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1. 发明授权

US09469526B2 Method for the production of conical nanostructures on substrate surfaces 有权
标题翻译：在衬底表面上生产锥形纳米结构的方法
公开(公告)号：US09469526B2
公开(公告)日：2016-10-18
申请号：US13518594
申请日：2010-12-17
申请人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
发明人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
IPC分类号： B44C1/22 , G02B1/10 , B81C1/00
CPC分类号： B81C1/00031 , B81B2203/0361 , B81B2207/056 , Y10T428/24479
摘要： The invention relates to conical structures on substrate surfaces, in particular optical elements, to methods for the production thereof and to the use thereof, in particular in optical devices, solar cells and sensors. The conical nanostructures according to the invention are suitable in particular for providing substrate surfaces having very low light reflection. The method according to the invention for producing conical nanostructures on substrate surfaces comprises at least the steps of: a) providing a substrate surface covered with nanoparticles; b) etching the substrate surface covered with nanoparticles to a depth of at least 100 nm, wherein the nanoparticles act as an etching mask and the etching parameters are set in such a way that hyperboloid structures are produced underneath the nanoparticles; c) breaking the hyperboloid structures in the region of the smallest diameter by exerting mechanical forces, wherein the structures remaining on the substrate surface have a conical shape which corresponds substantially to half a single-shell hyperboloid.
摘要翻译：本发明涉及衬底表面，特别是光学元件上的锥形结构，用于生产它的方法及其用途，特别是在光学器件，太阳能电池和传感器中的应用。根据本发明的锥形纳米结构特别适用于提供具有非常低的光反射的基底表面。根据本发明的用于在衬底表面上生产锥形纳米结构的方法包括至少以下步骤：a）提供覆盖有纳米颗粒的衬底表面; b）将覆盖有纳米颗粒的衬底表面蚀刻至少至少100nm的深度，其中所述纳米颗粒用作蚀刻掩模，并且蚀刻参数被设置为在纳米颗粒下方产生双曲面结构; c）通过施加机械力来破坏最小直径区域中的双曲面结构，其中残留在基底表面上的结构具有基本上对应于单壳双曲面的一半的圆锥形状。

2. 发明申请

US20120244322A1 METHOD FOR SPATIALLY RESOLVED ENLARGEMENT OF NANOPARTICLES ON A SUBSTRATE SURFACE 有权
标题翻译：在基底表面上空间解析纳米粒子的方法
公开(公告)号：US20120244322A1
公开(公告)日：2012-09-27
申请号：US13510107
申请日：2010-11-15
申请人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
发明人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
IPC分类号： B05D3/10 , B32B15/02 , B05D3/06 , B32B3/30 , B32B5/16 , B82Y30/00
CPC分类号： C23C18/1603 , C23C18/1605 , C23C18/1612 , C23C18/1667 , C23C18/1841 , C23C18/1889 , C23C18/44 , Y10T428/24612 , Y10T428/24909
摘要： The invention relates to a method for spatially resolving the enlargement and fine adjustment of precious metal nanoparticles according to size on a substrate surface and to the nanoparticle arrangements and nanostructured substrate surfaces thereby produced and to the use thereof. The invention particularly relates to a method for spatially resolving the enlargement of precious metal nanoparticles present on a substrate, comprising the following steps: a) providing a substrate coated by precious metal nanoparticles, b) optionally functionalizing the substrate by means of an agent which supports the adhesion of the precious metal nanoparticles to the substrate, c) contacting the substrate with a precious metal salt solution, d) UV irradiating the substrate in contact with the precious metal salt solution, thus creating a reduction of the precious metal salt and a currentless deposition of elementary precious metal on the precious metal nanoparticles and corresponding growth of the precious metal nanoparticles in the irradiated regions of the substrate, and e) optionally using a mask in order to create localized growth of the precious metal nanoparticles in predetermined regions of the substrate.
摘要翻译：本发明涉及一种用于根据基材表面上的尺寸空间分辨贵金属纳米颗粒的扩大和微调的方法，以及由此产生的纳米颗粒布置和纳米结构的基材表面及其用途。本发明特别涉及一种用于空间分辨存在于基底上的贵金属纳米颗粒的增大的方法，包括以下步骤：a）提供用贵金属纳米颗粒涂覆的基材，b）任选地通过支持贵金属纳米颗粒与基底的粘附，c）使基底与贵金属盐溶液接触，d）将紫外线照射到与贵金属盐溶液接触的底物上，从而产生贵金属盐的减少和无电流在贵金属纳米颗粒上沉积基本贵金属并在衬底的照射区域中贵金属纳米颗粒的相应生长，以及e）任选地使用掩模以在贵金属纳米颗粒在衬底的预定区域中产生局部生长。

