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1. 发明申请

US20020054295A1 Optical method for the determination of grain orientation in films 有权
标题翻译：用于测定薄膜晶粒取向的光学方法
公开(公告)号：US20020054295A1
公开(公告)日：2002-05-09
申请号：US10012985
申请日：2001-11-05
申请人： Brown University Research Foundation
发明人： Humphrey J. Maris
IPC分类号： G01B011/02
CPC分类号： G01N21/8422 , H01L22/12
摘要： A method for the determination of grain orientation in a film sample is provided comprising the steps of measuring a first transient optical response of the film and determining the contribution to the transient optical response arising from a change in the energy distribution of the electrons in the sample, determining the contribution to the transient optical response arising from a propagating strain pulse within the sample, and determining the contribution to the transient optical response arising from a change in sample temperature of the sample. The grain orientation of the sample may be determined using the contributions to the transient optical response arising from the change in the energy distribution of the electrons, the propagating strain pulse, and the change in sample temperature. Additionally, a method for determination of the thickness of a film sample is provided. The grain orientation of the sample is first determined. The grain orientation, together with the velocity of sound and a propagation time of a strain pulse through the sample are then used to determine the thickness of the film sample.
摘要翻译：提供了一种用于确定膜样品中的晶粒取向的方法，包括以下步骤：测量薄膜的第一瞬态光学响应并确定由于样品中的电子的能量分布的变化引起的瞬态光学响应的贡献确定对由样品内的传播应变脉冲引起的瞬态光学响应的贡献，以及确定由于样品的样品温度变化引起的瞬态光学响应的贡献。可以使用由电子的能量分布的变化，传播的应变脉冲和样品温度的变化引起的瞬态光学响应的贡献来确定样品的晶粒取向。另外，提供了用于确定膜样品的厚度的方法。首先确定样品的晶粒取向。然后使用晶粒取向以及通过样品的应变脉冲的声速和传播时间来确定膜样品的厚度。

2. 发明申请

US20020080355A1 Ultrasonic generator and detector using an optical mask having a grating for launching a plurality of spatially distributed, time varying strain pulses in a sample 有权
公开(公告)号：US20020080355A1
公开(公告)日：2002-06-27
申请号：US10010287
申请日：2001-11-13
申请人： Brown University Research Foundation
发明人： Humphrey J. Maris
IPC分类号： G01N021/00
CPC分类号： G01N29/2418 , G01N29/22 , G01N2291/011 , G01N2291/0231 , G01N2291/02881 , G01N2291/0423
摘要： A method and a system are disclosed for determining at least one characteristic of a sample that contains a substrate and at least one film disposed on or over a surface of the substrate. The method includes a first step of placing a mask over a free surface of the at least one film, where the mask has a top surface and a bottom surface that is placed adjacent to the free surface of the film. The bottom surface of the mask has formed therein or thereon a plurality of features for forming at least one grating. A next step directs optical pump pulses through the mask to the free surface of the film, where individual ones of the pump pulses are followed by at least one optical probe pulse. The pump pulses are spatially distributed by the grating for launching a plurality of spatially distributed, time varying strain pulses within the film, which cause a detectable change in optical constants of the film. A next step detects a reflected or a transmitted portion of the probe pulses, which are also spatially distributed by the grating. A next step measures a change in at least one characteristic of at least one of reflected or transmitted probe pulses due to the change in optical constants, and a further step determines the at least one characteristic of the sample from the measured change in the at least one characteristic of the probe pulses. An optical mask is also disclosed herein, and forms a part of these teachings.

3. 发明申请

US20020066936A1 Electronic and optoelectronic devices using fractional carriers 审中-公开
$Electronic and optoelectronic devices using fractional carriers$
标题翻译：使用分数载波的电子和光电器件
公开(公告)号：US20020066936A1
公开(公告)日：2002-06-06
申请号：US09871327
申请日：2001-05-31
申请人： Brown University Research Foundation
发明人： Humphrey J. Maris
IPC分类号： H01L029/06
CPC分类号： H01L49/006 , G21K1/00 , H01L29/66
摘要： An electronic or optoelectronic device includes a generation unit and an active unit (which may be part of a passive or active device). The generation and active units provide different functions in the device, but may physically occupy the same space. The generation unit includes an energy element and a material with a region of a selected energy distribution including a particle arranged in the region of the selected energy distribution. The energy element is constructed and arranged to provide energy to the region to create fractional carriers from the particle. The active unit is arranged to receive the created fractional carriers and manipulate the fractional carriers to provide a functional output.
摘要翻译：电子或光电子器件包括生成单元和有源单元（其可以是无源或有源器件的一部分）。生成和活动单元在设备中提供不同的功能，但在物理上可以占据相同的空间。生成单元包括能量元素和具有选定能量分布的区域的材料，包括布置在所选择的能量分布区域中的粒子。能量元件被构造和布置成向区域提供能量以从颗粒产生分数载流子。有源单元被布置为接收所创建的分数载波并操纵分数载波以提供功能输出。

4. 发明申请

US20020018210A1 Optical method for the characterization of laterally-patterned samples in integrated circuits 有权
标题翻译：用于表征集成电路中横向图案化样品的光学方法
公开(公告)号：US20020018210A1
公开(公告)日：2002-02-14
申请号：US09969336
申请日：2001-10-01
申请人： Brown University Research Foundation
发明人： Humphrey J. Maris
IPC分类号： G01N021/00
CPC分类号： G01N29/0681 , G01B11/02 , G01B11/0658 , G01B11/0666 , G01B11/24 , G01N21/1702 , G01N21/1717 , G01N21/211 , G01N21/4788 , G01N21/9501 , G01N21/956 , G01N29/2418 , G01N2021/1706 , G01N2291/02827 , G01N2291/02881 , G01N2291/0426 , G01N2291/0427
摘要： Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
摘要翻译：公开了一种用于表征具有设置在样品上或样品内的结构的样品的方法，包括以下步骤：将第一脉冲光施加到样品的表面，以在样品中产生传播的应变脉冲，施加第二脉冲的光使得第二脉冲光与样品中的传播应变脉冲相互作用，从第二脉冲的反射中检测样品的光学响应的变化，并将光学响应的变化的发生时间与结构的至少一个维度。

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