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    • 2. 发明授权
    • Metallizing machine
    • 金属化机
    • US5709785A
    • 1998-01-20
    • US658170
    • 1996-06-04
    • Arthur R. LeBlanc, IIIDonald W. MacMillanDonald G. ParentScott R. ParentBrian C. Rossignol
    • Arthur R. LeBlanc, IIIDonald W. MacMillanDonald G. ParentScott R. ParentBrian C. Rossignol
    • C23C14/50C23C14/56C23C16/00
    • C23C14/505C23C14/566
    • A vacuum-metallizing machine including a metal platter base (17) having an obverse side and a face side. A substrate-receiving platter (2) is resiliently disposed (3, 3b) in a recess on the face side of the platter base (17). The platter (2) receives a substrate to be metallized. A circumferentially-arranged rigid ring (27) of predetermined dimensions and location is disposed on the face side and mates with a ring (29) around a port (11) on the wall of the vacuum chamber which surrounds an opening in the wall. Engagement of these rings aligns the platter base (17) relative to the port (11, 12, 13 and 14). A compliant ring (42) is disposed between the wall and the platter base (17). The obverse side of the platter base (17) and the chamber are resiliently forced (37a, 37b, 37c) into contact with each other with a toggling action (24, 22b, 22) whereby to align the platter base (17) relative to the port, to force the outer diameter of the platter base (17) into metal-to-metal contact with the periphery of the port (11), to align the substrate relative to the port (11) and also to force the compliant ring into sealing engagement with the wall, thus, to form a vacuum tight seal.
    • 一种真空金属化机器,包括具有正面和正面的金属盘基座(17)。 基板接收盘(2)在盘片基座(17)的表面侧上的凹部中弹性地设置(3,3b)。 盘(2)接收待金属化的基板。 具有预定尺寸和位置的周向布置的刚性环(27)设置在表面侧上并且围绕围绕壁中的开口的真空室壁上的端口(11)周围的环(29)配合。 这些环的接合使盘片基座(17)相对于端口(11,12,13和14)对准。 柔性环(42)设置在壁和盘片基座(17)之间。 盘片基座(17)和腔室的正面弹性地被迫(37a,37b,37c)以切换动作(24,22b,22)彼此接触,从而相对于盘片基座 端口,以迫使盘片基座(17)的外径与端口(11)的周边金属对金属接触,以使基板相对于端口(11)对准,并且还迫使柔性环 与壁密封接合,从而形成真空密封。