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1. 发明授权

US08721048B2 Substrate for liquid discharge head and liquid discharge head 有权
标题翻译：液体排放头和排液头基板
公开(公告)号：US08721048B2
公开(公告)日：2014-05-13
申请号：US13898332
申请日：2013-05-20
申请人： Canon Kabushiki Kaisha
发明人： Takeru Yasuda , Takuya Hatsui , Makoto Sakurai , Soichiro Nagamochi , Souta Takeuchi , Yuzuru Ishida , Kazuaki Shibata
IPC分类号： B41J2/05
CPC分类号： B41J2/14129
摘要： The reduction in reliably of a liquid discharge head due to the dissolution of a protective layer is suppressed. A substrate for a liquid discharge head includes a base substrate, a heat-generating resistive layer placed on the base substrate, a pair of lines placed on the base substrate, and a protective layer covering the heat-generating resistive layer and the lines. The protective layer contains a material represented by the formula SixCyNx, where x+y+z=100, 30≦x≦59, y≧5, and z≧15 on an atomic percent basis.
摘要翻译：抑制由于保护层的溶解导致的液体排出头的可靠性的降低。用于液体排出头的基板包括基底基板，放置在基底基板上的发热电阻层，放置在基底基板上的一对线以及覆盖发热电阻层和线的保护层。保护层含有由式SixCyNx表示的材料，其中x + y + z = 100,30和nlE; x＆lt; lE; 59，y≥5，z≥15。

2. 发明授权

US09266331B2 Manufacturing method of substrate for liquid ejection head 有权
标题翻译：液体喷射头基板的制造方法
公开(公告)号：US09266331B2
公开(公告)日：2016-02-23
申请号：US13926651
申请日：2013-06-25
申请人： CANON KABUSHIKI KAISHA
发明人： Sadayoshi Sakuma , Hirokazu Komuro , Yuzuru Ishida , Kazuaki Shibata , Makoto Sakurai
IPC分类号： B21D53/76 , B41J2/16 , B41J2/14
CPC分类号： B41J2/1637 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , Y10T29/49002 , Y10T29/49401
摘要： Provided is a method for manufacturing a substrate for liquid ejection head including an ejection energy generating element and a nozzle layer including an ejection port and a liquid channel. The method includes the steps of: forming, on the substrate including the element, a metal mold member made of metal and having a flat surface, the metal mold member making up at least a part of a mold for the liquid channel, and a planarization layer made of the metal and having a flat surface to planarize a surface of the nozzle layer; coating the mold for the liquid channel and the planarization layer with negative-type photosensitive resin, thus forming a negative-type photosensitive resin layer to be the nozzle layer; exposing the resin layer to ultraviolet rays, thus forming the ejection port; and selectively removing the mold for the liquid channel, thus forming the liquid channel.
摘要翻译：本发明提供一种液体喷射头用基板的制造方法，其特征在于，具有喷射能量产生元件和喷出口以及液体通道的喷嘴层。该方法包括以下步骤：在包括元件的基板上形成由金属制成并具有平坦表面的金属模具构件，所述金属模具构件构成用于液体通道的模具的至少一部分，以及平坦化由金属制成并具有平坦表面以使喷嘴层的表面平坦化的层; 用负型感光树脂涂布液体通道的模具和平坦化层，从而形成作为喷嘴层的负型感光性树脂层; 将树脂层暴露于紫外线，从而形成喷出口; 并选择性地去除用于液体通道的模具，从而形成液体通道。

