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    • 3. 发明申请
    • Source for thermal physical vapor deposition of organic electroluminescent layers
    • 有机电致发光层热物理气相沉积的来源
    • US20060070576A1
    • 2006-04-06
    • US11266366
    • 2005-11-04
    • Ki KimYoon HanYoon Tak
    • Ki KimYoon HanYoon Tak
    • C23C16/00
    • C23C14/12C23C14/243C23C14/543H01L51/56
    • The present invention disclosed the deposition source installed in a chamber, heated by applied electric power to transfer heat to a vapor deposition material received therein and applying a vaporized deposition material generated therein to a substrate to form deposition organic electroluminescent layers onto the substrate, and comprising a vessel consisted of a top plate on which a vapor efflux aperture is formed, a side wall, and a bottom wall; a heating means for supplying heat to the deposition material received in the vessel, the heating means being capable of moving vertically; and a means for moving the heating means (or the bottom wall), the moving means (or the bottom wall) being operated in response to the signal of a sensing means on varied distances between the heating means and the surface of said deposition material. Thus, the heating means is moved downward (or the bottom wall) is moved upward by the moving means to maintain the distance between the heating means (or the substrate to be coated) and the surface of the deposition material at an initially-set value when the thickness of the deposition material is decreased.
    • 本发明公开了安装在室中的沉积源,其通过施加的电力加热,以将热量传递到容纳在其中的气相沉积材料,并将其中产生的汽化沉积材料施加到衬底上以在衬底上形成沉积有机电致发光层,并且包括 一个容器由一个形成有蒸汽流出孔的顶板,一个侧壁和一个底壁组成; 加热装置,用于向容纳在容器中的沉积材料供热,所述加热装置能够垂直移动; 以及用于移动加热装置(或底壁)的装置,移动装置(或底壁)响应感测装置的信号在加热装置和所述沉积材料的表面之间的不同距离上被操作。 因此,加热装置向下移动(或底壁)通过移动装置向上移动,以将加热装置(或待涂覆的基板)与沉积材料的表面之间的距离保持在初始设定值 当沉积材料的厚度减小时。