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1. 发明申请

US20130316533A1 METHOD FOR REMOVING NATIVE OXIDE AND ASSOCIATED RESIDUE FROM A SUBSTRATE 有权
标题翻译：从基板上去除原有氧化物和相关残留物的方法
公开(公告)号：US20130316533A1
公开(公告)日：2013-11-28
申请号：US13906543
申请日：2013-05-31
申请人： Bo ZHENG , Arvind SUNDARRAJAN , Xinyu FU
发明人： Bo ZHENG , Arvind SUNDARRAJAN , Xinyu FU
IPC分类号： H01L21/768 , H01L21/02
CPC分类号： H01L21/02063 , H01J37/32082 , H01L21/02057 , H01L21/0206 , H01L21/28518 , H01L21/28556 , H01L21/28568 , H01L21/743 , H01L21/768
摘要： Native oxides and associated residue are removed from surfaces of a substrate by sequentially performing two plasma cleaning processes on the substrate in a single processing chamber. The first plasma cleaning process removes native oxide formed on a substrate surface by generating a cleaning plasma from a mixture of ammonia (NH3) and nitrogen trifluoride (NF3) gases, condensing products of the cleaning plasma on the native oxide to form a thin film that contains ammonium hexafluorosilicate ((NH4)2SiF6), and subliming the thin film off of the substrate surface. The second plasma cleaning process removes remaining residues of the thin film by generating a second cleaning plasma from nitrogen trifluoride gas. Products of the second cleaning plasma react with a few angstroms of the bare silicon present on the surface, forming silicon tetrafluoride (SiF4) and lifting off residues of the thin film.
摘要翻译：通过在单个处理室中在衬底上依次执行两个等离子体清洗工艺，从衬底的表面除去天然氧化物和相关残留物。第一等离子体清洁工艺通过从氨（NH 3）和三氟化氮（NF 3）气体的混合物中产生清洁等离子体，从而将清洁等离子体的产物冷凝在天然氧化物上，从而去除在基底表面上形成的天然氧化物，形成薄膜，含有六氟硅酸铵（（NH 4）2 SiF 6），并将薄膜从衬底表面上升华。通过从三氟化氮气体产生第二清洗等离子体，第二等离子体清洗工艺去除剩余的薄膜残留物。第二清洗等离子体的产物与表面上存在的裸硅几埃反应，形成四氟化硅（SiF4）并提取薄膜的残留物。

2. 发明申请

US20130260555A1 METHOD OF ENABLING SEAMLESS COBALT GAP-FILL 有权
标题翻译：实现无缝煤覆盖的方法
公开(公告)号：US20130260555A1
公开(公告)日：2013-10-03
申请号：US13786644
申请日：2013-03-06
申请人： Bhushan N. ZOPE , Avgerinos V. GELATOS , Bo ZHENG , Yu LEI , Xinyu FU , Srinivas GANDIKOTA , Sang-Ho YU , Mathew ABRAHAM
发明人： Bhushan N. ZOPE , Avgerinos V. GELATOS , Bo ZHENG , Yu LEI , Xinyu FU , Srinivas GANDIKOTA , Sang-Ho YU , Mathew ABRAHAM
IPC分类号： H01L21/48
CPC分类号： H01L21/76879 , H01L21/02057 , H01L21/2855 , H01L21/28556 , H01L21/4846 , H01L21/76814 , H01L21/76843 , H01L21/76846 , H01L21/76856 , H01L21/76877 , H01L21/76883 , H01L23/53209 , H01L23/5329 , H01L29/66621
摘要： Methods for depositing a contact metal layer in contact structures of a semiconductor device are provided. In one embodiment, a method for depositing a contact metal layer for forming a contact structure in a semiconductor device is provided. The method comprises performing a cyclic metal deposition process to deposit a contact metal layer on a substrate and annealing the contact metal layer disposed on the substrate. The cyclic metal deposition process comprises exposing the substrate to a deposition precursor gas mixture to deposit a portion of the contact metal layer on the substrate, exposing the portion of the contact metal layer to a plasma treatment process, and repeating the exposing the substrate to a deposition precursor gas mixture and exposing the portion of the contact metal layer to a plasma treatment process until a predetermined thickness of the contact metal layer is achieved.
摘要翻译：提供了在半导体器件的接触结构中沉积接触金属层的方法。在一个实施例中，提供了一种在半导体器件中沉积用于形成接触结构的接触金属层的方法。该方法包括进行循环金属沉积工艺，以将接触金属层沉积在衬底上并退火设置在衬底上的接触金属层。循环金属沉积工艺包括将衬底暴露于沉积前体气体混合物以将接触金属层的一部分沉积在衬底上，将接触金属层的该部分暴露于等离子体处理工艺，并重复将衬底暴露于沉积前体气体混合物，并将接触金属层的部分暴露于等离子体处理工艺，直到实现接触金属层的预定厚度。

