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1. 发明申请

WO2004066363A3 DUAL-AXIS TILT ACUATOR FOR MICROMIRROR ARRAY 审中-公开
标题翻译：用于微型磁盘阵列的双轴倾斜电机
公开(公告)号：WO2004066363A3
公开(公告)日：2004-10-14
申请号：PCT/US2004003560
申请日：2004-01-23
申请人： CORNING INC , TAYLOR WILLIAM , BERNSTEIN JONATHAN , BRAZZLE JOHN D
发明人： TAYLOR WILLIAM , BERNSTEIN JONATHAN , BRAZZLE JOHN D
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： G02B26/0841 , G02B26/0833 , G02B26/085
摘要： An array of movable MEMS mirror devices is provided being electromagnetically actuated in one axis and using an additional set of coils, or a single coil, positioned off of the main axis of rotation to achieve a second axis of rotation while allowing for a very high linear mirror fill factor (>80 %). This second set of coils, or second electrically wired coil, is capable of generating the necessary torque about an axis that is perpendicular to the major axis of rotation. A second embodiment is provided using electromagnetic actuation in one axis of rotation, which typically has larger rotation angles than the second axis, and electrostatic actuation in the second axis of rotation. Electrostatic pads can be used to sense rotation. When staggering adjacent pixels a center array of mirrors with no coils or electrodes provides increased radius of curvature and reducing undesirable cross-talk between adjacent mirror devices.
摘要翻译：提供了可移动的MEMS反射镜装置的阵列，其在一个轴线上被电磁致动，并且使用一组额外的线圈或单个线圈，其位于主旋转轴线之外，以实现第二旋转轴线，同时允许非常高的线性镜面填充因子（> 80％）。该第二组线圈或第二电线线圈能够围绕垂直于主旋转轴的轴产生必要的扭矩。提供了一个第二实施例，其使用一个旋转轴线中的电磁致动器，其通常具有比第二轴线更大的旋转角度，以及在第二旋转轴线中的静电致动。静电垫可用于感测旋转。当交错相邻像素时，没有线圈或电极的反射镜的中心阵列提供增加的曲率半径并减少相邻镜器件之间的不期望的串扰。

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