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    • 1. 发明申请
    • OXIME SULFONATES AND THE USE THEROF AS LATENT ACIDS
    • OXIME硫酸盐及其作为酸性物质的用途
    • WO2007147782A2
    • 2007-12-27
    • PCT/EP2007/055936
    • 2007-06-15
    • CIBA SPECIALTY CHEMICALS HOLDING INC.YAMATO, HitoshiASAKURA, ToshikageNISHIMAE, YuichiIWAI, TakeshiIRIE, MakikoNAKAYAMA, Kazuhiko
    • YAMATO, HitoshiASAKURA, ToshikageNISHIMAE, YuichiIWAI, TakeshiIRIE, MakikoNAKAYAMA, Kazuhiko
    • G03F7/039G03F7/027C07C309/00G03C1/73
    • G03F7/0045C07C309/00C07C2603/18C08F20/36G03F7/0046G03F7/0397
    • Compounds of the formula (I), (Il) or (III), wherein R 1 is for example C 1 -C 18 alkylsulfonyl, C 1 -C 10 haloalkylsulfonyl, camphorylsulfonyl, phenyl-C 1 -C 3 alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthrylsulfonyl, phenanthrylsulfonyl or heteroarylsulfonyl, R' 1 is for example phenylenedisulfonyl, R 2 is for example CN, C 1 -C 10 haloalkyl or C 1 -C 10 haloalkyl which is substituted by (IV); Ar 1 is for example phenyl optinally substituted by a group of formula (IV); Ar' 1 is for example phenylene which optionally is substituted by a group of formula (IV); A 1 , A 2 and A 3 independently of each other are for example hydrogen, halogen, CN, or C 1 -C 18 alkyl; D 2 is for example a direct bond, O, (CO)O, (CO)S, SO 2 , OSO 2 or C 1 -C 18 alkylene; or A 3 and D 2 together form C 3 -C 30 cycloalkenyl; or A 2 and D 2 together with the carbon of the ethylenically unsaturated double bond to which they are attached form C 3 -C 30 cycloalkyl; D 3 and D 4 for example independently of each other are a direct bond, O, S, C 1 -C 18 alkylene or C 3 -C 30 cycloalkylene provided that at least one of the radicals R 2 , Ar 1 or Ar 1 ' comprises a group of the formula (IV); are suitable as photolatent acid donors and for the preparation of corresponding polymers to be employed in chemically amplified photoresists.
    • 式(I),(II)或(III)的化合物,其中R 1是例如C 1 -C 18烷基磺酰基, C 1 -C 10卤代烷基磺酰基,樟脑磺酰基,苯基-C 1 -C 3烷基磺酰基,苯基磺酰基,萘基磺酰基, 蒽基磺酰基,菲基磺酰基或杂芳基磺酰基,R 1'是例如亚苯基二磺酰基,R 2是例如CN,C 1 -C 10 (IV)取代的卤代烷基或C 1 -C 10 - 卤代烷基; Ar 1是例如被式(IV)基团取代的苯基; Ar'1是例如任选被式(IV)的基团取代的亚苯基; 彼此独立的A 1,A 2,A 3和A 3是例如氢,卤素,CN或C 1〜 SUB> -C 18 烷基; D 2是例如直接键合O,(CO)O,(CO)S,SO 2,OSO 2或C < SUB> 1 -C 18 亚烷基; 或A 3和D 2一起形成C 3〜C 30环烯基; 或者它们所连接的烯属不饱和双键的碳一起形成C 3 -C 3亚烷基, 30 环烷基; D 3和D 4,例如彼此独立地是直接键,O,S,C 1 -C 18, / SUB>亚烷基或C 3 -C 30亚环烷基,条件是基团R 2,Ar 1中的至少一个, 或者是式(Ⅳ)所示的基团。 适合作为光潜酸供体,并用于制备用于化学放大光致抗蚀剂的相应聚合物。
