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    • 5. 发明申请
    • SPECTRAL MICROSCOPY DEVICE
    • 光谱显微镜装置
    • US20160123813A1
    • 2016-05-05
    • US14891614
    • 2014-05-21
    • CANON KABUSHIKI KAISHA
    • Masafumi Kyogaku
    • G01J3/44G01J3/06G02B21/00
    • G01J3/4412G01J3/06G01N21/3151G01N21/65G01N2021/653G02B21/002
    • A spectral microscopy device includes a spectral detecting unit including a light source that is capable of controlling an output wavelength, a microscope section that is provided with an observation area that is illuminated with light output from the light source, and a signal detector that detects light from the observation area as spectral data; a moving unit configured to move the observation area; and a controller that performs a control operation to allow the spectral detecting unit and the moving unit to move in response to each other. The spectral microscopy device is controlled so that switching between different measurement conditions is performed at an observation area movement time in which the observation area is moved by the moving unit and measurement is performed and at an observation area movement stoppage time in which the observation area is fixed and measurement is performed.
    • 光谱显微镜装置包括:光谱检测单元,其包括能够控制输出波长的光源;显微镜部分,其设置有从光源输出的光照射的观察区域;以及信号检测器,其检测光 从观测区作为光谱数据; 移动单元,被配置为移动所述观察区域; 以及控制器,其执行控制操作以允许所述光谱检测单元和所述移动单元彼此响应地移动。 控制光谱显微镜装置,使得在观察区域移动时间,在观察区域移动时通过移动单元进行测量并且在观察区域移动停止时间内进行不同测量条件之间的切换,其中观察区域是观察区域 进行固定和测量。
    • 8. 发明授权
    • Mass distribution measuring method and mass distribution measuring apparatus
    • 质量分布测量方法和质量分布测量仪器
    • US08637808B2
    • 2014-01-28
    • US13632615
    • 2012-10-01
    • Canon Kabushiki Kaisha
    • Masafumi KyogakuKoichi Tanji
    • H01J49/00
    • H01J49/00H01J49/0004H01J49/142
    • To provide a method that reduces an influence of dependence of an ionizing beam in an incident direction or uneven irradiation to a sample on a result of mass spectrometry, and can measure mass distribution with high reliability. A mass distribution measuring method according to the present invention includes: changing a direction of irradiating the ionizing beam to a sample surface; acquiring a plurality of mass distribution images in a plurality of incident directions; performing image transform of the mass distribution images according to an angle formed by an incident direction of the ionizing beam and a substrate surface; synthesizing the plurality of transformed images; and outputting the synthesized mass distribution images.
    • 为了提供一种降低离子束在入射方向上的依赖性的影响的方法或者对质谱的结果的不均匀照射的方法,可以高可靠性地测定质量分布。 根据本发明的质量分布测量方法包括:改变将电离束照射到样品表面的方向; 在多个入射方向获取多个质量分布图像; 根据由电离束的入射方向和基板表面形成的角度进行质量分布图像的图像变换; 合成多个变换图像; 并输出合成质量分布图像。
    • 10. 发明申请
    • SPECTRAL MICROSCOPY DEVICE
    • 光谱显微镜装置
    • US20160123812A1
    • 2016-05-05
    • US14891475
    • 2014-05-21
    • CANON KABUSHIKI KAISHA
    • Masafumi Kyogaku
    • G01J3/44G01J3/06G02B21/00
    • G01J3/4412G01J3/06G01N21/3151G01N21/65G01N2021/653G02B21/002
    • A spectral microscopy device includes a spectral detecting unit including a light source capable of controlling an output wavelength, a microscope section having an observation area illuminated with light output from the light source, and a signal detector that detects light from the observation area as spectral data; a moving unit configured to move the observation area; and a controller that performs a control operation to allow the spectral detecting unit and the moving unit to move in response to each other. The spectral microscopy device is controlled so that switching between different measurement conditions based on the number of measurement points is performed at an observation area movement time in which the observation area is moved by the moving unit and measurement is performed and at a an observation area movement stoppage time in which the observation area is fixed and measurement is performed, and spectral data is detected.
    • 光谱显微镜装置包括:光谱检测单元,包括能够控制输出波长的光源;具有由光源输出的光照射的观察区域的显微镜部分;以及检测来自观察区域的光作为光谱数据的信号检测器 ; 移动单元,被配置为移动所述观察区域; 以及控制器,其执行控制操作以允许所述光谱检测单元和所述移动单元彼此响应地移动。 控制光谱显微镜装置,使得在观察区域移动时间中,通过移动单元移动观察区域并进行测量,并且在观察区域移动中执行基于测量点数的不同测量条件之间的切换 观察区域固定并进行测量的停止时间,并检测光谱数据。