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1. 发明授权

US4744615A Laser beam homogenizer 失效
标题翻译：激光束匀浆器
公开(公告)号：US4744615A
公开(公告)日：1988-05-17
申请号：US823554
申请日：1986-01-29
申请人： Bunsen Fan , Raymond E. Tibbetts , Janusz S. Wilczynski , David F. Witman
发明人： Bunsen Fan , Raymond E. Tibbetts , Janusz S. Wilczynski , David F. Witman
IPC分类号： H01S3/101 , G02B5/02 , G02B5/08 , G02B27/09 , G03F7/20 , H01L21/027 , H01L21/30 , G02B6/00 , F21V7/04 , H01S3/10
CPC分类号： G03F7/70583 , G02B27/09 , G02B27/0994 , G03F7/70075
摘要： A coherent laser beam having a possibly non-uniform spatial intensity distribution is transformed into an incoherent light beam having a substantially uniform spatial intensity distribution by homogenizing the laser beam with a light tunnel (a transparent light passageway having flat internally reflective side surfaces). It has been determined that when the cross-section of the tunnel is a polygon (as preferred) and the sides of the tunnel are all parallel to the axis of the tunnel (as preferred), the laser light at the exit of the light tunnel (or alternatively at any image plane with respect thereto) will have a substantially uniform intensity distribution and will be incoherent only when the aspect ratio of the tunnel (length divided by width) equals or exceeds the contangent of the input beam divergence angle .theta. and whenW.sub.min =L.sub.coh (R+(1+R.sup.2).sup.1/2)>2RL.sub.coh,where W.sub.min is the minimum required width for the light tunnel, L.sub.coh is the effective coherence length of the laser light being homogenized and R is the chosen aspect ratio for the light tunnel.
摘要翻译：具有可能不均匀的空间强度分布的相干激光束通过用光通道（具有平坦的内部反射侧表面的透明光通道）均化激光束而被转换成具有基本均匀的空间强度分布的非相干光束。已经确定，当隧道的横截面是多边形（优选地）并且隧道的侧面都平行于隧道的轴线（优选地）时，光隧道出口处的激光（或者相对于任何图像平面），将具有基本上均匀的强度分布，并且仅当隧道的长宽比（长度除以宽度）等于或超过输入光束发散角θ的范围时才会不相干 Wmin = Lcoh（R +（1 + R2）1/2）> 2RLcoh，其中Wmin是光通道的最小所需宽度，Lcoh是均匀化的激光的有效相干长度，R是所选择的宽高比轻隧道。

2. 发明授权

US5159172A Optical projection system 失效
标题翻译：光学投影系统
公开(公告)号：US5159172A
公开(公告)日：1992-10-27
申请号：US564007
申请日：1990-08-07
申请人： Douglas S. Goodman , Alan E. Rosenbluth , Raymond E. Tibbetts , Janusz S. Wilczynski
发明人： Douglas S. Goodman , Alan E. Rosenbluth , Raymond E. Tibbetts , Janusz S. Wilczynski
IPC分类号： G02B17/00 , G02B17/02 , G02B17/08 , G02B19/00 , G02B27/18 , G03F7/20 , H01L21/027 , H01L21/30 , H01S3/101
CPC分类号： G02B17/008 , G02B17/026 , G02B17/08 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B19/0028 , G02B19/0047 , G02B19/0095 , G03F7/70225 , G03F7/70358
摘要： An optical system having a plurality of substantially planar reflecting surfaces and a plurality of curved reflecting surfaces providing an optical projection system which can scan a mask object onto an image plane by having the mask and copy substrate substantially fixed in position relative to each other and either simultaneously moving the mask and copy substrate in the same direction or maintaining the mask and image plane substantially stationary and fixed with respect to each other while scanning the optical system. The optical system uses one wavelength of an electromagnetic radiation to align the mask to the copy substrate and another wavelength of electromagnetic radiation to form the image of the mask on the copy substrate. The apparatus can be used as a laser ablation optical tool to laser ablate the image of a mask onto the copy substrate, as an inspection tool, as a photolithographic and for other related applications. The projection lens is a modified Dyson type lens.

3. 发明授权

US4171871A Achromatic unit magnification optical system 失效
标题翻译：消色差单位放大光学系统
公开(公告)号：US4171871A
公开(公告)日：1979-10-23
申请号：US811754
申请日：1977-06-30
申请人： Frederick H. Dill , Raymond E. Tibbetts , Janusz S. Wilczynski
发明人： Frederick H. Dill , Raymond E. Tibbetts , Janusz S. Wilczynski
IPC分类号： H01L21/30 , G02B17/00 , G02B17/08 , G03F7/20 , H01L21/027
CPC分类号： G02B17/008 , G02B17/08 , G03F7/70058 , G03F7/70225
摘要： A unit magnification optical system having micron resolution capability over a broad frequency spectrum. A spherical concave mirror is used to provide unit magnification at high numerical aperture with respect to object and image planes which are both located at or in the proximity of the center of curvature of the mirror, or the optical equivalent thereof. A first refractory element optically close to the object and image planes corrects longitudinal chromatic aberration of the principal rays while a second refractory element optically close to the mirror corrects residual longitudinal chromatic aberration of the marginal rays. In the preferred embodiment, a double prism arrangement located between the first refractory element and the center of curvature of the mirror optically reflects the object and image planes to parallel opposed positions having a common axis perpendicular to the axis of the mirror. The system may be used for either step-and-repeat or scanning exposure operations in fabricating microcircuits.
摘要翻译：在宽频谱上具有微米分辨能力的单位放大光学系统。球面凹面镜用于提供相对于物镜和图像平面的高数值孔径的单位倍率，这些物体和像平面都位于反射镜的曲率中心附近或其附近或其光学等效物。光学上靠近物体和图像平面的第一耐火元件校正主射线的纵向色差，而光学靠近镜面的第二难熔元件校正边缘射线的残余纵向色差。在优选实施例中，位于第一耐火元件和镜的曲率中心之间的双棱镜布置将物体和像平面光学地反射到具有与镜的轴线垂直的共同轴的平行相对位置。该系统可用于制造微电路中的步进重复或扫描曝光操作。

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