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1. 发明授权

US08400053B2 Carbon nanotube films, layers, fabrics, ribbons, elements and articles 有权
标题翻译：碳纳米管膜，层，织物，丝带，元件和制品
公开(公告)号：US08400053B2
公开(公告)日：2013-03-19
申请号：US12136624
申请日：2008-06-10
申请人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01J63/04
CPC分类号： G11C23/00 , B82Y10/00 , G11C13/025 , G11C2213/16 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L27/10 , Y10S977/724 , Y10S977/742 , Y10S977/796 , Y10S977/856 , Y10S977/888 , Y10S977/943 , Y10T428/24893 , Y10T428/24917
摘要： Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. To make various articles, certain embodiments provide a substrate. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. To make a nanofabric, a substrate is provided. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes wherein the non-woven fabric is substantially uniform density. The nanofabrics and articles have characteristics desirable for various electrical systems such as memory circuits and conductive traces and pads.
摘要翻译：公开了碳纳米管薄膜，层，织物，丝带，元件和制品。为了制造各种制品，某些实施方案提供了基材。将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物。根据限定的图案选择性地去除无纺织物的部分以产生制品。为了制造纳米纤维，提供了基材。将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物，其中无纺织物具有基本均匀的密度。纳米材料和制品具有对各种电气系统（诸如存储电路和导电迹线和焊盘）所期望的特性。

2. 发明授权

US08115187B2 Triodes using nanofabric articles and methods of making the same 失效
标题翻译：使用纳米制品的三极管和制造相同的方法
公开(公告)号：US08115187B2
公开(公告)日：2012-02-14
申请号：US12124475
申请日：2008-05-21
申请人： Brent M. Segal , Jonathan W. Ward , Thomas Rueckes
发明人： Brent M. Segal , Jonathan W. Ward , Thomas Rueckes
IPC分类号： H01L29/02
CPC分类号： H01J21/10 , H01J3/021 , H01J19/38 , H01J2203/0232 , Y10S977/742
摘要： Vacuum microelectronic devices with carbon nanotube films, layers, ribbons and fabrics are provided. The present invention discloses microelectronic vacuum devices including triode structures that include three-terminals (an emitter, a grid and an anode), and also higher-order devices such as tetrodes and pentodes, all of which use carbon nanotubes to form various components of the devices. In certain embodiments, patterned portions of nanotube fabric may be used as grid/gate components, conductive traces, etc. Nanotube fabrics may be suspended or conformally disposed. In certain embodiments, methods for stiffening a nanotube fabric layer are used. Various methods for applying, selectively removing (e.g. etching), suspending, and stiffening vertically- and horizontally-disposed nanotube fabrics are disclosed, as are CMOS-compatible fabrication methods. In certain embodiments, nanotube fabric triodes provide high-speed, small-scale, low-power devices that can be employed in radiation-intensive applications.
摘要翻译：提供具有碳纳米管膜，层，带和织物的真空微电子器件。本发明公开了包括三端（发射极，栅极和阳极）的三极管结构的微电子真空装置，以及诸如四极和五极管的高阶器件，所有这些都使用碳纳米管来形成设备。在某些实施例中，纳米管织物的图案化部分可以用作栅极/栅极部件，导电迹线等。纳米管织物可以悬挂或保形地设置。在某些实施例中，使用用于加强纳米管织物层的方法。公开了用于施加，选择性地去除（例如蚀刻）悬浮和加强垂直和水平布置的纳米管织物的各种方法，以及CMOS兼容的制造方法。在某些实施例中，纳米管织物三极管提供可用于辐射密集型应用中的高速，小规模，低功率的器件。

3. 发明申请

US20110083319A1 METHODS OF MAKING NANOTUBE SWITCHES 有权
标题翻译：制备纳米管开关的方法
公开(公告)号：US20110083319A1
公开(公告)日：2011-04-14
申请号：US12953076
申请日：2010-11-23
申请人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
发明人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
IPC分类号： H01H11/00 , B82Y40/00
CPC分类号： H01L23/62 , B82Y10/00 , G11C13/025 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/17 , H01H1/0094 , H01L23/60 , H01L27/0248 , H01L27/0251 , H01L51/0048 , H01L2224/16 , H01L2924/01019 , H01L2924/0102 , H01L2924/01025 , H01L2924/01046 , H01L2924/01066 , H01L2924/01068 , H01L2924/01077 , H01L2924/01079 , H01L2924/09701 , H01L2924/12044 , H01L2924/19103 , H01L2924/19104 , H01L2924/19105 , H01L2924/3011 , H05K1/0259 , Y10T29/49105 , Y10T29/49117 , Y10T29/49124 , Y10T29/49204
摘要： Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches. An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment. The ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit. The nanotube switch provides protection based on the magnitude of the signal on the input pad.
摘要翻译：纳米管ESD保护装置和相应的非易失性和挥发性纳米管开关。用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。开关耦合到保护电路和放电路径。纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。纳米管开关可以在芯片载体上。根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。可以在激活和去激活状态之间重复地编程ESD电路，以便重复激活和去激活受保护电路的ESD保护。纳米管开关基于输入焊盘上的信号幅度提供保护。

4. 发明授权

US07274078B2 Devices having vertically-disposed nanofabric articles and methods of making the same 有权
公开(公告)号：US07274078B2
公开(公告)日：2007-09-25
申请号：US11158544
申请日：2005-06-22
申请人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01L27/14
CPC分类号： G11C13/025 , B81B2203/0338 , B81B2203/04 , B81C1/00142 , B81C2201/0109 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/02 , C01B2202/22 , G11C11/56 , G11C13/0033 , G11C23/00 , G11C2213/16 , G11C2213/77 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L51/0048 , H01L2221/1094 , Y10S977/943
摘要： Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.

