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1. 发明申请

US20070168318A1 METHOD AND SYSTEM FOR INTELLIGENT AUTOMATED RETICLE MANAGMENT 有权
标题翻译：智能自动化管理的方法与系统
公开(公告)号：US20070168318A1
公开(公告)日：2007-07-19
申请号：US11669179
申请日：2007-01-31
申请人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Sanjay Hegde , Robert Milne , Sameer Shikalgar , Guogang Zuo
发明人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Sanjay Hegde , Robert Milne , Sameer Shikalgar , Guogang Zuo
IPC分类号： G06F17/30
CPC分类号： G03F7/70741
摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.
摘要翻译：一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站，在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具。根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

2. 发明申请

US20070100486A1 METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR CONTROLLING THE FLOW OF MATERIAL IN A MANUFACTURING FACILITY USING AN EXTENDED ZONE OF CONTROL 失效
标题翻译：方法，系统和计算机程序产品，用于使用扩展的控制区控制制造设备中材料的流动
公开(公告)号：US20070100486A1
公开(公告)日：2007-05-03
申请号：US11163793
申请日：2005-10-31
申请人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Robert Milne
发明人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Robert Milne
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： The present invention provides a method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control. A method in accordance to an embodiment of the present invention comprises establishing an extended zone of control including a high impact tool set and at least one other tool set, analyzing projected job arrivals at the high impact tool set, and adjusting a flow of material between the high impact tool set and the at least one other tool set based on the analysis of projected job arrivals at the high impact tool set.
摘要翻译：本发明提供一种方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中的材料的流动。根据本发明的实施例的方法包括建立包括高冲击工具组和至少一个其他工具组的扩展控制区域，分析在高冲击工具组上的投影作业到达，以及调整在高冲击工具组之间的材料流动高冲击工具组和至少一个其他工具组，其基于对高冲击工具组的预期工作到达的分析。

3. 发明申请

US20060259175A1 METHOD OF RELEASE AND PRODUCT FLOW MANAGEMENT FOR A MANUFACTURING FACILITY 失效
标题翻译：制造设备的泄漏和产品流程管理方法
公开(公告)号：US20060259175A1
公开(公告)日：2006-11-16
申请号：US10908420
申请日：2005-05-11
申请人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Robert Milne
发明人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Robert Milne
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32263 , G05B2219/32304 , G06Q10/0631 , Y02P90/20 , Y02P90/265
摘要： A method and computer program product for scheduling product lots through operations of a manufacturing line. The method including: selecting a sequential subset of a set of sequential operations required to manufacture the lots; partitioning the product lots into designated lots and non-designated lots; and generating a release schedule for each of the non-designated lots into one or more operations of the sequential subset of the set of sequential operations; generating a release schedule for each of the designated lots into each operation of the sequential subset of the set of sequential operations such that for each designated lot a total amount of time measured from completion of a first operation of the sequential subset of the set of sequential operations through start of a last operation of the sequential subset of the set of sequential operations does not exceed a target amount of time for the designated lots.
摘要翻译：一种用于通过生产线的操作调度产品批次的方法和计算机程序产品。该方法包括：选择制造批次所需的一组顺序操作的顺序子集; 将产品划分为指定地段和非指定地段; 以及将所述非指定批次中的每一个生成到所述一组顺序操作的顺序子集的一个或多个操作中的释放时间表; 为每个指定批次的每个操作生成顺序操作的顺序子集的每个操作的发布时间表，使得对于每个指定批次，从完成该顺序集合的顺序子集的第一操作所测量的总时间量通过开始该顺序操作的顺序子集的最后操作的操作不超过指定批次的目标时间量。

