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    • 6. 发明申请
    • METHOD FOR PREPARING Pt THIN FILMS USING ELECTROSPRAY DEPOSITION AND Pt THIN FILMS FORMED BY THE METHOD
    • 使用电沉积沉积法制备Pt薄膜的方法和由该方法形成的Pt薄膜
    • US20110177356A1
    • 2011-07-21
    • US12849125
    • 2010-08-03
    • Oh Shim JooKwang Deog JungJyotiprakash B. Yadav
    • Oh Shim JooKwang Deog JungJyotiprakash B. Yadav
    • B32B15/01B05D1/04
    • C23C18/08C23C18/1216C23C18/1241C23C18/1287C23C18/1291Y10T428/12028Y10T428/12875
    • The present invention relates to a method for preparing Pt thin films using electrospray deposition, more specifically a method for preparing platinum thin film using electrospray deposition, including dissolving a platinum (Pt) precursor in ethanol to prepare a precursor solution for spraying (Step 1); applying a DC voltage between a substrate holder and a nozzle of an electrospraying device and then spraying the precursor solution prepared in Step 1 on a substrate which is maintained at about 100° C. to about 180° C. to form a platinum thin film (Step 2); and subjecting the platinum thin film formed in Step 2 to a heat treatment (Step 3). According to the present invention, the thickness of the platinum thin film may be easily regulated by controlling the amount of a precursor solution sprayed, and the platinum thin film may be continuously prepared on a substrate which has a wide area, therefore a highly active platinum thin film may be obtained by using a small amount of platinum which is expensive, and the film may be usefully used as an Pt electrode used a stable cathode electrode for a process which converts the photo energy into electric or chemical energy, or for a wastewater treatment system or a water purification system.
    • 本发明涉及一种使用电喷雾沉积制备Pt薄膜的方法,更具体地说,一种使用电喷雾沉积制备铂薄膜的方法,包括将铂(Pt)前体溶解在乙醇中以制备用于喷雾的前体溶液(步骤1) ; 在基板保持器和电喷雾装置的喷嘴之间施加DC电压,然后将在步骤1中制备的前体溶液喷射到保持在约100℃至约180℃的基板上以形成铂薄膜( 第2步); 并对步骤2中形成的铂薄膜进行热处理(步骤3)。 根据本发明,可以通过控制喷射的前体溶液的量来容易地调节铂薄膜的厚度,并且可以在具有广泛面积的基板上连续制备铂薄膜,因此高活性铂 可以通过使用昂贵的少量铂来获得薄膜,并且该膜可以有用地用作用于将光能转化为电或化学能的方法的稳定阴极电极的Pt电极,或用于废水 处理系统或净水系统。