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    • 3. 发明申请
    • UNIVERSAL FIXTURE FOR MACHINING A FLAT SUBSTRATE
    • 用于加工平板基材的通用工具
    • WO2014025603A1
    • 2014-02-13
    • PCT/US2013/053169
    • 2013-08-01
    • CORNING INCORPORATEDBAO, YixingTANG, Yuyin
    • BAO, YixingTANG, Yuyin
    • B23Q3/08B25B11/00H01L21/683
    • B23Q3/088B25B11/005H01L21/6734H01L21/6838Y10T29/494
    • A fixture apparatus (10) for mounting a flat workpiece (12) to a worktable (14) has at least first and second separately positioned vacuum mount elements (20a-20b), wherein each vacuum mount element has a base (22) having a lower contact surface (24) for seating against the worktable and having a clamping surface (28) spaced apart from the lower contact surface. There is a raised portion (26) that extends orthogonal to the lower contact surface and that has an upper contact surface that is parallel to the lower contact surface for positioning against the flat workpiece, wherein a height dimension between the lower and upper contact surfaces is uniform to within +/- 0.02 mm. A vacuum chamber (40) hollowed out within the raised portion is in fluid communication with a vacuum port for providing vacuum force through the vacuum chamber to secure the workpiece against the upper contact surface.
    • 用于将平坦工件(12)安装到工作台(14)上的固定装置(10)具有至少第一和第二单独定位的真空安装元件(20a-20b),其中每个真空安装元件具有基座(22) 下接触表面(24),用于抵靠工作台并且具有与下接触表面间隔开的夹紧表面(28)。 有一个凸起部分(26),其垂直于下接触表面延伸并且具有平行于下接触表面的上接触表面,用于定位在平的工件上,其中下接触面和上接触面之间的高度尺寸是 均匀至+/- 0.02 mm。 在凸起部分中挖出的真空室(40)与真空端口流体连通,用于通过真空室提供真空力,以将工件固定在上接触表面上。