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US07476880B2 Writing a circuit design pattern with shaped particle beam flashes 失效
标题翻译：编写具有成形粒子束闪光的电路设计图案
公开(公告)号：US07476880B2
公开(公告)日：2009-01-13
申请号：US11243299
申请日：2005-10-03
申请人： Benyamin Buller , Richard L. Lozes , Robert M. Sills
发明人： Benyamin Buller , Richard L. Lozes , Robert M. Sills
IPC分类号： G21K5/10 , H01J37/08
CPC分类号： H01J37/302 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/31776 , Y10S430/143
摘要： A shaped particle beam writing strategy can be used to write a pattern with a particle beam onto a substrate. The pattern comprises a circuit design that is fractured into a plurality of arbitrary polygons. The writing strategy comprises transforming and fracturing the arbitrary polygons into a plurality of restricted polygons, each restricted polygon being represented by a location coordinate, at least two dimension coordinates, and at least one external edge indicator. Thereafter, the restricted polygons are tiled into a set of tiles comprising interior tiles and external edge tiles. Flash data is assigned for each tile such that the interior tiles are assigned a first flash area and the external edge tiles are assigned a second flash area that is smaller than the first flash area. The flash data is arranged in a selected order to write the pattern with a modulated particle beam, such as an electron beam, on a substrate.
摘要翻译：可以使用成形的粒子束写入策略来将具有粒子束的图案写入到衬底上。该图案包括断裂成多个任意多边形的电路设计。写入策略包括将任意多边形变换和压缩成多个受限多边形，每个受限多边形由位置坐标，至少两个维度坐标以及至少一个外部边缘指示符表示。此后，将限制的多边形平铺成包括内部瓦片和外部边缘瓦片的一组瓦片。为每个瓦片指定闪存数据，使得内部瓦片被分配第一闪光区域，并且外部边缘瓦片被分配比第一闪光区域小的第二闪光区域。闪光数据以选定的顺序排列，以便在衬底上用诸如电子束的调制的粒子束来写入图案。

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