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    • 2. 发明授权
    • Bimorphic structures, sensor structures formed therewith, and methods therefor
    • 双相结构,形成的传感器结构及其方法
    • US07827660B2
    • 2010-11-09
    • US12182713
    • 2008-07-30
    • Bishnu Prasanna GogoiNavid Yazdi
    • Bishnu Prasanna GogoiNavid Yazdi
    • H01L41/22H04R17/00
    • H01H1/0036H01H37/52H02N11/002Y10T29/42Y10T29/49002Y10T29/49004Y10T29/49005Y10T29/49007Y10T29/49105
    • A bimorphic structure responsive to changes in an environmental condition, sensor structures incorporating one or more of such bimorphic structures, and a method of forming such bimorphic structures. The sensor structure has an electrically-conductive first contact on a substrate, and a bimorph beam anchored to the substrate so that a portion thereof is suspended above the first contact. The bimorph beam has a multilayer structure that includes first and second layers, with the second layer between the first layer and the substrate. A portion of the first layer projects through an opening in the second layer toward the first contact so as to define an electrically-conductive second contact located on the beam so as to be spaced apart and aligned with the first contact for contact with the first contact when the beam sufficiently deflects toward the substrate.
    • 响应于环境条件变化的双相结构,包含一种或多种这样的双相结构的传感器结构,以及形成这种双相结构的方法。 传感器结构在基板上具有导电的第一接触,并且将锚定在基板上的双压电晶片梁,使得其一部分悬挂在第一接触件的上方。 双晶片束具有包括第一和第二层的多层结构,第二层在第一层和衬底之间。 第一层的一部分朝向第一接触突出穿过第二层中的开口,以便限定位于梁上的导电的第二接触件,以便与第一接触件间隔开并对齐,以与第一接触件接触 当束足够偏向衬底时。