3. 发明授权

US09096059B2 Substrate for inkjet head, inkjet head, and inkjet printing apparatus 有权
标题翻译：喷墨头，喷墨头和喷墨印刷装置用基板
公开(公告)号：US09096059B2
公开(公告)日：2015-08-04
申请号：US14138287
申请日：2013-12-23
申请人： CANON KABUSHIKI KAISHA
发明人： Takuya Hatsui , Yuzuru Ishida , Kazuaki Shibata , Takeru Yasuda
IPC分类号： B41J2/05 , B41J2/14
CPC分类号： B41J2/14129 , B41J2/14112
摘要： There are provided a substrate for an inkjet head, an inkjet head, and an inkjet printing apparatus wherein in a case where current is carried through a protection layer for heating resistors, electrical connection to its periphery is prevented without fail. The substrate for the inkjet head includes a first protection layer disposed to cover a heating resistor layer and having an insulation property and a second protection layer disposed to contact the first protection layer and having conductivity. The second protection layer includes a plurality of individual sections provided to correspond to the plurality of heating resistors, a common section connecting the plurality of individual sections, and fuse sections connecting the individual sections and the common section, the fuse sections being formed to be thinner than the individual sections.
摘要翻译：提供了一种用于喷墨头，喷墨头和喷墨打印设备的基板，其中在通过用于加热电阻器的保护层传送电流的情况下，防止与其周边的电连接。用于喷墨头的基片包括设置成覆盖加热电阻层并具有绝缘性能的第一保护层和设置成接触第一保护层并具有导电性的第二保护层。所述第二保护层包括多个单独部分，其设置成对应于所述多个加热电阻器，连接所述多个单独部分的公共部分以及连接所述各个部分和所述公共部分的熔断部分，所述熔断部分形成为更薄比各个部分。

4. 发明申请

US20220388309A1 METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE HEAD 有权
公开(公告)号：US20220388309A1
公开(公告)日：2022-12-08
申请号：US17751916
申请日：2022-05-24
申请人： CANON KABUSHIKI KAISHA
发明人： Takumi Shimoda , Kazuaki Shibata , Atsunori Terasaki , Toshiyasu Sakai , Ryoji Kanri
IPC分类号： B41J2/16 , B41J2/14
摘要： A method for manufacturing a liquid discharge head comprising: a substrate, a protective layer covering at least a part of the substrate, and a laminate member formed on the protective layer, wherein the method comprises steps of: forming the protective layer on at least a part of the substrate; forming the laminate member on the protective layer with a part of the protective layer exposed, the protective layer comprises at least Si and C, a content of oxygen in a bulk of the protective layer is less than 20 atomic % in terms of an element composition ratio, a modified layer with a content of oxygen of 20 atomic % or more in terms of an element composition ratio is present on a surface of the protective layer, and a thickness of the modified layer between the protective layer and the laminate member is 3.40 nm or less.

5. 发明申请

US20140030427A1 METHOD OF MANUFACTURING LIQUID EJECTION HEAD 有权
标题翻译：制造液体喷射头的方法
公开(公告)号：US20140030427A1
公开(公告)日：2014-01-30
申请号：US13945283
申请日：2013-07-18
申请人： CANON KABUSHIKI KAISHA
发明人： Kazuaki Shibata , Makoto Sakurai , Yuzuru Ishida , Sadayoshi Sakuma
IPC分类号： B41J2/01
CPC分类号： B41J2/01 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1646
摘要： A method of manufacturing a liquid ejection head includes forming, on the substrate, a metal layer formed of a first metal, forming a liquid flow path pattern formed of a second metal that is a metal of a different kind from that of the first metal and that is dissolvable in a solution that does not dissolve the first metal, the liquid flow path pattern being formed on at least a part of a surface of the metal layer, covering the metal layer and the pattern with an inorganic material layer to be formed as the nozzle layer, forming the ejection orifices in the inorganic material layer, and removing the pattern by the solution. A standard electrode potential E1 of the first metal and a standard electrode potential E2 of the second metal have a relationship of E1>E2.
摘要翻译：一种液体喷射头的制造方法，包括在基板上形成由第一金属形成的金属层，形成由与第一金属不同种类的金属的第二金属形成的液体流路图案，以及可溶解在不溶解第一金属的溶液中，液体流动通道图案形成在金属层的表面的至少一部分上，用形成为无机材料层的金属层和图案形成为喷嘴层，在无机材料层中形成喷射孔，并通过溶液去除图案。第一金属的标准电极电位E1和第二金属的标准电极电位E2具有E1> E2的关系。

6. 发明授权

US11981137B2 Method for producing liquid-ejection head substrate 有权
公开(公告)号：US11981137B2
公开(公告)日：2024-05-14
申请号：US17696147
申请日：2022-03-16
申请人： CANON KABUSHIKI KAISHA
发明人： Kazuaki Shibata
IPC分类号： B41J2/16
CPC分类号： B41J2/1628 , B41J2/164
摘要： A method for producing a liquid-ejection head substrate includes forming a protective film covering the surface of a portion of a cavitation resistant film provided at a position where the heating resistor is covered with a metallic material containing at least one of titanium, tungsten, and titanium tungsten and etching the substrate after forming the protective film.

