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    • 4. 发明授权
    • Giant magnetoresistive (GMR) sensor element with enhanced magnetoresistive (MR) coefficient
    • 具有增强磁阻(MR)系数的巨磁阻(GMR)传感器元件
    • US06292336B1
    • 2001-09-18
    • US09408703
    • 1999-09-30
    • Cheng T. HorngRu-Ying TongKochan JuMao-Min ChenJei-Wei ChangSimon H. Liao
    • Cheng T. HorngRu-Ying TongKochan JuMao-Min ChenJei-Wei ChangSimon H. Liao
    • G11B5127
    • B82Y25/00B82Y10/00G01R33/093G11B5/3903G11B5/3967G11B2005/3996H01F10/3268
    • A method for forming a giant magnetoresistive (GMR) sensor element, and a giant magnetoresistive (GMR) sensor element formed in accord with the method. In accord with the method, there is first provided a substrate. There is then formed over the substrate a seed layer formed of a magnetoresistive (MR) resistivity sensitivity enhancing material selected from the group consisting or nickel-chromium alloys and nickel-iron-chromium alloys. There is then formed over the seed layer a nickel oxide material layer. Finally, there is then formed over the nickel oxide material layer a free ferromagnetic layer separated from a pinned ferromagnetic layer in turn formed thereover by a non-magnetic conductor spacer layer, where the pinned ferromagnetic layer in turn has a pinning material layer formed thereover. The method contemplates a giant magnetoresistive (GMR) sensor element formed in accord with the method. The nickel oxide material layer provides the giant magnetoresistive (GMR) sensor element with an enhanced magnetoresistive (MR) resistivity sensitivity.
    • 一种用于形成巨磁阻(GMR)传感器元件的方法,以及根据该方法形成的巨磁阻(GMR)传感元件。 根据该方法,首先提供基板。 然后在衬底上形成由选自镍铬合金和镍 - 铁 - 铬合金的磁阻(MR)电阻率敏感度增强材料形成的晶种层。 然后在种子层上形成氧化镍材料层。 最后,然后在氧化镍材料层上形成与被钉扎的铁磁性层分离的自由铁磁层,然后由非磁性导体间隔层形成,其中钉扎的铁磁层又形成有钉扎材料层。 该方法考虑了根据该方法形成的巨磁阻(GMR)传感器元件。 氧化镍材料层提供具有增强的磁阻(MR)电阻率敏感性的巨磁阻(GMR)传感器元件。