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1. 发明申请

WO2013002970A1 SYSTEM AND METHOD FOR AUTOMATIC GAS OPTIMIZATION IN A TWO-CHAMBER GAS DISCHARGE LASER SYSTEM 审中-公开
标题翻译：二室气体放电激光系统中自动气体优化的系统与方法
公开(公告)号：WO2013002970A1
公开(公告)日：2013-01-03
申请号：PCT/US2012/040933
申请日：2012-06-05
申请人： CYMER, INC. , O'BRIEN, Kevin, M. , THORNES, Joshua, J. , RIGGS, Daniel, J. , JIANG, Rui
发明人： O'BRIEN, Kevin, M. , THORNES, Joshua, J. , RIGGS, Daniel, J. , JIANG, Rui
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/104 , H01S3/2251 , H01S3/2366
摘要： A system and method for automatically performing gas optimization after a refill in the chambers of a two chamber gas discharge laser such as an excimer laser. The laser is continuously fired at a low power output, and the gas in the amplifier laser chamber bled until the discharge voltage meets/exceeds a minimum value without dropping the pressure below a minimum value. The power output is increased, and the gas bled again until the voltage and pressure meet/exceed the minimum values. The laser is then fired in a burst pattern that approximates the expected firing of the laser in operation, and the gas bled until the discharge voltage meets/exceeds the minimum value and the output energy meets/exceeds a minimum value, again without dropping the pressure in the chamber below the minimum value. Once the minimum values are provided, the process runs quickly without manual interaction.
摘要翻译：一种用于在诸如准分子激光器的二室气体放电激光器的腔室中的再填充之后自动执行气体优化的系统和方法。激光器以低功率输出连续点火，并且放大器激光器室中的气体排出直到放电电压达到/超过最小值，而不将压力降低到最小值以下。功率输出增加，气体再次流出，直到电压和压力达到/超过最小值。然后以突发模式发射激光，其近似于操作中激光器的预期发射，并且气体流出直到放电电压达到/超过最小值，并且输出能量达到/超过最小值，同时不降低压力在室内低于最小值。一旦提供最小值，该过程即可快速运行，无需手动交互。

2. 发明申请

WO2013003193A1 SYSTEM AND METHOD FOR HIGH ACCURACY GAS REFILL IN A TWO CHAMBER GAS DISCHARGE LASER SYSTEM 审中-公开
标题翻译：两台气体放电激光系统中高精度气体补充系统及方法
公开(公告)号：WO2013003193A1
公开(公告)日：2013-01-03
申请号：PCT/US2012/043541
申请日：2012-06-21
申请人： CYMER, INC. , JIANG, Rui , THORNES, Joshua, J. , RIGGS, Daniel, J. , O'BRIEN, Kevin, M.
发明人： JIANG, Rui , THORNES, Joshua, J. , RIGGS, Daniel, J. , O'BRIEN, Kevin, M.
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/22 , H01S3/225 , H01S3/2308 , H01S3/2366
摘要： Systems and methods for automatically performing a high accuracy gas refill, in a laser chamber of a two chamber gas discharge laser such as an excimer laser are disclosed. Based, upon a target pressure and halogen concentration that is either predetermined or entered by a user, and with no further user action, a non-halogen containing gas is added to the chamber to a first pressure, followed by the addition of halogen containing gas to a second pressure which is greater than a target pressure for the chamber, such that the halogen content in the gas at the second pressure is at a desired concentration. The gas in the chamber is bled until the pressure drops to the target pressure. The amount of non-halogen containing gas added is estimated automatically, and the amount of halogen containing gas is measured so that the desired concentration is obtained, taking into account both temperature and any gas remaining in the fill pipes from prior laser operation.
摘要翻译：公开了在诸如准分子激光器的二室气体放电激光器的激光室中自动执行高精度气体补充的系统和方法。基于目标压力和卤素浓度，其由用户预先确定或输入，并且在不再进一步的用户动作的情况下，将不含卤素的气体加入室中至第一压力，然后加入含卤素气体达到大于室的目标压力的第二压力，使得在第二压力下的气体中的卤素含量处于所需浓度。室内的气体流出，直到压力下降到目标压力。自动估算不含卤素气体的量，并测量含卤素气体的量，以便从先前的激光操作考虑到温度和填充管中剩余的任何气体，获得所需的浓度。

3. 发明申请

WO2023082231A1 DIAGNOSTIC SERVICE IN SPEECH RECOGNITION 审中-公开
公开(公告)号：WO2023082231A1
公开(公告)日：2023-05-19
申请号：PCT/CN2021/130536
申请日：2021-11-15
申请人： MICROSOFT TECHNOLOGY LICENSING, LLC , LI, Haoxuan , JIANG, Rui , LIU, Yang , LIN, Edward C , SUN, Lei , ZHAO, Che
发明人： LI, Haoxuan , JIANG, Rui , LIU, Yang , LIN, Edward C , SUN, Lei , ZHAO, Che
IPC分类号： G10L15/06 , G10L15/183 , G10L13/00
摘要： Systems and methods are provided for identifying targeted datasets that are configured to facilitate an improvement in the accuracy of an acoustic model included in the automatic speech recognition system. Systems obtain a obtain a test dataset comprising (i) audio data having natural speech utterances and (ii) a transcription of the natural speech utterances. Systems generate a text-to-speech dataset comprising audio data having synthesized speech utterances based on the transcription of the natural speech utterances. Systems apply the test dataset and the text-to-speech dataset to the acoustic model to obtain a first acoustic model output and a second acoustic model output, respectively. Systems identify a first set of errors in the first acoustic model output and a second set of errors in the second acoustic model output. Finally, based on comparing the first set of errors and the second set of errors, an acoustic model error ratio is generated.

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