3. 发明授权

US09169566B2 Method for spatially resolved enlargement of nanoparticles on a substrate surface 有权
标题翻译：在衬底表面上空间分辨扩大纳米颗粒的方法
公开(公告)号：US09169566B2
公开(公告)日：2015-10-27
申请号：US13510107
申请日：2010-11-15
申请人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
发明人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
IPC分类号： B44C1/22 , B05D3/06 , B82Y30/00 , C23C18/16 , C23C18/18 , C23C18/44
CPC分类号： C23C18/1603 , C23C18/1605 , C23C18/1612 , C23C18/1667 , C23C18/1841 , C23C18/1889 , C23C18/44 , Y10T428/24612 , Y10T428/24909
摘要： The invention relates to a method for spatially resolving the enlargement and fine adjustment of precious metal nanoparticles according to size on a substrate surface and to the nanoparticle arrangements and nanostructured substrate surfaces thereby produced and to the use thereof. The invention particularly relates to a method for spatially resolving the enlargement of precious metal nanoparticles present on a substrate, comprising the following steps: a) providing a substrate coated by precious metal nanoparticles, b) optionally functionalizing the substrate by means of an agent which supports the adhesion of the precious metal nanoparticles to the substrate, c) contacting the substrate with a precious metal salt solution, d) UV irradiating the substrate in contact with the precious metal salt solution, thus creating a reduction of the precious metal salt and a currentless deposition of elementary precious metal on the precious metal nanoparticles and corresponding growth of the precious metal nanoparticles in the irradiated regions of the substrate, and e) optionally using a mask in order to create localized growth of the precious metal nanoparticles in predetermined regions of the substrate.
摘要翻译：本发明涉及一种用于根据基材表面上的尺寸空间分辨贵金属纳米颗粒的扩大和微调的方法，以及由此产生的纳米颗粒布置和纳米结构的基材表面及其用途。本发明特别涉及一种用于空间分辨存在于基底上的贵金属纳米颗粒的增大的方法，包括以下步骤：a）提供用贵金属纳米颗粒涂覆的基材，b）任选地通过支持贵金属纳米颗粒与基底的粘附，c）使基底与贵金属盐溶液接触，d）将紫外线照射到与贵金属盐溶液接触的底物上，从而产生贵金属盐的减少和无电流在贵金属纳米颗粒上沉积基本贵金属并在衬底的照射区域中贵金属纳米颗粒的相应生长，以及e）任选地使用掩模以在贵金属纳米颗粒在衬底的预定区域中产生局部生长。