5. 发明授权

US08771628B2 Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof 有权
标题翻译：水性碳纳米管涂布液及其施用液的制造方法
公开(公告)号：US08771628B2
公开(公告)日：2014-07-08
申请号：US12612445
申请日：2009-11-04
申请人： Ramesh Sivarajan , Thomas Rueckes , Rahul Sen , Brent M. Segal , Eliodor G. Ghenciu , Jonathan W. Ward , Tzong-Ru T. Han
发明人： Ramesh Sivarajan , Thomas Rueckes , Rahul Sen , Brent M. Segal , Eliodor G. Ghenciu , Jonathan W. Ward , Tzong-Ru T. Han
IPC分类号： D01F9/12
CPC分类号： D06M11/64 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/168 , C01B32/17 , C01B2202/02 , C01B2202/28 , D06M10/02 , D06M11/50 , D06M11/55 , D06M2101/40 , H01L51/0003 , H01L51/0048 , Y10S977/746 , Y10S977/845
摘要： Certain applicator liquids and method of making the applicator liquids are described. The applicator liquids can be used to form nanotube films or fabrics of controlled properties. An applicator liquid for preparation of a nanotube film or fabric includes a controlled concentration of nanotubes dispersed in a liquid medium containing water. The controlled concentration is sufficient to form a nanotube fabric or film of preselected density and uniformity.
摘要翻译：描述了一些施用液体和制备涂抹液的方法。施用液体可用于形成具有受控特性的纳米管膜或织物。用于制备纳米管膜或织物的涂布液包括分散在含水液体介质中的受控浓度的纳米管。受控浓度足以形成预选密度和均匀性的纳米管织物或薄膜。

6. 发明授权

US07719067B2 Devices having vertically-disposed nanofabric articles and methods of making the same 有权
标题翻译：具有垂直布置的纳米制品的装置及其制造方法
公开(公告)号：US07719067B2
公开(公告)日：2010-05-18
申请号：US11526364
申请日：2006-09-25
申请人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01L27/14
CPC分类号： G11C23/00 , B82Y10/00 , G11C13/025 , G11C2213/16 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L27/10 , Y10S977/724 , Y10S977/742 , Y10S977/796 , Y10S977/856 , Y10S977/888 , Y10S977/943 , Y10T428/24893 , Y10T428/24917
摘要： Electro-mechanical switches and memory cells using vertically-oriented nanofabric articles and methods of making the same. Under one aspect, a nanotube device includes a substantially horizontal substrate having a vertically oriented feature; and a nanotube film substantially conforming to a horizontal feature of the substrate and also to at least the vertically oriented feature. Under another aspect, an electromechanical device includes a structure having a major horizontal surface and a channel formed therein, the channel having first and second wall electrodes defining at least a portion of first and second vertical walls of the channel; first and second nanotube articles vertically suspended in the channel and in spaced relation to a corresponding first and second wall electrode, and electromechanically deflectable in a horizontal direction toward or away from the corresponding first and second wall electrode in response to electrical stimulation.
摘要翻译：使用垂直取向的纳米制品的机电开关和存储单元及其制造方法。在一个方面，纳米管装置包括具有垂直取向特征的基本水平的基底; 以及基本上符合衬底的水平特征以及至少垂直取向的特征的纳米管膜。在另一方面，机电装置包括具有主要水平表面和形成在其中的通道的结构，所述通道具有限定通道的第一和第二垂直壁的至少一部分的第一和第二壁电极; 垂直悬挂在通道中并且与对应的第一和第二壁电极间隔开的第一和第二纳米管制品，并且响应于电刺激而在水平方向上以机电方式偏向或远离对应的第一和第二壁电极。

