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1. 发明申请

US20130291795A1 THIN FILM DEPOSITION SYSTEM WITH COOLING MODULE 审中-公开
标题翻译：具有冷却模块的薄膜沉积系统
公开(公告)号：US20130291795A1
公开(公告)日：2013-11-07
申请号：US13464595
申请日：2012-05-04
申请人： Cheng Chia Fang , Cheng Chieh Yang
发明人： Cheng Chia Fang , Cheng Chieh Yang
IPC分类号： C23C16/46 , C23C16/52 , F28F9/00
CPC分类号： C23C16/46 , C23C16/4584 , C23C16/463
摘要： A film deposition apparatus is disclosed. The apparatus comprises: a reaction chamber, a susceptor, a heating module, a driving module, and a cooling module. The susceptor is used for bearing at least one wafer; the heating module is used for heating the wafer; the driving module is used for driving the susceptor to rotate. The cooling module is disposed between the heating module and the driving module. The cooling module is configured to make the temperature distribution between the heating module and the driving module discontinuous.
摘要翻译：公开了一种成膜装置。该装置包括：反应室，基座，加热模块，驱动模块和冷却模块。基座用于承载至少一个晶片; 加热模块用于加热晶片; 驱动模块用于驱动基座旋转。冷却模块设置在加热模块和驱动模块之间。冷却模块被配置为使加热模块和驱动模块之间的温度分布不连续。

2. 发明申请

US20120321787A1 ROTATION SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF 审中-公开
标题翻译：用于薄膜形成的旋转系统及其方法
公开(公告)号：US20120321787A1
公开(公告)日：2012-12-20
申请号：US13162431
申请日：2011-06-16
申请人： Cheng Chia Fang , Cheng Chieh Yang , Heng Liu
发明人： Cheng Chia Fang , Cheng Chieh Yang , Heng Liu
IPC分类号： C23C16/458 , C23C16/46
CPC分类号： H01L21/68764 , C23C16/45502 , C23C16/45565 , C23C16/4584 , H01L21/68771
摘要： System and method for forming one or more layers of one or more materials on one or more substrates. The system includes a rotating shell, a susceptor component supported by the rotating shell, and a driving component below the susceptor component and configured to drive the rotating shell and the susceptor component to rotate around a susceptor axis. Additionally, the system includes one or more holder gears located on the susceptor component and configured to rotate around the susceptor axis with the susceptor component and support the one or more substrates, and a central gear engaged to the one or more holder gears and configured to cause the one or more holder gears to rotate around one or more holder axes respectively if the one or more holder gears rotate around the susceptor axis. The susceptor axis is different from the one or more holder axes.
摘要翻译：用于在一个或多个基底上形成一层或多层材料的一层或多层的系统和方法。该系统包括旋转壳体，由旋转壳体支撑的基座部件和基座部件下方的驱动部件，并且构造成驱动旋转壳体和基座部件围绕基座轴线旋转。另外，该系统包括位于基座部件上的一个或多个保持器齿轮，并且被配置成围绕基座轴线与基座部件一起旋转并且支撑一个或多个基板以及与一个或多个保持器齿轮接合并配置成如果一个或多个保持器齿轮围绕基座轴线旋转，则一个或多个保持器齿轮分别围绕一个或多个保持器轴旋转。基座轴与一个或多个保持器轴不同。

