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1. 发明授权

US06383554B1 Process for fabricating plasma with feedback control on plasma density 有权
标题翻译：使用等离子体密度反馈控制制造等离子体的工艺
公开(公告)号：US06383554B1
公开(公告)日：2002-05-07
申请号：US09654808
申请日：2000-09-05
申请人： Cheng-Hung Chang , Keh-Chyang Leou , Chaung Lin , Yi-Mei Yang , Chuen-Horng Tsai , I. G. Chen
发明人： Cheng-Hung Chang , Keh-Chyang Leou , Chaung Lin , Yi-Mei Yang , Chuen-Horng Tsai , I. G. Chen
IPC分类号： B05D314
CPC分类号： H01J37/32082 , H01J37/3299
摘要： There is provided a process and its system for fabricating plasma with feedback control on plasma density. This process uses a heterodyne millimeter wave interferometer as a sensor to measure the plasma density in the process container and the plasma density that is needed in the plasma fabricating process, and then provides real-time information of the measurements to a digital control device which makes numerical calculations and then drives the RF power generator to change the RF output power so as to enable the plasma density in the plasma fabricating process to be close to the expected plasma density. The conventional operation parameter method is to control air pressure, RF power, gas flow quantity, temperature and so on. However, it does not control the plasma parameter that has the most direct influence on the process. Therefore, this method cannot guarantee that, in the process of fabricating wafers, different batches of wafers will be operated under similar process plasma conditions. The present invention provides a process plasma source that can be directly controlled so as to obtain process plasma source of steady quality.
摘要翻译：提供了一种用于制造等离子体的方法及其系统，其具有对等离子体密度的反馈控制。该方法使用外差毫米波干涉仪作为传感器来测量处理容器中的等离子体密度和等离子体制造过程中所需的等离子体密度，然后将测量值的实时信息提供给数字控制装置，该数字控制装置数值计算，然后驱动射频发射器改变射频输出功率，使等离子体制造过程中的等离子体密度接近于预期的等离子体密度。常规的操作参数方法是控制空气压力，射频功率，气体流量，温度等。然而，它不控制对过程有最直接影响的等离子体参数。因此，该方法不能保证在制造晶片的过程中，不同批次的晶片将在类似的工艺等离子体条件下运行。本发明提供可直接控制以获得质量稳定的工艺等离子体源的工艺等离子体源。

2. 发明申请

US20060226786A1 Inductively-coupled plasma etch apparatus and feedback control method thereof 审中-公开
标题翻译：电感耦合等离子体蚀刻装置及其反馈控制方法
公开(公告)号：US20060226786A1
公开(公告)日：2006-10-12
申请号：US11260011
申请日：2005-10-26
申请人： Chaung Lin , Ken-Chyang Leou , Cheng-Hung Chang , Kai-Mu Hsiao
发明人： Chaung Lin , Ken-Chyang Leou , Cheng-Hung Chang , Kai-Mu Hsiao
IPC分类号： H01J7/24
CPC分类号： H01J37/3299 , H01J37/321
摘要： An inductively-coupled plasma etch apparatus and a feedback control method thereof are provided. A voltage/current measuring device is connected to an electrostatic chuck of the plasma etching apparatus, so as to measure the RF current, voltage and the phase angle between them on the electrostatic chuck. The ion current and the RF bias voltage are obtained by calculation of the RF current, voltage and the phase angle. Finally, using the obtained ion current and the RF bias voltage to feedback control the RF power generator in order to achieve the desired plasma status.
摘要翻译：提供了电感耦合等离子体蚀刻装置及其反馈控制方法。电压/电流测量装置连接到等离子体蚀刻装置的静电卡盘，以便测量静电卡盘上的RF电流，电压和它们之间的相位角。通过计算RF电流，电压和相位角获得离子电流和RF偏置电压。最后，使用获得的离子电流和RF偏置电压来反馈控制RF发生器，以实现期望的等离子体状态。