4. 发明申请

US20130284690A1 PROCESS FOR PRODUCING HIGHLY ORDERED NANOPILLAR OR NANOHOLE STRUCTURES ON LARGE AREAS 审中-公开
标题翻译：在大面积生产高阶纳米或纳米结构的方法
公开(公告)号：US20130284690A1
公开(公告)日：2013-10-31
申请号：US13879043
申请日：2011-10-12
申请人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz , Robert Brunner
发明人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz , Robert Brunner
IPC分类号： B29C59/00
CPC分类号： B29C59/002 , B81C99/009 , B81C2201/0149 , B82Y30/00 , G03F7/0002
摘要： The present invention relates to an improved process for producing highly ordered nanopillar or nanohole structures, in particular on large areas, which can be used as masters in NIL, hot embossing or injection molding processes. The process involves decorating a surface with an ordered array of metal nanoparticles produced by means of a micellar block- copolymer nano-lithography process; etching the primary substrate to a depth of 50 to 500 nm, where the nanoparticles act as a mask and an ordered array of nanopillars or nanocones corresponding to the positions of the nanoparticles is thus produced; using the nanostructured master or stamp in a structuring processes. Also the finished nanostructured substrate surface can be used as a sacrificial master which is coated with a continuous metal layer and the master is then etched away to leave a metal stamp having an ordered array of nanoholes which is a negative of the original array of nanopillars or nanocones.
摘要翻译：本发明涉及用于生产高度有序的纳米柱或纳米孔结构的改进方法，特别是在大面积上，其可以用作NIL，热压花或注射成型工艺中的主机。该方法涉及用通过胶束嵌段共聚物纳米光刻工艺制备的金属纳米颗粒的有序阵列来装饰表面; 将初级衬底蚀刻至50至500nm的深度，其中纳米颗粒用作掩模，因此产生与纳米颗粒的位置相对应的纳米级或纳米颗粒的有序阵列; 在结构化过程中使用纳米结构化的主体或印章。此外，成品纳米结构化基材表面也可用作牺牲性母体，其被涂覆有连续的金属层，然后将母体蚀刻掉以留下金属印模，该金属印模具有纳米孔的有序排列，其是原始阵列的纳米柱的负数，或纳米酮。

5. 发明申请

US20120268823A1 METHOD FOR THE PRODUCTION OF CONICAL NANOSTRUCTURES ON SUBSTRATE SURFACES 有权
标题翻译：在衬底表面上生产气态纳米结构的方法
公开(公告)号：US20120268823A1
公开(公告)日：2012-10-25
申请号：US13518594
申请日：2010-12-17
申请人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
发明人： Christoph Morhard , Claudia Pacholski , Joachim P. Spatz
IPC分类号： G02B1/10 , B44C1/22 , B32B3/30 , B82Y20/00 , B82Y40/00
CPC分类号： B81C1/00031 , B81B2203/0361 , B81B2207/056 , Y10T428/24479
摘要： The invention relates to conical structures on substrate surfaces, in particular optical elements, to methods for the production thereof and to the use thereof, in particular in optical devices, solar cells and sensors. The conical nanostructures according to the invention are suitable in particular for providing substrate surfaces having very low light reflection. The method according to the invention for producing conical nanostructures on substrate surfaces comprises at least the steps of: a) providing a substrate surface covered with nanoparticles; b) etching the substrate surface covered with nanoparticles to a depth of at least 100 nm, wherein the nanoparticles act as an etching mask and the etching parameters are set in such a way that hyperboloid structures are produced underneath the nanoparticles; c) breaking the hyperboloid structures in the region of the smallest diameter by exerting mechanical forces, wherein the structures remaining on the substrate surface have a conical shape which corresponds substantially to half a single-shell hyperboloid.
摘要翻译：本发明涉及衬底表面，特别是光学元件上的锥形结构，用于生产它的方法及其用途，特别是在光学器件，太阳能电池和传感器中的应用。根据本发明的锥形纳米结构特别适用于提供具有非常低的光反射的基底表面。根据本发明的用于在衬底表面上生产锥形纳米结构的方法包括至少以下步骤：a）提供覆盖有纳米颗粒的衬底表面; b）将覆盖有纳米颗粒的衬底表面蚀刻至少至少100nm的深度，其中所述纳米颗粒用作蚀刻掩模，并且蚀刻参数被设定为在纳米颗粒下方产生双曲面结构; c）通过施加机械力来破坏最小直径区域中的双曲面结构，其中残留在基底表面上的结构具有基本上对应于单壳双曲面的一半的圆锥形状。

