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    • 1. 发明申请
    • Wafer type probe card, method for fabricating the same, and semiconductor test apparatus having the same
    • 晶圆型探针卡及其制造方法以及具有该晶片的半导体测试装置
    • US20080048689A1
    • 2008-02-28
    • US11892433
    • 2007-08-23
    • Chang-hwan Lee
    • Chang-hwan Lee
    • G01R31/02G01R1/073H01L21/44
    • G01R1/07307G01R3/00G01R31/2886
    • Example embodiments may provide a wafer type probe card, a method of fabricating a wafer type probe card, and/or a semiconductor test apparatus having the wafer type probe card. The wafer type probe card may include a semiconductor and a plurality of probing chips. The semiconductor substrate may include a plurality of probing area each including a first surface and/or a second surface opposite to the first surface. Each of the plurality of probing chips may include a plurality of conductive first pads arranged in the first surface of each of the plurality of probing areas and/or a plurality of conductive second pads arranged in the second surface of each the plurality of probing chips to be respectively connected to the first pads.
    • 示例性实施例可以提供晶片型探针卡,制造晶片型探针卡的方法和/或具有晶片型探针卡的半导体测试装置。 晶片型探针卡可以包括半导体和多个探测芯片。 半导体衬底可以包括多个探测区域,每个探测区域包括与第一表面相对的第一表面和/或第二表面。 多个探测芯片中的每一个可以包括布置在多个探测区域中的每一个的第一表面中的多个导电第一焊盘和/或布置在每个多个探测芯片的第二表面中的多个导电第二焊盘, 分别连接到第一焊盘。
    • 3. 发明授权
    • Wafer type probe card, method for fabricating the same, and semiconductor test apparatus having the same
    • 晶圆型探针卡及其制造方法以及具有该晶片的半导体测试装置
    • US07616015B2
    • 2009-11-10
    • US11892433
    • 2007-08-23
    • Chang-hwan Lee
    • Chang-hwan Lee
    • G01R31/02
    • G01R1/07307G01R3/00G01R31/2886
    • Example embodiments may provide a wafer type probe card, a method of fabricating a wafer type probe card, and/or a semiconductor test apparatus having the wafer type probe card. The wafer type probe card may include a semiconductor and a plurality of probing chips. The semiconductor substrate may include a plurality of probing area each including a first surface and/or a second surface opposite to the first surface. Each of the plurality of probing chips may include a plurality of conductive first pads arranged in the first surface of each of the plurality of probing areas and/or a plurality of conductive second pads arranged in the second surface of each the plurality of probing chips to be respectively connected to the first pads.
    • 示例性实施例可以提供晶片型探针卡,制造晶片型探针卡的方法和/或具有晶片型探针卡的半导体测试装置。 晶片型探针卡可以包括半导体和多个探测芯片。 半导体衬底可以包括多个探测区域,每个探测区域包括与第一表面相对的第一表面和/或第二表面。 多个探测芯片中的每一个可以包括布置在多个探测区域中的每一个的第一表面中的多个导电第一焊盘和/或布置在每个多个探测芯片的第二表面中的多个导电第二焊盘, 分别连接到第一焊盘。