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    • 1. 发明授权
    • Light emitting diode chip
    • 发光二极管芯片
    • US08415683B2
    • 2013-04-09
    • US12464859
    • 2009-05-12
    • Chia-En LeeCheng-Ta KuoDer-Ling Hsia
    • Chia-En LeeCheng-Ta KuoDer-Ling Hsia
    • H01L27/15
    • H01L33/0095H01L21/78H01L33/20H01L33/44
    • The present invention provides a manufacturing method of an LED chip. First, a device layer is formed on a growth substrate, wherein the device layer has a first surface connected to the growth substrate and a second surface. Next, a plurality of first trenches are formed on the second surface of the device layer. Then, a protection layer is formed on the side walls of the first trenches. After that, the second surface is bonded with a supporting substrate and the device layer is then separated from the growth substrate. Further, a plurality of second trenches corresponding to the first trenches are formed in the device layer to form a plurality of LEDs, wherein the second trenches extend from the first surface to the bottom portions of the first trenches. Furthermore, a plurality of electrodes are formed on the first surface of the device layer.
    • 本发明提供一种LED芯片的制造方法。 首先,在生长衬底上形成器件层,其中器件层具有连接到生长衬底的第一表面和第二表面。 接下来,在器件层的第二表面上形成多个第一沟槽。 然后,在第一沟槽的侧壁上形成保护层。 之后,将第二表面与支撑基板接合,然后将器件层与生长衬底分离。 此外,在器件层中形成对应于第一沟槽的多个第二沟槽以形成多个LED,其中第二沟槽从第一沟槽的第一表面延伸到底部。 此外,在器件层的第一表面上形成多个电极。
    • 4. 发明申请
    • LIGHT EMITTING DIODE CHIP AND MANUFACTURING METHOD THEREOF
    • 发光二极管芯片及其制造方法
    • US20100258818A1
    • 2010-10-14
    • US12464859
    • 2009-05-12
    • Chia-En LeeCheng-Ta KuoDer-Ling Hsia
    • Chia-En LeeCheng-Ta KuoDer-Ling Hsia
    • H01L33/00H01L21/78
    • H01L33/0095H01L21/78H01L33/20H01L33/44
    • The present invention provides a manufacturing method of an LED chip. First, a device layer is formed on a growth substrate, wherein the device layer has a first surface connected to the growth substrate and a second surface. Next, a plurality of first trenches are formed on the second surface of the device layer. Then, a protection layer is formed on the side walls of the first trenches. After that, the second surface is bonded with a supporting substrate and the device layer is then separated from the growth substrate. Further, a plurality of second trenches corresponding to the first trenches are formed in the device layer to form a plurality of LEDs, wherein the second trenches extend from the first surface to the bottom portions of the first trenches. Furthermore, a plurality of electrodes are formed on the first surface of the device layer.
    • 本发明提供一种LED芯片的制造方法。 首先,在生长衬底上形成器件层,其中器件层具有连接到生长衬底的第一表面和第二表面。 接下来,在器件层的第二表面上形成多个第一沟槽。 然后,在第一沟槽的侧壁上形成保护层。 之后,将第二表面与支撑基板接合,然后将器件层与生长衬底分离。 此外,在器件层中形成对应于第一沟槽的多个第二沟槽以形成多个LED,其中第二沟槽从第一沟槽的第一表面延伸到底部。 此外,在器件层的第一表面上形成多个电极。