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    • 2. 发明公开
    • Method for producing a thin film resistor
    • HerstellungsverfahrenfüreinenDünnschichtwiderstand。
    • EP0603782A2
    • 1994-06-29
    • EP93120507.4
    • 1993-12-20
    • CANON KABUSHIKI KAISHA
    • Koyama, ShujiKawajiri, YukioShibata, MakotoSueoka, ManabuSuzuki, ToshioYamamoto, HisashiSuzuki, Takumi
    • H01C7/00H01C17/06B41J2/05
    • C23C14/564B41J2/14129B41J2/1603B41J2/1604B41J2/1629B41J2/1631B41J2/1642B41J2/1646H01C17/06
    • An Al layer of wiring material is etched using an alkaline aqueous solution. There are provided a method for producing a thin film resistor, in which only the Al layer can be selectively etched independent of a resistor layer using the alkaline aqueous solution, an anti-sticking means for film-forming apparatus having the structure which can prevent a drop in yield due to particles, even with less frequency of cleaning for a film-forming chamber, and a film-forming apparatus provided with the anti-sticking means. When the wiring electrode layer mainly containing Al is etched by the alkaline aqueous solution, only the Al layer can be selectively etched without etching the resistor layer, which can reduce a change in resistance of resistor, improve the yield and the productivity, and raise the reliability of the thin film resistor.
      Also, when the anti-sticking means having a tongued-and-grooved surface is set in the film-forming chamber of the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the anti-sticking means, which can delay the time of film exfoliation, in turn extend the cycle of cleaning for the anti-sticking plate, and prevent the drop in yield due to the film exfoliation.
    • 使用碱性水溶液蚀刻Al层布线材料。 提供了一种制造薄膜电阻器的方法,其中仅使用碱性水溶液就能够独立于电阻层选择性地蚀刻Al层,具有能够防止 即使在成膜室的清洗频率较低的情况下,由于颗粒而导致的产量下降,以及设置有防粘装置的成膜装置。 当主要含有Al的布线电极层被碱性水溶液蚀刻时,只有Al层才能选择性地蚀刻而不蚀刻电阻层,这可以减少电阻的电阻变化,提高产率和生产率,并提高 薄膜电阻的可靠性。 此外,当在成膜设备的成膜室中设置具有舌形和沟槽表面的防粘装置时,成膜材料以不连续的方式沉积在防粘装置上, 可延缓膜剥落的时间,进而延长防粘板的清洗周期,防止由于膜剥落引起的产量下降。
    • 8. 发明公开
    • Ink jet print head and method of manufacturing the same
    • Tintenstrahldruckkopf和sein Herstellungsverfahren。
    • EP0539993A2
    • 1993-05-05
    • EP92118523.7
    • 1992-10-29
    • CANON KABUSHIKI KAISHA
    • Koyama, ShujiKawajiri, YukioShibata, MakotoSueoka, ManabuSuzuki, ToshioYamamoto, HisashiSuzuki, Takumi
    • B41J2/16
    • B41J2/1606
    • A method for manufacture of an ink jet head (100) comprises the process of forming a head main body by providing a positive resist layer (108) to constitute ink passages for a substrate (101) having ink ejection pressure generating means and then a ceiling member (103) therewith; forming a carbon-contained film for the surface (105) where the ink discharging ports of the head main body are formed; conducting a fluoric plasma treatment given to the carbon-contained film (110) by utilizing a hydrofluoride compound; and removing the positive resist layer. With this method, an F-C coupled water repellent film (111) is formed on the discharging port formation surface of an ink jet recording head evenly with a desirable bonding capability to enhance the reliability of water repellency.
    • 一种制造喷墨头的方法包括:通过提供正性抗蚀剂层来形成头部主体以构成具有墨水喷射压力产生装置的基底的墨水通道,然后形成顶部构件的方法; 形成用于形成头主体的排墨口的表面的含碳膜; 通过利用氢氟酸化合物对含碳膜进行氟等离子体处理; 并除去正的抗蚀剂层。 通过这种方法,在喷墨记录头的排出口形成表面上均匀地形成F-C结合的防水膜,具有所需的粘合能力,以提高防水性的可靠性。