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    • 1. 发明申请
    • IONIC PUMP WITH PERFORATED ANODE
    • 带有阳极的离子泵
    • WO1997015943A1
    • 1997-05-01
    • PCT/FR1996001685
    • 1996-10-28
    • COMMISSARIAT A L'ENERGIE ATOMIQUEBOLORE, MichelDELOMEZ, BrunoHENRIOT, ClaudeMARTIGNAC, Jérôme
    • COMMISSARIAT A L'ENERGIE ATOMIQUE
    • H01J41/20
    • H01J41/20
    • Said pump is comprised of at least a pumping unit comprising an anode (2) having a set of juxtaposed conductor cylinders (4) and two cathodes (6, 8) placed on either side of the anode and made of a metal which, when the pump is in operation, forms on the anode a deposit capable of adsorbing and absorbing the gas, a fluid-tight wall housing (18) wherein is placed each pumping unit and which is provided with an opening (20) through which the gas can penetrate and an internal region in the extension of said opening. In at least one pumping unit facing said region, the side-wall (5) of at least one portion of the anode cylinders is perforated, the side perforations of said cylinders are directly facing the region, and for each perforated cylinder, the perforated surface of the respective cylinder is lower than 30 % of the total side surface of that same cylinder. Application to accelerators of particles and to ultravacuum or high vacuum housings.
    • 所述泵至少包括泵送单元,所述泵送单元包括具有一组并置的导体圆柱体(4)的阳极(2)和放置在所述阳极的任一侧上的两个阴极(6,8),所述阴极由金属制成, 泵在运行中,在阳极上形成能够吸附和吸收气体的沉积物,流体密封的壁壳体(18),其中设置有每个泵送单元,并且设置有开口(20),气体可穿过该开口 以及在所述开口的延伸部中的内部区域。 在面向所述区域的至少一个泵送单元中,阳极圆筒的至少一部分的侧壁(5)穿孔,所述圆柱体的侧孔直接面向该区域,并且对于每个穿孔的圆柱体,穿孔表面 相对于气缸的总侧面的30%以下。 应用于颗粒加速器和超真空或高真空外壳。
    • 3. 发明申请
    • METHOD FOR PRODUCING A SUSPENDED ELEMENT IN A MICRO-MACHINED STRUCTURE
    • 在微机械结构中生产悬挂元件的方法
    • WO1998029720A1
    • 1998-07-09
    • PCT/FR1997002437
    • 1997-12-29
    • COMMISSARIAT A L'ENERGIE ATOMIQUEROBERT, PhilippeMICHEL, FranceGRANGE, Hubert
    • COMMISSARIAT A L'ENERGIE ATOMIQUE
    • G01L09/00
    • G01L9/0042
    • The invention concerns a method for producing at least a suspended element (7), by micro-machining, using an etching technique, of a structure comprising a substrate (1) successively covered with a first so-called blocking layer (2), produced in a first material, and with a second layer (3) produced in a second material and in which the suspended element (7) is shaped. The method uses a dry etching technique using a gas whose selectivity enables the etching of the second layer (3) without affecting the blocking layer (2), under conditions established for an anisotropic etching of the second material, the etching being carried out according to a first phase for delimiting the suspended element (7) up to the level of the blocking layer (2) and being continued according to a second phase during which the release of the suspended element (7) results from the etching of the superficial layer of the suspended element delimited during the first phase and which is adjacent to the blocking layer (2).
    • 本发明涉及一种用于通过使用蚀刻技术通过微加工来生产至少悬浮元件(7)的方法,所述方法包括依次被第一所谓的阻挡层(2)覆盖的衬底(1)的结构,所述衬底 在第一材料中,并且第二层(3)以第二材料制成并且悬挂元件(7)成形。 该方法使用使用气体的干法蚀刻技术,其选择性使得能够在不影响阻挡层(2)的情况下蚀刻第二层(2),在为第二材料的各向异性蚀刻建立的条件下,根据 用于将所述悬浮元件(7)分隔直到所述阻挡层(2)的水平并且根据第二阶段继续的第一阶段,在所述第二阶段期间所述悬浮元件(7)的释放是由 所述悬浮元件在所述第一阶段界定并且与所述阻挡层(2)相邻。