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    • 1. 发明授权
    • Grating-assisted co-directional vertical coupler optical filter having well-suppressed sidelobe characteristics and method of fabricating the same
    • 具有良好抑制旁瓣特性的光栅辅助同向垂直耦合器滤光器及其制造方法
    • US06597838B1
    • 2003-07-22
    • US09135730
    • 1998-08-18
    • Chan Yong ParkSeung Won LeeDug Bong KimKwang Ryong OhHong Man Kim
    • Chan Yong ParkSeung Won LeeDug Bong KimKwang Ryong OhHong Man Kim
    • G02B634
    • G02B6/12002G02B6/12007G02B2006/12107G02B2006/12147
    • The present invention relates to an optical filter whose a sidelobe disturbing a characteristic of an optical filter by weighting an optical coupling efficiency between waveguides is controlled upon applying a selective area growth method in a wavelength selective variable semiconductor optical filter and method of fabricating the same. The present invention can control the thickness of growth layer selectively by controlling the width of the dielectric thin film mask whose the growth is not achieved in the selective area growth method, can control the distance between two waveguides of the wavelength selective variable semiconductor optical filter by applying the result on the distance control between two waveguides. Accordingly, there can be changed an optical coupling efficiency between two waveguides spatially. Because the sidelobe characteristics is largely improved if the distance between two waveguides is controlled temporarily to be corresponded to one period of Hamming function, there can be fabricated a semiconductor optical filter whose the characteristic is very excellent when applying the present invention.
    • 本发明涉及一种滤光器,其通过在波长选择性可变半导体光学滤波器中应用选择性区域增长方法及其制造方法来控制通过对波导之间的光耦合效率进行加权来干扰滤光器的特性的旁瓣。 本发明可以通过控制在选择区域生长方法中未实现生长的电介质薄膜掩模的宽度来选择性地控制生长层的厚度,可以通过以下方式控制波长选择性可变半导体光学滤波器的两个波导之间的距离 将结果应用于两个波导之间的距离控制。 因此,可以在空间上改变两个波导之间的光耦合效率。 因为如果临时控制两个波导之间的距离以对应于汉明功能的一个周期,则旁瓣特性被大大改善,所以可以制造当应用本发明时其特性非常好的半导体滤光器。