4. 发明申请

US20060271220A1 METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR IMPROVED FLOW OF DEVELOPMENT LOTS IN A MANUFACTURING FACILITY 失效
标题翻译：方法，系统和计算机程序产品，用于改进生产设备中的开发流程
公开(公告)号：US20060271220A1
公开(公告)日：2006-11-30
申请号：US10908714
申请日：2005-05-24
申请人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Robert Milne , Elizabeth Williamson
发明人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Robert Milne , Elizabeth Williamson
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , Y02P90/86
摘要： The present invention provides a method, system, and computer program product for improved flow of development lots in a manufacturing facility. A method in accordance to one embodiment of the present invention comprises: establishing at least one target for processing of a set of development lots in the manufacturing facility; monitoring a progress of the set of development lots in the manufacturing facility; comparing the progress of the set of development lots against the at least one target; establishing at least one suggested action for the set of development lots if the progress of the set of development lots deviates from the at least one target; and deciding which development lots in the set of development lots to assign to at least one tool in the manufacturing facility, wherein the at least one suggested action is incorporated into the assignment decision.
摘要翻译：本发明提供了一种用于改进制造设备中的开发批次的流程的方法，系统和计算机程序产品。根据本发明的一个实施例的方法包括：建立至少一个目标，用于处理制造设施中的一组开发批次; 监测制造设施中的一批开发项目的进度; 将发展项目集合的进度与至少一个目标进行比较; 如果一组开发项目的进度偏离至少一个目标，则为该组开发项目建立至少一个建议行动; 以及将所述开发批次中的哪些开发批次分配给所述制造设施中的至少一个工具，其中所述至少一个建议的动作被并入到所述分配决定中。

5. 发明申请

US20060149404A1 A METHOD FOR AUTONOMIC CONTROL OF A MANUFACTURING SYSTEM 有权
标题翻译：一种自动控制制造系统的方法
公开(公告)号：US20060149404A1
公开(公告)日：2006-07-06
申请号：US10905456
申请日：2005-01-05
申请人： Brian Denton , Kenneth Fordyce , Robert Milne
发明人： Brian Denton , Kenneth Fordyce , Robert Milne
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译：公开了一种控制制造系统的方法。本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。如果当前水平超过预定极限，本发明进行优化处理。然而，如果当前电平不超过预定限度，则本发明执行调度处理。在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。本发明基于当前水平和未来水平自动调整工具的操作参数。

6. 发明申请

US20060052889A1 Method and system for intelligent automated reticle management 有权
标题翻译：智能自动标线管理方法与系统
公开(公告)号：US20060052889A1
公开(公告)日：2006-03-09
申请号：US10711079
申请日：2004-08-20
申请人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Sanjay Hegde , Robert Milne , Sameer Shikalgar , Guogang Zuo
发明人： Richard Burda , Alfred Degbotse , Brian Denton , Kenneth Fordyce , Sanjay Hegde , Robert Milne , Sameer Shikalgar , Guogang Zuo
IPC分类号： G06F19/00
CPC分类号： G03F7/70741
摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.
摘要翻译：一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站，在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具。根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

7. 发明申请

US20070088449A1 METHOD FOR AUTONOMIC CONTROL OF A MANUFACTURING SYSTEM 有权
标题翻译：制造系统自动控制方法
公开(公告)号：US20070088449A1
公开(公告)日：2007-04-19
申请号：US11538821
申请日：2006-10-05
申请人： Brian Denton , Kenneth Fordyce
发明人： Brian Denton , Kenneth Fordyce
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译：公开了一种控制制造系统的方法。本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。如果当前水平超过预定极限，本发明进行优化处理。然而，如果当前电平不超过预定限度，则本发明执行调度处理。在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。本发明基于当前水平和未来水平自动调整工具的操作参数。

8. 发明申请

US20050096771A1 METHOD FOR SIZING PRODUCTION LOT STARTS WITHIN A LINEAR SYSTEM PROGRAMMING ENVIRONMENT 有权
标题翻译：在线性系统编程环境中生产最大起点的方法
公开(公告)号：US20050096771A1
公开(公告)日：2005-05-05
申请号：US10605854
申请日：2003-10-31
申请人： Brian Denton , John Forrest , Robert Milne
发明人： Brian Denton , John Forrest , Robert Milne
IPC分类号： G06F19/00 , G06Q10/00
CPC分类号： G06Q10/087 , G06Q10/06
摘要： Allocating limited manufacturing resources to achieve a feasible production plan that is consistent with customer demand is a difficult and common problem faced in many manufacturing industries. For large-scale multi-stage manufacturing systems, existing methods are typically based either on allocating limited resources sequentially, according to a priority ranked list of production starts, or on linear programming based models. The output of such planning models is a production plan which specifies the quantity of each part to produce at each plant, using resources available to the enterprise. Typically there are lot-sizing rules defining the permissible production start quantities. The invention disclosed herein is a method for applying these rules to the lot-sizing of production starts within a linear program. It employs advanced heuristics that consider both established operational objectives (e.g. customer service, short lead times, low inventory, and prioritized allocation of supply and capacity) and lot-size rules to efficiently compute a feasible production plan for the division.
摘要翻译：分配有限的制造资源，实现符合客户需求的可行的生产计划是许多制造业面临的一个困难和常见的问题。对于大型多级制造系统，现有方法通常基于依次分配有限资源，根据优先排序的生产启动列表，或基于线性规划的模型。这种规划模型的产出是一个生产计划，其中规定了每个工厂生产的每个部件的数量，使用企业可用的资源。通常，定义许可生产开始数量的批量规则。本文公开的发明是一种将这些规则应用于在线性程序内的生产开始批量生产的方法。它采用先进的启发式方法，考虑既定的经营目标（例如客户服务，交货时间短，库存量低，供应和容量优先分配）和批量规则，以有效地计算出该部门的可行生产计划。