3. 发明申请

US20120321790A1 ROTATION SYSTEM FOR THIN FILM FORMATION 审中-公开
标题翻译：薄膜形成旋转系统
公开(公告)号：US20120321790A1
公开(公告)日：2012-12-20
申请号：US13354225
申请日：2012-01-19
申请人： Cheng Chia Fang , Cheng Chieh Yang
发明人： Cheng Chia Fang , Cheng Chieh Yang
IPC分类号： C23C16/458 , C23C16/455
CPC分类号： C23C16/458 , C23C16/455 , C30B25/12
摘要： A system for forming one or more layers of material on one or more substrates is disclosed. The system includes a susceptor that rotates around a central susceptor axis. One or more holder gears are located on the susceptor. The holder gears may rotate around the central susceptor axis with the susceptor. A central gear engaged to the holder gears may cause the holder gears to rotate around holder axes of the respective holder gears while the holder gears rotate around the central susceptor axis. The susceptor and the central gear may rotate independently.
摘要翻译：公开了一种用于在一个或多个基底上形成一层或多层材料的系统。该系统包括围绕中心基座轴线旋转的基座。一个或多个保持器齿轮位于基座上。保持器齿轮可以与感受器围绕中心基座轴线旋转。接合到保持器齿轮的中心齿轮可以使得保持器齿轮围绕相应的保持器齿轮的保持器轴线旋转，同时保持器齿轮围绕中心基座轴线旋转。基座和中心齿轮可独立旋转。

4. 发明申请

US20120321788A1 ROTATION SYSTEM FOR THIN FILM FORMATION 审中-公开
标题翻译：薄膜形成旋转系统
公开(公告)号：US20120321788A1
公开(公告)日：2012-12-20
申请号：US13282161
申请日：2011-10-26
申请人： Cheng Chieh Yang
发明人： Cheng Chieh Yang
IPC分类号： C23C16/458 , B05C13/00 , C23C16/46 , F16H1/28
CPC分类号： H01L21/68764 , C23C16/45502 , C23C16/45565 , C23C16/4584 , H01L21/68771
摘要： A system for forming one or more layers of material on one or more substrates is disclosed. The system includes a susceptor that rotates around a central susceptor axis. One or more holder gears are located on the susceptor. The holder gears may rotate around the central susceptor axis with the susceptor. Teeth of at least two adjacent holder gears at least partially overlap without touching. A central gear engaged to the holder gears may cause the holder gears to rotate around holder axes of the respective holder gears while the holder gears rotate around the central susceptor axis.
摘要翻译：公开了一种用于在一个或多个基底上形成一层或多层材料的系统。该系统包括围绕中心基座轴线旋转的基座。一个或多个保持器齿轮位于基座上。保持器齿轮可以与感受器围绕中心基座轴线旋转。至少两个相邻的保持器齿轮的牙齿至少部分重叠而不接触。接合到保持器齿轮的中心齿轮可以使得保持器齿轮围绕相应的保持器齿轮的保持器轴线旋转，同时保持器齿轮围绕中心基座轴线旋转。

5. 发明申请

US20130108792A1 LOADING AND UNLOADING SYSTEM FOR THIN FILM FORMATION AND METHOD THEREOF 审中-公开
标题翻译：用于薄膜形成的装载和卸载系统及其方法
公开(公告)号：US20130108792A1
公开(公告)日：2013-05-02
申请号：US13282125
申请日：2011-10-26
申请人： Cheng Chieh Yang
发明人： Cheng Chieh Yang
IPC分类号： B05C13/00 , B05D1/00 , B05D1/36 , B05C5/00
CPC分类号： C23C16/45565 , C23C16/4586 , C23C16/54
摘要： A system for forming one or more layers of material on one or more substrates is described. The system includes a vacuum chamber and a showerhead located in the vacuum chamber. A door in a wall of the vacuum chamber allows for loading and unloading of the one or more substrates in the vacuum chamber while under vacuum. A drive mechanism coupled to the showerhead moves the showerhead between a first position and a second position while under vacuum. In the first position, the showerhead is positioned to allow access to the door for loading and unloading of the one or more substrates through the door. In the second position, the showerhead is positioned to inhibit access to the door inside the vacuum chamber.
摘要翻译：描述了在一个或多个基底上形成一层或多层材料的系统。该系统包括位于真空室中的真空室和喷头。在真空室的壁上的门允许在真空下在真空室中装载和卸载一个或多个基板。联接到喷头的驱动机构在真空下在第一位置和第二位置之间移动喷头。在第一位置，喷头被定位成允许进入门以通过门装载和卸载一个或多个基板。在第二位置，喷头被定位成禁止进入真空室内的门。

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