    • 7. 发明申请
    • SULFONIUM DERIVATIVES AND THE USE THEREOF AS LATENT ACIDS
    • 磺胺衍生物及其作为有效酸的用途
    • WO2009150074A1
    • 2009-12-17
    • PCT/EP2009/056703
    • 2009-06-02
    • BASF SENISHIMAE, YuichiASAKURA, ToshikageYAMATO, Hitoshi
    • NISHIMAE, YuichiASAKURA, ToshikageYAMATO, Hitoshi
    • C07D327/08C07D339/08G03F7/00
    • C07D339/08C07D327/08
    • Compounds of the formula (I), wherein R 1 , R 2 and R 3 for example are hydrogen, halogen, CN, C 1 -C 18 alkyl, C 1 -C 10 haloalkyl, (CO)R 8 , (CO)OR 4 , or (CO)NR 5 R 6 ; Y is O, S or CO; D 2 , D 3 and D 4 for example are a direct bond, O, S, NR 7 , CO, O(CO), (CO)O, S(CO), (CO)S, NR 7 (CO), (CO)NR 7 , SO, SO 2 , or OSO 2 , C 1 -C 18 alkylene, C 3 -C 30 cycloalkylene, C 2 -C 12 alkenylene, C 4 -C 30 cycloalkenylene, Ar 1 ; Ar 1 , Ar 2 and Ar 3 are for example phenylene, R 4 , R 5 , R 6 , R 7 and R 8 are for example hydrogen, C 3 -C 30 cycloalkyl, C 1 -C 18 alkyl, C 1 -C 10 haloalkyl, C 2 -C 12 alkenyl, C 4 -C 30 cycloalkenyl, phenyl-C 1 C 3 -alkyl; X - is Formulae (IA), (IB) or (IC); R 10 is for example C 1 -C 18 alkyl, C 1 -C 10 haloalkyl, camphoryl, phenyl-C 1 -C 3 alkyl, C 3 -C 30 cycloalkyl; and R 11 , R 12 , R 13 , R 14 and R 15 are for example C 1 -C 10 haloalkyl; are useful as polymerizable photolatent acids.
    • 式(I)化合物,其中R1,R2和R3例如是氢,卤素,CN,C1-C18烷基,C1-C10卤代烷基,(CO)R8,(CO)OR4或(CO)NR5R6; Y为O,S或CO; D2,D3和D4例如是直接键合,O,S,NR7,CO,O(CO),(CO)O,S(CO),(CO)S,NR7(CO) SO,SO 2或OSO 2,C 1 -C 18亚烷基,C 3 -C 30亚环烷基,C 2 -C 12亚烯基,C 4 -C 30环亚烯基,Ar 1; Ar 1,Ar 2和Ar 3是例如亚苯基,R 4,R 5,R 6,R 7和R 8是例如氢,C 3 -C 30环烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基; X-是式(IA),(IB)或(IC); R 10例如为C 1 -C 18烷基,C 1 -C 10卤代烷基,樟脑基,苯基-C 1 -C 3烷基,C 3 -C 30环烷基; R 11,R 12,R 13,R 14和R 15例如为C 1 -C 10卤代烷基; 可用作可聚合的光潜酸。
    • 8. 发明申请
    • LATENT ACIDS AND THEIR USE
    • 专利酸及其使用
    • WO2011104127A1
    • 2011-09-01
    • PCT/EP2011/051995
    • 2011-02-10
    • BASF SEYAMATO, HitoshiASAKURA, ToshikageMATSUMOTO, AkiraTANAKA, KeitaNISHIMAE, Yuichi
    • YAMATO, HitoshiASAKURA, ToshikageMATSUMOTO, AkiraTANAKA, KeitaNISHIMAE, Yuichi
    • C07C309/08C07C309/12C07C311/53C07C333/06C07C381/12C07C25/18G03F7/004G03F7/039C07D209/00C07D241/00C07D265/00C07D311/00C07D235/00
    • C07C381/12C07C25/18C07C309/08C07C309/12C07C311/53C07C333/06C07C2601/14C07C2602/42C07C2603/74C07D207/28C07D233/38C07D241/08C07D295/205C07D295/215C07D493/08G03F7/0045G03F7/0046G03F7/0382G03F7/0392
