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1. 发明申请

US20060088267A1 Production method of optical waveguide device and optical waveguide device 审中-公开
标题翻译：光波导器件和光波导器件的制造方法
公开(公告)号：US20060088267A1
公开(公告)日：2006-04-27
申请号：US11242063
申请日：2005-10-04
申请人： Chie Fukuda , Katsuyoshi Akiba , Kouji Shiotsuka
发明人： Chie Fukuda , Katsuyoshi Akiba , Kouji Shiotsuka
IPC分类号： G02B6/10
CPC分类号： G02B6/132
摘要： An optical waveguide device and a method of making the same that render excellent transmission loss characteristics and allow a large degree of freedom in circuit design are provided. The method has the steps of forming a fluorine-added silica glass first cladding layer on a substrate, forming a silica glass protective layer on the first cladding layer, annealing, forming a groove that penetrates through the protective layer and reaches the first cladding layer, forming a silica glass core in the groove, and forming a fluorine-added silica glass second cladding layer on the protective layer and the core. The device has a substrate, a first cladding layer formed on the substrate, a protective layer formed on the first cladding layer, a core formed in a groove that penetrates through the protective layer and reaches the first cladding layer, and a second cladding layer formed on the protective layer and the core.
摘要翻译：提供一种光波导器件及其制造方法，其具有优异的传输损耗特性并且允许电路设计中的大自由度。该方法具有以下步骤：在基板上形成氟化石英玻璃第一包层，在第一包层上形成石英玻璃保护层，退火，形成穿过保护层并到达第一包层的沟槽，在所述槽中形成石英玻璃芯，并在所述保护层和所述芯上形成氟化石英玻璃第二包覆层。该器件具有基板，形成在基板上的第一包覆层，形成在第一包层上的保护层，形成在贯穿保护层并到达第一包层的槽的芯部，以及形成第二包层在保护层和芯上。

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