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1. 发明申请

WO2014022160A2 INTRACAVITY LOSS ELEMENT FOR POWER AMPLIFIER 审中-公开
标题翻译：功率放大器的内部损耗因素
公开(公告)号：WO2014022160A2
公开(公告)日：2014-02-06
申请号：PCT/US2013/051725
申请日：2013-07-23
申请人： CYMER, LLC
发明人： RAFAC, Robert, J. , MELCHIOR, John, T. , ROKITSKI, Rostislava
IPC分类号： G21K5/02 , H01S3/10
CPC分类号： H01S3/235 , G03F7/70025 , H01S3/0811 , H01S3/0835 , H01S3/106 , H01S3/1061 , H01S3/225
摘要： A regenerative ring resonator In the path of a light beam includes a discharge chamber having electrodes and. a gain medium between the electrodes; an optical, coupler; and an attenuation optical system. The optical coupler is partially reflective so that at least a portion of a light beam impinging on the optical coupler from the discharge chamber is reflected back through the discharge chamber and at least a portion of the light beam impinging on the optical coupler from the discharge chamber is transmitted through the optical coupler, The attenuation optical system is in the path of the light beam within the resonator, and has a plurality of distinct attenuation states. Each attenuation state defines a distinct attenuation factor applied to the light beam to provide adjustment of an energy of the: light beam.
摘要翻译：再生环形谐振器在光束的路径中包括具有电极的放电室。电极之间的增益介质; 一个光学耦合器; 和衰减光学系统。光耦合器是部分反射的，使得从放电室入射到光耦合器上的光束的至少一部分通过放电室被反射回来，并且从放电室射到光耦合器上的至少一部分光束通过光耦合器传输。衰减光学系统位于谐振器内光束的路径上，并具有多个不同的衰减状态。每个衰减状态定义了一个截然不同的衰减因子，应用于光束以提供：光束能量的调节。

2. 发明授权

EP1668313B1 GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE 有权转让
标题翻译：气体放电MOPA激光光谱分析模块
公开(公告)号：EP1668313B1
公开(公告)日：2018-01-31
申请号：EP04784260.4
申请日：2004-09-15
申请人： Cymer, LLC
发明人： RAO, Rajasekhar, M. , MELCHIOR, John, T. , GLATZEL, Hoger, K.
IPC分类号： G01B9/02 , G01J3/02 , G01J3/26 , G01J9/02
CPC分类号： G01J3/26 , G01J3/02 , G01J3/027 , G01J9/0246
摘要： A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Deltalambda= lambda0 [DOD DID2] / [8f -D0 ] where lambda0 is an assumed constant wavelength and D0 = (DOD - DID)2, and f is the focal length.

3. 发明授权

EP1668312B1 GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE 有权转让
标题翻译：气体放MOPA激光光谱分析模块
公开(公告)号：EP1668312B1
公开(公告)日：2017-03-22
申请号：EP04784259.6
申请日：2004-09-15
申请人： Cymer, LLC
发明人： RAO, Rajasekhar, M. , MELCHIOR, John, T. , GLATZEL, Hoger, K.
IPC分类号： G01B9/02 , G01J3/02 , G01J3/26 , G01J9/02
CPC分类号： G01J3/26 , G01J3/02 , G01J3/027 , G01J9/0246

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