6. 发明申请

US20130236881A1 THREE-DIMENSIONAL METAL-COATED NANOSTRUCTURES ON SUBSTRATE SURFACES, METHOD FOR PRODUCING SAME AND USE THEREOF 审中-公开
标题翻译：基材表面上的三维金属涂层纳米结构及其生产方法及其用途
公开(公告)号：US20130236881A1
公开(公告)日：2013-09-12
申请号：US13703054
申请日：2011-05-30
申请人： Joachim P. Spatz , Claudia Pacholski , Tobias Schoen , Lindarti Purwaningsih , Tobias Wolfram
发明人： Joachim P. Spatz , Claudia Pacholski , Tobias Schoen , Lindarti Purwaningsih , Tobias Wolfram
IPC分类号： G01N33/553 , A61B5/00 , A61B5/145
CPC分类号： G01N33/553 , A61B5/14503 , A61B5/6848 , B81B2203/0361 , B81C1/00031
摘要： The invention relates to a method for producing column-shaped or conical nanostructures, wherein the substrate surface is covered with an arrangement of metal nanoparticles and etched, the nanoparticles acting as an etching mask and the etching parameters being set such that column structures or cone structures are created below the nanoparticles and the nanoparticles are preserved as a structural coating.
摘要翻译：本发明涉及一种用于生产柱状或锥形纳米结构的方法，其中衬底表面被金属纳米颗粒的布置覆盖并被蚀刻，纳米颗粒用作蚀刻掩模，并且蚀刻参数被设置为使得柱结构或锥形结构在纳米颗粒下面形成，并且纳米颗粒被保留为结构涂层。

7. 发明申请

US20100318187A1 SURFACE-STRUCTURED POLYURETHANE SUBSTRATES AND METHODS FOR PRODUCING THE SAME 审中-公开
标题翻译：表面结构聚氨酯基材及其制造方法
公开(公告)号：US20100318187A1
公开(公告)日：2010-12-16
申请号：US12813578
申请日：2010-06-11
申请人： Sebastian Kruss , Joachim P. Spatz , Raquel Martin
发明人： Sebastian Kruss , Joachim P. Spatz , Raquel Martin
IPC分类号： A61F2/02 , B05D3/00 , B32B5/16 , B32B27/40
CPC分类号： B29C41/20 , B29C33/424 , B29C41/003 , B29C41/045 , B29C41/12 , B29C41/14 , B29K2075/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/24372 , Y10T428/24893
摘要： A method for producing a polymeric surface-structured substrate includes: (a) preparing a first precursor substrate that is nanostructured on at least one surface with inorganic nanoparticles, (b) coating a hardenable substrate material for a second substrate different from the first precursor substrate material onto the nanostructured surface of the precursor substrate, wherein the hardenable substrate material includes cross-linkable monomeric, oligomeric or polymeric starting components for producing a polymeric substrate, (c) hardening the hardenable substrate material to obtain a polymeric substrate, and (d) separating the precursor substrate from the polymeric substrate as a result of which a polymeric substrate nanostructured with nanoparticles and including a polyurethane is obtained.
摘要翻译：一种制备聚合物表面结构基质的方法包括：（a）制备在至少一个表面上用无机纳米颗粒纳米结构化的第一前体基质，（b）涂覆不同于第一前体基底的第二基底的可硬化基底材料其中所述可硬化基底材料包括用于制备聚合物基底的可交联单体，低聚或聚合起始组分，（c）硬化所述可硬化基底材料以获得聚合物基底，和（d）将前体基材与聚合物基材分离，结果获得了纳米颗粒纳米结构并包含聚氨酯的聚合物基材。