7. 发明授权

US11081349B2 Method of forming film on substrate and method of manufacturing liquid ejection head 有权
公开(公告)号：US11081349B2
公开(公告)日：2021-08-03
申请号：US16268901
申请日：2019-02-06
申请人： CANON KABUSHIKI KAISHA
发明人： Masaya Uyama , Souta Takeuchi , Taichi Yonemoto , Kazuaki Shibata , Atsushi Teranishi , Takeru Yasuda , Atsunori Terasaki
IPC分类号： H01L21/00 , H01L21/027 , H01L21/02
摘要： Provided is a method of forming a film on a substrate including: forming a protective member on a surface of the substrate; forming an organic structure on the surface of the substrate, at a distance from the protective member; removing the protective member after the formation of the organic structure; and forming a film by CVD in a region of the surface of the substrate from which the protective member is removed.

8. 发明授权

US10933635B2 Liquid ejection head substrate and method for manufacturing the same 有权
公开(公告)号：US10933635B2
公开(公告)日：2021-03-02
申请号：US16701996
申请日：2019-12-03
申请人： CANON KABUSHIKI KAISHA
发明人： Souta Takeuchi , Takeru Yasuda , Kazuaki Shibata , Taichi Yonemoto
IPC分类号： B41J2/14 , B41J2/16
摘要： Provided is a liquid ejection head substrate including: a substrate; a liquid ejection element that generates liquid ejection energy on the substrate; and an electrode pad that is electrically connected to the liquid ejection element, in which the electrode pad includes a barrier metal layer and a bonding layer on the barrier metal layer, and an end side surface of the barrier metal layer is covered with a silicon-based film containing carbon.

9. 发明授权

US09427953B2 Method of manufacturing liquid ejection head 有权
标题翻译：液体喷射头的制造方法
公开(公告)号：US09427953B2
公开(公告)日：2016-08-30
申请号：US13945283
申请日：2013-07-18
申请人： CANON KABUSHIKI KAISHA
发明人： Kazuaki Shibata , Makoto Sakurai , Yuzuru Ishida , Sadayoshi Sakuma
IPC分类号： B41J2/01 , B41J2/16
CPC分类号： B41J2/01 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1646
摘要： A method of manufacturing a liquid ejection head includes forming, on the substrate, a metal layer formed of a first metal, forming a liquid flow path pattern formed of a second metal that is a metal of a different kind from that of the first metal and that is dissolvable in a solution that does not dissolve the first metal, the liquid flow path pattern being formed on at least a part of a surface of the metal layer, covering the metal layer and the pattern with an inorganic material layer to be formed as the nozzle layer, forming the ejection orifices in the inorganic material layer, and removing the pattern by the solution. A standard electrode potential E1 of the first metal and a standard electrode potential E2 of the second metal have a relationship of E1>E2.
摘要翻译：一种液体喷射头的制造方法，包括在基板上形成由第一金属形成的金属层，形成由与第一金属不同种类的金属的第二金属形成的液体流路图案，以及可溶解在不溶解第一金属的溶液中，液体流动通道图案形成在金属层的表面的至少一部分上，用形成为无机材料层的金属层和图案形成为喷嘴层，在无机材料层中形成喷射孔，并通过溶液去除图案。第一金属的标准电极电位E1和第二金属的标准电极电位E2具有E1> E2的关系。

10. 发明申请

US20220297432A1 METHOD FOR PRODUCING LIQUID-EJECTION HEAD SUBSTRATE 有权
公开(公告)号：US20220297432A1
公开(公告)日：2022-09-22
申请号：US17696147
申请日：2022-03-16
申请人： CANON KABUSHIKI KAISHA
发明人： Kazuaki Shibata
IPC分类号： B41J2/16
摘要： A method for producing a liquid-ejection head substrate includes forming a protective film covering the surface of a portion of a cavitation resistant film provided at a position where the heating resistor is covered with a metallic material containing at least one of titanium, tungsten, and titanium tungsten and etching the substrate after forming the protective film.

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