarco GuevremontNeeraj Khanna
    • Scott YoungGuoheng ZhaoAdy LevyMarco GuevremontNeeraj Khanna
    • G01N21/64
    • G01N21/6489G01N21/9501H02S50/10
    • Methods and apparatus are presented to measure the photoluminescence of incoming wafers and extract parameters such as minority carrier life time, diffusion length, and defect density that may be used to predict final solar cell efficiency. In some examples, illumination light is supplied to a side of an as-cut silicon wafer and the induced luminescence measured from the same side and the opposite side of the wafer is used to determine an indication of the minority carrier lifetime. In another example, the luminescence induced by two instances of illumination light of different wavelength is used to determine an indication of the minority carrier lifetime. In another example, the spatial distribution of luminescence intensity over an area surrounding a focused illumination spot is used to determine an indication of the minority carrier lifetime. Other apparatus useful to passivate the surface of a wafer for inspection are also presented.
    • 提出了测量进入晶片的光致发光的方法和装置,并提取可用于预测最终太阳能电池效率的参数,例如少数载流子寿命,扩散长度和缺陷密度。 在一些示例中,将照明光提供给切割硅晶片的一侧,并且使用从晶片的相同侧和相对侧测量的感应发光来确定少数载流子寿命的指示。 在另一示例中,由两个不同波长的照明光实例引起的发光用于确定少数载流子寿命的指示。 在另一示例中,使用聚焦照明点周围的区域上的发光强度的空间分布来确定少数载流子寿命的指示。 还提出了可用于钝化晶片表面以进行检查的其它装置。
    • 7. 发明申请
    • Solar Metrology Methods And Apparatus
    • 太阳能计量方法与装置
    • US20130048873A1
    • 2013-02-28
    • US13557047
    • 2012-07-24
    • Scott YoungGuoheng ZhaoAdy LevyMarco GuevremontNeeraj Khanna
    • Scott YoungGuoheng ZhaoAdy LevyMarco GuevremontNeeraj Khanna
    • G01N21/64
    • G01N21/6489G01N21/9501H02S50/10
    • Methods and apparatus are presented to measure the photoluminescence of incoming wafers and extract parameters such as minority carrier life time, diffusion length, and defect density that may be used to predict final solar cell efficiency. In some examples, illumination light is supplied to a side of an as-cut silicon wafer and the induced luminescence measured from the same side and the opposite side of the wafer is used to determine an indication of the minority carrier lifetime. In another example, the luminescence induced by two instances of illumination light of different wavelength is used to determine an indication of the minority carrier lifetime. In another example, the spatial distribution of luminescence intensity over an area surrounding a focused illumination spot is used to determine an indication of the minority carrier lifetime. Other apparatus useful to passivate the surface of a wafer for inspection are also presented.
    • 提出了测量进入晶片的光致发光的方法和装置,并提取可用于预测最终太阳能电池效率的参数,例如少数载流子寿命,扩散长度和缺陷密度。 在一些示例中,将照明光提供给切割硅晶片的一侧,并且使用从晶片的相同侧和相对侧测量的感应发光来确定少数载流子寿命的指示。 在另一示例中,由两个不同波长的照明光实例引起的发光用于确定少数载流子寿命的指示。 在另一示例中,使用聚焦照明点周围的区域上的发光强度的空间分布来确定少数载流子寿命的指示。 还提出了可用于钝化晶片表面以进行检查的其它装置。
    • 8. 发明申请
    • Method of selecting operation in a line-powered module
    • 在线路供电模块中选择操作的方法
    • US20070290833A1
    • 2007-12-20
    • US11445575
    • 2006-06-02
    • Kirby W. CartwrightScott Young
    • Kirby W. CartwrightScott Young
    • G08B1/08
    • G08B25/04G08B7/06
    • A line-powered module that is selectively operable in one of a plurality of modes of operation based upon the value of a selection signal. The line-powered module includes a control unit that selectively operates the module in one of the plurality of modes of operation based upon the value of a selection signal received by the control unit. The line-powered module includes a selection input that is coupled to the control unit such that the selection signal can be received at the selection input. Preferably, the selection input receives a selection wire that can be moved between different points of connection to define the plurality of states of the selection signal. Based upon the connection of the selection wire, the control unit operates the line-powered module in one of the plurality of modes of operation.
    • 一种线路供电模块,其可以基于选择信号的值选择性地以多种操作模式中的一种操作。 线路供电模块包括控制单元,其基于由控制单元接收的选择信号的值,以多种操作模式中的一种模式选择性地操作该模块。 线路供电模块包括耦合到控制单元的选择输入,使得可以在选择输入处接收选择信号。 优选地,选择输入接收可以在不同连接点之间移动的选择线,以限定选择信号的多个状态。 基于选择线的连接,控制单元以多种操作模式之一操作线路供电的模块。