会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明申请
    • Heating blocks
    • 加热块
    • US20090134146A1
    • 2009-05-28
    • US12291165
    • 2008-11-05
    • Hermann HaldKlaus FunkBernhard Heidenreich
    • Hermann HaldKlaus FunkBernhard Heidenreich
    • H05B3/10
    • H01L21/67109
    • In order, on the one hand, to achieve a high mechanical long-term stability of and, on the other hand, to have the possibility of guiding a stream of gas, in particular, a stream of gas consisting of a reactive process gas through a heating block for an apparatus for the thermal treatment of a substrate, in particular, a semiconductor substrate, wherein the apparatus has a space accommodating the substrate and the heating block on at least one side of the space accommodating the substrate, the substrate being treatable thermally by means of the heating block in a mechanically non-contact manner, it is suggested that the heating block be designed as a fiber composite member, that the fiber composite member be designed with passages for a stream of gas passing through it from one flat side to the other flat side.
    • 一方面,为了实现高机械长期稳定性,另一方面,具有引导气流特别是由反应性工艺气体组成的气体流通过的可能性 用于热处理基板,特别是半导体基板的装置的加热块,其中该装置具有在容纳基板的空间的至少一侧容纳基板和加热块的空间,该基板可处理 通过加热块以机械非接触方式热加热,建议将加热块设计为纤维复合构件,纤维复合构件设计成具有用于从一个平面穿过它的气流的通道 一边到另一个平面。