8. 发明授权

US08257798B2 Method for the creation of extensive variations in size or distance in nanostructure patterns on surfaces 有权
标题翻译：在表面上形成纳米结构图案的尺寸或距离的广泛变化的方法
公开(公告)号：US08257798B2
公开(公告)日：2012-09-04
申请号：US12595507
申请日：2008-03-12
申请人： Joachim P. Spatz , Theobald Lohmueller , Marco Arnold
发明人： Joachim P. Spatz , Theobald Lohmueller , Marco Arnold
IPC分类号： H05H1/00 , G01N1/00
CPC分类号： C23C18/14 , B82Y5/00 , B82Y30/00 , C23C18/08 , C23C18/1216 , C23C18/1237 , C23C18/1266 , C23C18/1295
摘要： A method for creating extensive variations in size or distance in nanostructure patterns on surfaces preferably includes: a) contacting a substrate with a liquid phase containing organic two-block or multi-block copolymer micelles, which are charged with an inorganic metal compound, by immersion into this liquid phase, during which chemically different polymer domains including inorganic metal compounds enclosed in micelles are deposited on the substrate; b) withdrawing the substrate from the liquid phase at a predetermined withdrawing speed, which is varied continuously or gradually, so that a gradient of the lateral separation length of the polymer domains is produced on the substrate surface; c) converting the deposited inorganic metal compounds by an oxidation- or reduction treatment into inorganic nanoparticles and optionally complete or partial removal of the organic polymer by a plasma treatment, wherein positions and lateral separation length of the nanoparticles obtained are determined by those of deposited polymer domains.
摘要翻译：用于在表面上形成纳米结构图案的尺寸或距离的广泛变化的方法优选包括：a）通过浸渍使基底与含有无机金属化合物的有机二嵌段或多嵌段共聚物胶束的液相接触在该液相中，其中包含胶束中的无机金属化合物的化学不同的聚合物域沉积在基底上; b）以预定的抽出速度从液相中取出基材，其以连续或逐渐变化的方式变化，从而在基材表面上产生聚合物区域的横向分离长度的梯度; c）通过氧化或还原处理将沉积的无机金属化合物转化为无机纳米颗粒，并通过等离子体处理任选地完全或部分除去有机聚合物，其中获得的纳米颗粒的位置和横向分离长度由沉积聚合物域名

9. 发明申请

US20110284820A1 NANOWIRES ON SUBSTRATE SURFACES, METHOD FOR PRODUCING SAME AND USE THEREOF 审中-公开
标题翻译：基材表面上的纳米颗粒，其生产方法和用途
公开(公告)号：US20110284820A1
公开(公告)日：2011-11-24
申请号：US13130234
申请日：2009-11-20
申请人： Stefan Kudera , Eva Bock , Joachim P. Spatz , Liberato Manna
发明人： Stefan Kudera , Eva Bock , Joachim P. Spatz , Liberato Manna
IPC分类号： H01L29/66 , H01L21/20 , B82Y40/00 , B82Y99/00
CPC分类号： H01L29/0665 , B82Y10/00 , H01L29/0669 , H01L29/0673 , H01L31/0352 , H01L51/422
摘要： The invention relates to a method for producing anchored nanowires on substrate surfaces. A method for producing anchored nanowires on a substrate which comprises no deposition steps from the gas phase with the steps: a) providing a substrate surface having a predefined two-dimensional geometric arrangement of nanoparticles or nanoclusters; b) contacting the substrate surface having the nanoparticles or nanoclusters with at least one solution of the material forming the nanowires, wherein the material forming the nanowires is deposited selectively on the nanoparticles or nanoclusters and grows further there. The method according to the invention preferably also comprises the steps of: a) applying a seed material to the nanoparticles or nanoclusters by contacting the substrate surface with a solution of the seed material such that the seed material is selectively deposited on the nanoparticles or nanoclusters; and step b) the material forming the nanowires is deposited selectively on the nanoclusters or nanoparticles provided with seed material and grows further there.
摘要翻译：本发明涉及在衬底表面上制备锚定的纳米线的方法。一种用于在衬底上产生锚定的纳米线的方法，其不包括来自所述气相的沉积步骤，具有以下步骤：a）提供具有预定的纳米颗粒或纳米团簇的二维几何排列的衬底表面; b）使具有纳米颗粒或纳米团簇的基材表面与形成纳米线的材料的至少一种溶液接触，其中形成纳米线的材料选择性沉积在纳米颗粒或纳米团簇上并在其上进一步生长。根据本发明的方法优选地还包括以下步骤：a）通过使基材表面与种子材料的溶液接触使得种子材料选择性地沉积在纳米颗粒或纳米团簇上，将种子材料施加到纳米颗粒或纳米团簇上; 和步骤b）形成纳米线的材料选择性地沉积在具有种子材料的纳米团簇或纳米颗粒上，并在其上进一步生长。

