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热词
    • 2. 发明授权
    • System for and method of testing a microelectronic device using a dual probe technique
    • 使用双探针技术测试微电子器件的系统和方法
    • US06791344B2
    • 2004-09-14
    • US09751355
    • 2000-12-28
    • Donald J. CookHarvey Allard
    • Donald J. CookHarvey Allard
    • G01R3102
    • G01R31/2844
    • A system (10) for and method of testing a device under test (DUT) (12) having a plurality of probe pads (14) utilizing a dual probe technique to overcome contact resistance that may be present. The system comprises a plurality of sensing probes (30) and a plurality of forcing probes (32) arranged in pairs consisting of one sensing probe and one forcing probe. Each pair of sensing and forcing probes is provided for contacting one of the probe pads on the DUT. Each forcing probe is in electrical communication with a power supply (20) via a switching matrix (24), and each sensing probe is in electrical communication with a voltage meter (52) via the switching matrix. During testing, at least one of the power supplies provides a voltage to a corresponding forcing probe in contact with a particular probe pad. The sensing electrode at that particular probe pad senses a voltage, which is measured by the voltmeter and is used by a feedback controller (56) to adjust the voltage supplied by the corresponding power supply to the forcing probe.
    • 一种用于测试被测设备(DUT)(12)的方法和系统(10),其具有利用双探针技术来克服可能存在的接触电阻的多个探针焊盘(14)。 该系统包括多个感测探针(30)和多个强制探针(32),成对地布置成由一个感测探针和一个强制探针组成。 每对感测和强制探针被提供用于接触DUT上的探针焊盘之一。 每个强制探头经由开关矩阵(24)与电源(20)电连通,并且每个感测探头经由开关矩阵与电压计(52)电连通。 在测试期间,至少一个电源向与特定探针焊盘接触的相应的强制探针提供电压。 在该特定探针焊盘处的感测电极感测由电压计测量的电压,并由反馈控制器(56)用来调节由相应的电源提供给强制探针的电压。