    • The invention pertains to a compound generating an acid of the formula (I) or (II), for instance corresponding sulfonium and iodonium salts, as well as corresponding sulfonyloximes, Formula (I) and Formula (II), wherein X is CH 2 or CO; Y is O, NR 4 , S, O(CO), O(CO)O, O(CO)NR 4 , OSO 2 , O(CS), or O(CS)NR 4 ; R 1 is for example C 1 -C 18 alkyl, C 1 -C 10 haloalkyl, C 2 -C 12 alkenyl, C 4 -C 30 cycloalkenyl, phenyl-C 1 -C 3 -alkyl, C 3 -C 30 cycloalkyl, C 3 -C 30 cycloalkyl-C 1 -C 18 alkyl, interrupted C 2 -C 18 alkyl, interrupted C 3 -C 30 cycloalkyl, interrupted C 3 -C 30 cycloalkyl-C 1 -C 18 alkyl, interrupted C 4 -C 30 cycloalkenyl, phenyl, naphthyl, anthracyl, phenanthryl, biphenylyl, fluorenyl or heteroaryl, all unsubstituted or are substituted; or R 1 is NR 12 R 13 ; R 2 and R 3 are for example C 3 -C 30 cycloalkylene, C 3 -C 30 cycloalkyl-C 1 -C 18 alkylene, C 1 -C 18 alkylene, C 1 -C 10 haloalkylene, C 2 -C 12 alkenylene, C 4 -C 30 cycloalkenylene, phenylene, naphthylene, anthracylene, phenanthrylene, biphenylene or heteroarylene; all unsubstituted or substituted; R 4 is for example C 3 -C 30 cycloalkyl, C 3 -C 30 cycloalkyl-C 1 -C 18 alkyl, C 1 -C 18 alkyl, C 1 -C 10 haloalkyl, C 2 -C 12 alkenyl, C 4 -C 30 cycloalkenyl, phenyl-C 1 -C 3 -alkyl; R 12 and R 13 are for example C 3 -C 30 cycloalkyl, C 3 -C 30 cycloalkyl-C 1 -C 18 alkyl, C 1 -C 18 alkyl, C 1 -C 10 haloalkyl, C 2 -C 12 alkenyl, C 4 -C 30 cycloalkenyl, phenyl-C 1 -C 3 -alkyl, Ar, (CO)R 15 , (CO)OR 15 or SO 2 R 15 ; and Ar is phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl or heteroaryl, all unsubstituted or substituted.
    • 本发明涉及产生式(I)或(II)的酸的化合物,例如相应的锍盐和碘鎓盐,以及相应的磺酰肟,式(I)和式(II),其中X是CH 2或CO ; Y是O,NR4,S,O(CO),O(CO)O,O(CO)NR4,OSO2,O(CS)或O(CS)NR4; R 1是例如C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基,C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,间断的C 2 -C 18烷基,间断的C 3 -C 30环烷基, 间断的C 3 -C 30环烷基-C 1 -C 18烷基,间断的C 4 -C 30环烯基,苯基,萘基,蒽基,菲基,联苯基,芴基或杂芳基,全部未取代或被取代; 或R1是NR12R13; R2和R3是例如C 3 -C 30亚环烷基,C 3 -C 30环烷基-C 1 -C 18亚烷基,C 1 -C 18亚烷基,C 1 -C 10卤代亚烷基,C 2 -C 12亚烯基,C 4 -C 30环亚烯基,亚苯基,亚萘基,亚蒽基,亚菲基,亚联苯基或亚杂芳基。 全部未取代或取代; R4是例如C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12链烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基; R 12和R 13例如为C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基,Ar,(CO)R 15 CO)OR15或SO2R15; 并且Ar是苯基,联苯基,芴基,萘基,蒽基,菲基或杂芳基,全部是未取代或取代的。