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    • 7. 发明专利
    • TRANSPARENT CONDUCTIVE FILM AND LIQUID CRYSTAL ELEMENT USING THE SAME
    • JPH10208554A
    • 1998-08-07
    • JP997197
    • 1997-01-23
    • CANON KK
    • TAKADA KUNIO
    • G02F1/1343B32B7/02B32B9/00H01B5/14
    • PROBLEM TO BE SOLVED: To enable patterning once, obtain wiring resistance and beam transmission rate applicable to a large area liquid crystal display in a conventional film thickness, and restrain display faults due to alignment abnormality of liquid crystal by sequentially laminating a tin-added indium oxide (ITO) film, high-conductivity metal film, ITO film, high-conductivity metal film, and ITO film on a substrate. SOLUTION: A transparent conductive film of this invention in which three- layered ITO films and two-layered high-conductivity metal film are alternately laminated on a glass substrate or the like has a film thickness of about 150nm, wiring resistance of about 20kΩ, and beam transmission rate in a visible region of 80% or more. When this is a transparent electrode of a liquid crystal element, there is less occurrence of liquid crystal alignment abnormality due to influence of a step. High-conductivity metal films of second and fourth layers are suitable to use of silver from the viewpoint of cost efficiency, corrosion resistance, and conductivity. In addition, a total of the film thickness of the second and fourth layers is 10 to 15nm, thereby performance required by a 15 inch-class large area liquid crystal display is realized.