7. 发明授权

US07666382B2 Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof 有权
标题翻译：水性碳纳米管涂布液及其施用液的制造方法
公开(公告)号：US07666382B2
公开(公告)日：2010-02-23
申请号：US11304315
申请日：2005-12-15
申请人： Eliodor G. Ghenciu , Tzong-Ru Terry Han , Ramesh Sivarajan , Thomas Rueckes , Rahul Sen , Brent M. Segal , Jonathan W. Ward
发明人： Eliodor G. Ghenciu , Tzong-Ru Terry Han , Ramesh Sivarajan , Thomas Rueckes , Rahul Sen , Brent M. Segal , Jonathan W. Ward
IPC分类号： D01F9/12
CPC分类号： D06M11/64 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/168 , C01B32/17 , C01B2202/02 , C01B2202/28 , D06M10/02 , D06M11/50 , D06M11/55 , D06M2101/40 , H01L51/0003 , H01L51/0048 , Y10S977/746 , Y10S977/845
摘要： Certain applicator liquids and method of making the applicator liquids are described. The applicator liquids can be used to form nanotube films or fabrics of controlled properties. An applicator liquid for preparation of a nanotube film or fabric includes a controlled concentration of nanotubes dispersed in a liquid medium containing water. The controlled concentration is sufficient to form a nanotube fabric or film of preselected density and uniformity.
摘要翻译：描述了一些施用液体和制备涂抹液的方法。施用液体可用于形成具有受控特性的纳米管膜或织物。用于制备纳米管膜或织物的涂布液包括分散在含水液体介质中的受控浓度的纳米管。受控浓度足以形成预选密度和均匀性的纳米管织物或薄膜。

8. 发明授权

US07619291B2 Devices having horizontally-disposed nanofabric articles and methods of making the same 有权
标题翻译：具有水平布置的纳米制品的装置及其制造方法
公开(公告)号：US07619291B2
公开(公告)日：2009-11-17
申请号：US11999228
申请日：2007-12-04
申请人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01L29/84
CPC分类号： G11C13/025 , B81B2203/0338 , B81B2203/04 , B81C1/00142 , B81C2201/0109 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/02 , C01B2202/22 , G11C11/56 , G11C23/00 , G11C2213/16 , G11C2213/77 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L51/0048 , H01L2221/1094 , Y10S977/724 , Y10S977/734 , Y10S977/742
摘要： New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electro-mechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap.
摘要翻译：描述了具有水平布置的纳米制品的新器件及其制造方法。分立的机电装置包括具有导电迹线的结构。定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。在第一状态下，纳米管制品相对于迹线具有间隔的关系，并且在第二状态下，纳米管制品与痕迹接触。低电阻信号路径与所定义的纳米片段电连通。在某些实施例中，该结构包括限定的导电迹线设置的间隙。限定的间隙具有限定的宽度，并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。

9. 发明申请

US20090115305A1 TRIODES USING NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME 失效
标题翻译：使用南方文章的三方及其制作方法
公开(公告)号：US20090115305A1
公开(公告)日：2009-05-07
申请号：US12124475
申请日：2008-05-21
申请人： Brent M. Segal , Jonathan W. Ward , Thomas Rueckes
发明人： Brent M. Segal , Jonathan W. Ward , Thomas Rueckes
IPC分类号： H01J21/10 , H01J9/385
CPC分类号： H01J21/10 , H01J3/021 , H01J19/38 , H01J2203/0232 , Y10S977/742
摘要： Vacuum microelectronic devices with carbon nanotube films, layers, ribbons and fabrics are provided. The present invention discloses microelectronic vacuum devices including triode structures that include three-terminals (an emitter, a grid and an anode), and also higher-order devices such as tetrodes and pentodes, all of which use carbon nanotubes to form various components of the devices. In certain embodiments, patterned portions of nanotube fabric may be used as grid/gate components, conductive traces, etc. Nanotube fabrics may be suspended or conformally disposed. In certain embodiments, methods for stiffening a nanotube fabric layer are used. Various methods for applying, selectively removing (e.g. etching), suspending, and stiffening vertically- and horizontally-disposed nanotube fabrics are disclosed, as are CMOS-compatible fabrication methods. In certain embodiments, nanotube fabric triodes provide high-speed, small-scale, low-power devices that can be employed in radiation-intensive applications.
摘要翻译：提供具有碳纳米管膜，层，带和织物的真空微电子器件。本发明公开了包括三端（发射极，栅极和阳极）的三极管结构的微电子真空装置，以及诸如四极和五极管的高阶器件，所有这些都使用碳纳米管来形成设备。在某些实施例中，纳米管织物的图案化部分可以用作栅极/栅极部件，导电迹线等。纳米管织物可以悬挂或保形地设置。在某些实施例中，使用用于加强纳米管织物层的方法。公开了用于施加，选择性地去除（例如蚀刻）悬浮和加强垂直和水平布置的纳米管织物的各种方法，以及CMOS兼容的制造方法。在某些实施例中，纳米管织物三极管提供可用于辐射密集型应用中的高速，小规模，低功率的器件。

10. 发明申请

US20090045473A1 Devices having horizontally-disposed nanofabric articles and methods of making the same 有权
公开(公告)号：US20090045473A1
公开(公告)日：2009-02-19
申请号：US11999228
申请日：2007-12-04
申请人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01L29/84
CPC分类号： G11C13/025 , B81B2203/0338 , B81B2203/04 , B81C1/00142 , B81C2201/0109 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/02 , C01B2202/22 , G11C11/56 , G11C23/00 , G11C2213/16 , G11C2213/77 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L51/0048 , H01L2221/1094 , Y10S977/724 , Y10S977/734 , Y10S977/742
摘要： New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electro-mechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap.

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