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    • 6. 发明授权
    • Image intensification for low light inspection
    • 低光检查图像强化
    • US07570354B1
    • 2009-08-04
    • US11876009
    • 2007-10-22
    • Wei ZhaoStuart L. Friedman
    • Wei ZhaoStuart L. Friedman
    • G01N21/88
    • G01N21/8851G01N21/9501H01J9/42H01J31/26
    • An optical inspection system for inspecting a substrate. A beam source produces a light beam and directs it toward a surface of the substrate, thereby producing a reflected light beam that is received by an intensifier module. A photocathode receives the reflected light beam at a first surface and producing a shower of photoelectrons at a second opposing surface. An electrical field receives the shower of photoelectrons and accelerates the photoelectrons away from the second surface of the photocathode, thereby producing an enhanced output. A sensor receives the enhanced output from the intensifier module and produces electrical signals in response to the enhanced output. A controller receives the electrical signals and produces images of the substrate, based at least in part on the electrical signals. The controller also controls and coordinates the operation of the beam source, the intensifier module, and the sensor.
    • 用于检查基板的光学检查系统。 光束源产生光束并将其引导到衬底的表面,从而产生被增强器模块接收的反射光束。 光电阴极在第一表面处接收反射光束并且在第二相对表面处产生光电子的喷淋。 电场接收光电子的喷淋并使光电子从光电阴极的第二表面加速,从而产生增强的输出。 传感器从增强器模块接收增强的输出并响应增强的输出产生电信号。 控制器至少部分地基于电信号接收电信号并产生衬底的图像。 控制器还控制和协调光束源,增强器模块和传感器的操作。