专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2011130097A2 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 审中-公开
标题翻译：离子束样品制备装置和方法
公开(公告)号：WO2011130097A2
公开(公告)日：2011-10-20
申请号：PCT/US2011/031649
申请日：2011-04-08
申请人： COYLE, Steven Thomas , HUNT, John Andrew
发明人： COYLE, Steven Thomas , HUNT, John Andrew
IPC分类号： G01N1/28 , H01J37/20
CPC分类号： G01N1/32 , H01J37/31 , H01J2237/026 , H01J2237/2007 , H01J2237/3118
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing.
摘要翻译：公开了用于使用实施例的离子束样品制备装置和方法的实施方案。该装置包括在真空室中的离子束照射装置，其可以将离子定向到样品，阻挡部分朝向样品的离子的屏蔽件，以及具有屏蔽保持装置的屏蔽保持台，该屏蔽保持装置可替换地和可移除地将屏蔽保持在一个位置。当屏蔽保持在屏蔽保持阶段时，屏蔽具有与屏蔽保持平台上的辅助基准特征相交的基准特征。屏蔽件具有能够将样品耐久地粘附到屏蔽件的特征，以用离子束处理样品。屏蔽和屏蔽保持阶段的补充基准特征使得样品能够准确和可重复地定位在用于样品处理和再处理的设备中。

2. 发明申请

WO2016061175A1 METHODS AND APPARATUS FOR DETERMINING, USING, AND INDICATING ION BEAM WORKING PROPERTIES 审中-公开
标题翻译：用于确定，使用和指示离子束工作特性的方法和装置
公开(公告)号：WO2016061175A1
公开(公告)日：2016-04-21
申请号：PCT/US2015/055444
申请日：2015-10-14
申请人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael Patrick , HOSMAN, Thijs C.
发明人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael Patrick , HOSMAN, Thijs C.
IPC分类号： H01J37/20
CPC分类号： H01J37/243 , G01N1/44 , H01J37/08 , H01J37/30 , H01J37/304 , H01J37/305 , H01J37/3056 , H01J37/3178 , H01J2237/081 , H01J2237/24514 , H01J2237/24535 , H01J2237/30483 , H01J2237/31 , H01J2237/3151 , H01J2237/316
摘要： Disclosed are methods and apparatus for determining, using, and indicating ion beam working properties in an apparatus that performs ion beam sample preparation and coating. A beam probe may be used to measure one or more working properties of a portion of the ion beam, generating a probe signal in a known relationship to the one or more working properties. The beam probe may generate a signal in a known relationship to one or more properties of a sputtered coating reaching a sample. The ion beam apparatus may modulate one or more characteristics of the ion beam in response to receiving a signal from the beam probe. The probe signal may be used in the ion beam apparatus to indicate one or more ion beam working properties. Related apparatus and methods also permit the measurement of the known relationship between probe signal and ion beam working properties.
摘要翻译：公开了用于在执行离子束样品制备和涂覆的装置中确定，使用和指示离子束工作特性的方法和装置。光束探测器可用于测量离子束的一部分的一个或多个工作特性，产生与一个或多个工作特性已知关系的探测信号。光束探测器可以产生与已达到样品的溅射涂层的一个或多个特性有已知关系的信号。离子束装置可以响应于接收来自束探针的信号而调制离子束的一个或多个特性。探针信号可以用于离子束装置中以指示一个或多个离子束工作特性。相关的装置和方法还允许测量探测信号和离子束工作特性之间的已知关系。

3. 发明申请

WO2016018771A1 ION BEAM SAMPLE PREPARATION AND COATING APPARATUS AND METHODS 审中-公开
标题翻译：离子束样品制备和涂层装置和方法
公开(公告)号：WO2016018771A1
公开(公告)日：2016-02-04
申请号：PCT/US2015/042149
申请日：2015-07-25
申请人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael Patrick , HOSMAN, Thijs C.
发明人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael Patrick , HOSMAN, Thijs C.
IPC分类号： H01J27/00
CPC分类号： C23C14/46 , C23C14/022 , C23C14/50 , C23C14/505 , C23C14/545 , C23C14/566 , H01J37/3053 , H01J37/3178 , H01J2237/0822 , H01J2237/184 , H01J2237/202 , H01J2237/204 , H01J2237/3146 , H01J2237/3151
摘要： Ion beam sample preparation and coating apparatus and methods are described. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.
摘要翻译：描述了离子束样品制备和涂布装置和方法。可以在一个或多个离子束中制备样品，然后在相同的装置内将涂层溅射到制备的样品上。真空转移装置可以与该装置一起使用，以便在受控环境中将样品转入和移出装置。公开了改善制备和涂布均匀性的各种方法，包括：旋转样品保留阶段; 调节样品保留期; 可变倾斜离子束照射装置，多于一个离子束照射装置，涂层厚度监测，样品的选择性屏蔽以及调节涂层供体保持器。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式