会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明申请
    • VALVE FOR VACUUM PROCESS
    • 真空阀门
    • US20120126159A1
    • 2012-05-24
    • US13246181
    • 2011-09-27
    • Dong-Min LEE
    • Dong-Min LEE
    • F16K1/00
    • F16K51/02F16K31/122F16K41/10H01L21/67017
    • Provided is a valve for vacuum process, including: a first valve body having an inlet port and an outlet port; a sealing unit configured to move forward to and backward from the inlet port so as to have a closed position and an open position; a shaft covered with a bellows, and configured to move the sealing unit between the closed position and the open position; a cover for shielding the bellows from corrosive gas when the sealing unit is in the open position; and a cover guide unit configured to guide the cover to move along the shaft.
    • 提供一种用于真空处理的阀,包括:具有入口和出口的第一阀体; 密封单元,其构造成从所述入口向前和向后移动以具有闭合位置和打开位置; 被覆盖有波纹管的轴,并且构造成使所述密封单元在所述关闭位置和所述打开位置之间移动; 当密封单元处于打开位置时,用于屏蔽波纹管免受腐蚀性气体的盖子; 以及盖引导单元,其构造成引导盖沿着轴移动。