3. 发明申请

US20070020599A1 Bio-expression system and the method of the same 有权
标题翻译：生物表达系统及其方法相同
公开(公告)号：US20070020599A1
公开(公告)日：2007-01-25
申请号：US11169890
申请日：2005-06-30
申请人： Ann-Shyn Chiang , Yung-Chang Chen , Chaung Lin , Yu-Tai Ching , Chuan Tang , Hsiu-Ming Chang
发明人： Ann-Shyn Chiang , Yung-Chang Chen , Chaung Lin , Yu-Tai Ching , Chuan Tang , Hsiu-Ming Chang
IPC分类号： G09B23/00
CPC分类号： G09B23/36
摘要： The bio-expression system comprising: a process system used to process data and a three-dimension image generating module embedded in the computing system, wherein while input of a set of two-dimensional individual model sections is fed into the process system, the three-dimension image generating module is responsive to the input of the two-dimension individual model sections and is capable of processing an individual model construction and model-averaging procedure, thereby generating an average model for each individual dataset. A database includes a bio-expression sub-database, cellular network sub-database and fine structure sub-database, wherein the database is coupled to the process system to store at least the average model. A stereoscopic projecting system is coupled to the process system to display stereoscopic images for active or passive virtual reality applications, thereby presenting the bio-expressions, cellular networks or bio-fine structures under the input instruction of the process system.
摘要翻译：生物表达系统包括：用于处理数据的处理系统和嵌入在计算系统中的三维图像生成模块，其中当一组二维单个模型部分的输入被馈送到处理系统中时，三个尺寸图像生成模块响应于二维单独模型部分的输入，并且能够处理单个模型构造和模型平均过程，从而为每个单独的数据集生成平均模型。数据库包括生物表达子数据库，蜂窝网络子数据库和精细结构子数据库，其中数据库耦合到处理系统以至少存储平均模型。立体投影系统耦合到处理系统以显示用于主动或被动虚拟现实应用的立体图像，从而在处理系统的输入指令下呈现生物表达，蜂窝网络或生物细微结构。

4. 发明授权

US07742878B2 Bio-expression system and the method of the same 有权
标题翻译：生物表达系统及其方法相同
公开(公告)号：US07742878B2
公开(公告)日：2010-06-22
申请号：US11169890
申请日：2005-06-30
申请人： Ann-Shyn Chiang , Yung-Chang Chen , Chaung Lin , Yu-Tai Ching , Chuan Yi Tang , Hsiu-Ming Chang
发明人： Ann-Shyn Chiang , Yung-Chang Chen , Chaung Lin , Yu-Tai Ching , Chuan Yi Tang , Hsiu-Ming Chang
IPC分类号： G01N33/53 , G06F7/00
CPC分类号： G09B23/36
摘要： The bio-expression system comprising: a process system used to process data and a three-dimension image generating module embedded in the computing system, wherein while input of a set of two-dimensional individual model sections is fed into the process system, the three-dimension image generating module is responsive to the input of the two-dimension individual model sections and is capable of processing an individual model construction and model-averaging procedure, thereby generating an average model for each individual dataset. A database includes a bio-expression sub-database, cellular network sub-database and fine structure sub-database, wherein the database is coupled to the process system to store at least the average model. A stereoscopic projecting system is coupled to the process system to display stereoscopic images for active or passive virtual reality applications, thereby presenting the bio-expressions, cellular networks or bio-fine structures under the input instruction of the process system.
摘要翻译：生物表达系统包括：用于处理数据的处理系统和嵌入在计算系统中的三维图像生成模块，其中当一组二维单个模型部分的输入被馈送到处理系统中时，三个尺寸图像生成模块响应于二维单独模型部分的输入，并且能够处理单个模型构造和模型平均过程，从而为每个单独的数据集生成平均模型。数据库包括生物表达子数据库，蜂窝网络子数据库和精细结构子数据库，其中数据库耦合到处理系统以至少存储平均模型。立体投影系统耦合到处理系统以显示用于主动或被动虚拟现实应用的立体图像，从而在处理系统的输入指令下呈现生物表达，蜂窝网络或生物细微结构。

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