9. 发明申请

US20070038657A1 Method, system and program product for determining objective function coefficients of a mathematical programming model 有权
标题翻译：用于确定数学规划模型的目标函数系数的方法，系统和程序产品
公开(公告)号：US20070038657A1
公开(公告)日：2007-02-15
申请号：US11203603
申请日：2005-08-11
申请人： Brian Denton , Robert Milne , Rahul Nahar , Mark Pleszkoch , Vivek Sharma
发明人： Brian Denton , Robert Milne , Rahul Nahar , Mark Pleszkoch , Vivek Sharma
IPC分类号： G06F7/00
CPC分类号： G06Q10/04
摘要： A method and system for determining a plurality of coefficients of an objective function of a mathematical programming model. Attributes of the model are identified. A first set of coefficient values determining a first solution and initially representing the plurality of coefficients is determined by employing a specified ranking of the attributes. A prevailing solution is initialized to the first solution. Additional sets of coefficient values are generated, each set determining a corresponding additional solution of the model. The additional solutions are evaluated (e.g., by the Analytic Hierarchy Process) to provide a ranking of the solutions, where the ranking is dependent upon the attributes. The ranking of the additional solutions is used to select a second solution. The prevailing solution is set to the second solution if the second solution exceeds a sum of the prevailing solution and a specified tolerance.
摘要翻译：一种用于确定数学规划模型的目标函数的多个系数的方法和系统。识别模型的属性。通过采用指定的属性等级来确定确定第一解并且最初表示多个系数的第一组系数值。一个普遍的解决方案被初始化为第一个解决方案。生成额外的系数值集合，每组确定模型的相应附加解。评估附加解决方案（例如，通过分析层级过程）以提供解决方案的排名，其中排名取决于属性。附加解决方案的排名用于选择第二个解决方案。如果第二个解决方案超过了主要解决方案和指定公差的总和，则将主要解决方案设置为第二个解决方案。

10. 发明申请

US20050090921A1 METHOD FOR OPTIMIZING MATERIAL SUBSTITUTIONS WITHIN A SUPPLY CHAIN 有权
标题翻译：在供应链中优化材料取代的方法
公开(公告)号：US20050090921A1
公开(公告)日：2005-04-28
申请号：US10605735
申请日：2003-10-22
申请人： Brian Denton , Robert Milne
发明人： Brian Denton , Robert Milne
IPC分类号： G06F153/00
CPC分类号： G06Q10/06 , G06Q10/04 , G06Q50/04 , Y02P90/30
摘要： Disclosed is a method and system for efficiently modeling the situation where a product manufactured within a multi-stage manufacturing system has components upstream in the supply chain which may substitute for one another. The invention selectively permits substitutions based on rules associated with downstream operations or customer shipments. One component may substitute for another provided that the assembly consuming the component belongs to a certain set of assemblies. The invention also encompasses a method by which this can be integrated into a production planning system based on a linear programming (LP) model.
摘要翻译：公开了一种用于有效建模在多级制造系统内制造的产品具有在供应链中可以相互代替的组件的情况的方法和系统。本发明基于与下游操作或客户出货相关的规则选择性地允许替换。一个组件可以替代另一个组件，只要消耗组件的组件属于某组集合。本发明还包括一种可以将其集成到基于线性规划（LP）模型的生产计划系统中的方法。

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