3. 发明申请

US20070119960A1 Thermostat with USB hub function 审中-公开
标题翻译：带USB集线器功能的恒温器
公开(公告)号：US20070119960A1
公开(公告)日：2007-05-31
申请号：US11468373
申请日：2006-08-30
申请人： Bo ZHENG
发明人： Bo ZHENG
IPC分类号： G05D23/00
CPC分类号： H05B3/68
摘要： The present invention relates to a thermostat with USB hub function, which can be connected to a computer USB port and which comprises one uplink USB port (1) and a plurality of downlink USB ports (2) with a hub chip (3) disposed in between, and further comprises an electrothermal component (4) which contacts the metal plate (8) on the surface of the casing of the thermostat with USB hub function, and the electrothermal component is connected to the power terminal (32) of the uplink USB port (1) which corresponds to the computer USB port, characterized in that it comprises an integrated temperature measuring module and a liquid crystal display (6), which are interconnected with each other, and the integrated temperature measuring module comprises a temperature sensor R29 (41) which contacts the metal plate, and the liquid crystal display is disposed on the surface of the casing. The thermostat displays the current time and the temperature of the metal plate by means of the temperature sensor and the liquid crystal display with the time unit of the integrated temperature measuring module, thereby allowing users to make their own choices according to the information as shown.
摘要翻译：本发明涉及具有USB集线器功能的恒温器，其可以连接到计算机USB端口，其包括一个上行链路USB端口（1）和多个下行链路USB端口（2），其中集线器芯片（3）设置在并且还包括电热部件（4），其与具有USB集线器功能的恒温器壳体的表面上的金属板（8）接触，并且电热部件连接到上行链路USB的电源端子（32）端口（1），其对应于计算机USB端口，其特征在于，它包括彼此互连的集成温度测量模块和液晶显示器（6），并且所述集成温度测量模块包括温度传感器R 29 （41），并且液晶显示器设置在壳体的表面上。恒温器通过温度传感器和液晶显示器利用集成温度测量模块的时间单位显示金属板的当前时间和温度，从而允许用户根据所示信息进行自己的选择。

4. 发明申请

US20120215894A1 METHOD, APPARATUS AND SYSTEM FOR SELECTING SERVICE 审中-公开
标题翻译：方法，选择和选择服务的系统
公开(公告)号：US20120215894A1
公开(公告)日：2012-08-23
申请号：US13069857
申请日：2011-03-23
申请人： Bo ZHENG , Pu CHEN , Wujun JIANG , Feiran HU , Dan XIAO , Jincao LU
发明人： Bo ZHENG , Pu CHEN , Wujun JIANG , Feiran HU , Dan XIAO , Jincao LU
IPC分类号： G06F15/173
CPC分类号： H04L67/16 , H04L65/1016 , H04L67/306
摘要： A method, an apparatus, and a system for selecting a service are disclosed. The method is applied in an Open Service Architecture (OSA), and includes: receiving a service invoking request message sent by an external application; obtaining, according to the service information, policy information corresponding to the service to be invoked; and selecting, according to the policy information, a service provision entity to invoke the service. An open service entity is applied in an OSA and includes a receiving module, an obtaining module, and a selecting module. A policy provision entity is applied in an OSA, and includes a providing module. A service selection system is applied in an OSA and includes an open service entity and a policy provision entity. With the present invention, a proper service is selected for the external application according to the policy, and the services of the communication network are invoked more conveniently and accurately.
摘要翻译：公开了一种用于选择服务的方法，装置和系统。该方法应用于开放式服务体系结构（OSA），包括：接收由外部应用发送的服务调用请求消息; 根据所述服务信息获取与所述待调用服务对应的策略信息; 以及根据所述策略信息来选择服务提供实体来调用所述服务。在OSA中应用开放服务实体，包括接收模块，获取模块和选择模块。在OSA中应用策略提供实体，并包括提供模块。服务选择系统在OSA中应用，并且包括开放服务实体和策略提供实体。利用本发明，根据策略为外部应用选择适当的服务，并且更方便和准确地调用通信网络的服务。

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