10. 发明申请

US20140193745A1 SUBSTRATE SURFACE STRUCTURED WITH THERMALLY STABLE METAL ALLOY NANOPARTICLES, A METHOD FOR PREPARING THE SAME AND USES THEREOF, IN PARTICULAR AS A CATALYST 有权
标题翻译：具有结构稳定的金属合金纳米粒子的基底表面，其制备方法及其用途，特别是作为催化剂
公开(公告)号：US20140193745A1
公开(公告)日：2014-07-10
申请号：US14235442
申请日：2012-07-27
申请人： Joachim P. Spatz , Sebastian Lechner
发明人： Joachim P. Spatz , Sebastian Lechner
IPC分类号： B01J23/52 , B01D53/94 , H01M4/88 , H01M4/86 , H01M4/90
CPC分类号： B01D53/94 , B01D53/944 , B01D2255/1021 , B01D2255/1025 , B01D2255/106 , B01D2255/20753 , B01J21/08 , B01J23/38 , B01J23/464 , B01J23/52 , B01J23/89 , B01J23/892 , B01J35/0013 , B01J35/06 , B01J35/1057 , B01J37/0018 , B01J37/0219 , B01J37/082 , B01J37/18 , B01J37/349 , B82Y30/00 , B82Y40/00 , C03C17/10 , C03C2218/32 , H01M4/8657 , H01M4/8803 , H01M4/8842 , H01M4/8882 , H01M4/9041 , H01M4/921 , H01M8/0662 , H01M8/0668 , Y02E60/50
摘要： The invention relates to a method for preparing a substrate surface structured with thermally stable metal alloy nanoparticles, which method comprises—providing a micellar solution of amphiphilic molecules such as organic diblock or multiblock copolymers in a suitable solvent; —loading the micelles of said micellar solution with metal ions of a first metal salt; —loading the micelles of said micellar solution with metal ions of at least one second metal salt; —depositing the metal ion-loaded micellar solution onto a substrate surface to form a (polymer) film comprising an ordered array of (polymer) domains; co-reducing the metal ions contained in the deposited domains of the (polymer) film by means of a plasma treatment to form an ordered array of nanoparticles consisting of an alloy of the metals used for loading the micelles on the substrate surface. The invention also provides a nanostructured substrate surface obtainable by said method as well as the use of said nanostructured substrate surface as a catalyst.
摘要翻译：本发明涉及一种用热稳定金属合金纳米颗粒制备的基材表面的方法，该方法包括：在合适的溶剂中提供两亲分子如有机二嵌段或多嵌段共聚物的胶束溶液; 用第一金属盐的金属离子负载所述胶束溶液的胶束; 用至少一种第二金属盐的金属离子负载所述胶束溶液的胶束; - 将负载有金属离子的胶束溶液沉积到基底表面上以形成包含（聚合物）结构域的有序阵列的（聚合物）膜; 通过等离子体处理共同还原包含在（聚合物）膜的沉积域中的金属离子，以形成由用于将胶束负载在基底表面上的金属的合金组成的纳米颗粒的有序阵列。本发明还提供可通过所述方法获得的纳米结构化基材表面以及所述纳米结构化基材表面作为催化剂的用途。

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