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1. 发明授权

US08728240B2 Apparatus for vapor condensation and recovery 有权
标题翻译：蒸气冷凝和回收装置
公开(公告)号：US08728240B2
公开(公告)日：2014-05-20
申请号：US13680331
申请日：2012-11-19
申请人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
发明人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
IPC分类号： C23C16/00 , F25B21/02 , F25J1/00
CPC分类号： H01L21/02617 , B01D5/0042 , C23C16/4412 , F25B21/02 , F25B39/04 , F25J1/00 , H01L21/0228
摘要： Methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation.
摘要翻译：用于从沉积过程中使用的气体和前体蒸汽混合物中回收前体蒸气的方法和装置。气体和前体蒸气混合物通过导热壳体中的大量传热表面，导致前体蒸汽冷凝。然后在冷凝后收集液体形式的前体蒸气。

2. 发明授权

US08511583B2 Fine droplet atomizer for liquid precursor vaporization 有权
公开(公告)号：US08511583B2
公开(公告)日：2013-08-20
申请号：US13018689
申请日：2011-02-01
申请人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
发明人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
IPC分类号： B05B17/06 , B05B7/06 , B05B1/08
CPC分类号： B05B17/04 , C23C16/4486
摘要： The present disclosure relates to an apparatus and a method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The apparatus includes a mechanism to control the rate of liquid flow through the apparatus, the mechanism including a piezoelectric actuator to adjust the rate of liquid flow and an atomizing mechanism drawing gas from a compressed gas source such that when the gas source conjoins with the liquid, the liquid is atomized to form droplets suspended in the gas thereby forming a droplet aerosol suitable for subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to form droplets suitable for vaporization and subsequent thin film deposition on a substrate.

3. 发明授权

US08783652B2 Liquid flow control for film deposition 有权
标题翻译：用于膜沉积的液体流量控制
公开(公告)号：US08783652B2
公开(公告)日：2014-07-22
申请号：US13785819
申请日：2013-03-05
申请人： Thuc M. Dinh , Benjamin Y. H. Liu , Yamin Ma
发明人： Thuc M. Dinh , Benjamin Y. H. Liu , Yamin Ma
IPC分类号： F16K31/02 , H01L21/02 , F16K31/122 , F16K7/14
CPC分类号： H01L21/02104 , F16K7/14 , F16K31/007 , F16K31/1221 , Y10T137/0357 , Y10T137/7722 , Y10T137/7759
摘要： An apparatus for controlling liquid flow wherein the apparatus comprises an orifice and an adjacent flexible diaphragm separated from each other by a gap through which a liquid flows. The diaphragm is sufficiently flexible to vary the gap thereby controlling the rate of liquid flowing through the orifice or to provide a positive liquid shutoff of liquid flowing through the orifice. A method for controlling liquid flow through the apparatus comprises flexing said diaphragm to vary a size of the gap to control the rate of liquid flowing through the orifice or to provide a positive liquid shutoff of liquid from flowing through the orifice.
摘要翻译：一种用于控制液体流动的装置，其中所述装置包括通过液体流过的间隙彼此分开的孔和相邻的柔性隔膜。隔膜具有足够的柔性以改变间隙，从而控制流过孔的液体的速率或提供流过孔的液体的正液体截止。用于控制通过该设备的液体流动的方法包括弯曲所述隔膜以改变间隙的尺寸以控制流过孔口的液体的速率或者提供流体通过孔口的液体的正液体截止。

4. 发明授权

US08465791B2 Method for counting particles in a gas 有权
标题翻译：计算气体中颗粒的方法
公开(公告)号：US08465791B2
公开(公告)日：2013-06-18
申请号：US12872697
申请日：2010-08-31
申请人： Benjamin Y. H. Liu , Thuc M. Dinh , William D. Dick , Aaron M. Collins , Francisco J. Romay
发明人： Benjamin Y. H. Liu , Thuc M. Dinh , William D. Dick , Aaron M. Collins , Francisco J. Romay
IPC分类号： C23C16/52
CPC分类号： B05C11/00 , G01N15/065
摘要： A method for detecting particles in a gas by saturating the gas with vapor and causing the gas to flow through a chamber with walls that are at a temperature different than the temperature of the entering gas creating a gas turbulence within the chamber resulting in the gas becoming super-saturated with vapor and causing said super-saturated vapor to condense on said particles and form droplets, which are then detected and counted by an optical light-scattering detector.
摘要翻译：一种通过用气体饱和气体并使气体流过室的气体中的颗粒的方法，其中壁的温度不同于进入气体的温度，在室内产生气体湍流，导致气体变成用蒸汽过饱和并使所述超饱和蒸汽冷凝在所述颗粒上并形成液滴，然后通过光学散射检测器检测并计数。

5. 发明授权

US08711338B2 Apparatus for counting particles in a gas 有权
标题翻译：用于计数气体中的颗粒的装置
公开(公告)号：US08711338B2
公开(公告)日：2014-04-29
申请号：US13603693
申请日：2012-09-05
申请人： Benjamin Y. H. Liu , Thuc M. Dinh , William D. Dick , Aaron M. Collins , Francisco J. Romay
发明人： Benjamin Y. H. Liu , Thuc M. Dinh , William D. Dick , Aaron M. Collins , Francisco J. Romay
IPC分类号： G01N1/00 , G01N1/28 , C23C16/448 , C23C16/455 , C23C16/00
CPC分类号： B05C11/00 , G01N15/065
摘要： The present disclosure describes a method and apparatus for detecting particles in a gas by saturating the gas with vapor and causing the gas to flow through a chamber with walls that are at a temperature different than the temperature of the entering gas creating a gas turbulence within the chamber resulting in the gas becoming super-saturated with vapor and causing said super-saturated vapor to condense on said particles and form droplets, which are then detected and counted by an optical light-scattering detector.
摘要翻译：本公开内容描述了一种用于通过用气体使气体饱和来检测气体中的颗粒并使气体流过室的方法和装置，其中壁的温度不同于进入气体的温度，该温度在内部产生气体湍流导致气体被蒸汽过饱和，并使所述超饱和蒸汽冷凝在所述颗粒上并形成液滴，然后通过光学散射检测器检测和计数。

6. 发明申请

US20110192909A1 Fine droplet atomizer for liquid precursor vaporization 有权
标题翻译：用于液体前体蒸发的细微雾化器
公开(公告)号：US20110192909A1
公开(公告)日：2011-08-11
申请号：US13018689
申请日：2011-02-01
申请人： Benjamin Y.H. Liu , Thuc M. Dinh , Yamin Ma
发明人： Benjamin Y.H. Liu , Thuc M. Dinh , Yamin Ma
IPC分类号： B05B17/04 , B01F3/04
CPC分类号： B05B17/04 , C23C16/4486
摘要： The present disclosure relates to an apparatus and a method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The apparatus includes a mechanism to control the rate of liquid flow through the apparatus, the mechanism including a piezoelectric actuator to adjust the rate of liquid flow and an atomizing mechanism drawing gas from a compressed gas source such that when the gas source conjoins with the liquid, the liquid is atomized to form droplets suspended in the gas thereby forming a droplet aerosol suitable for subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to faun droplets suitable for vaporization and subsequent thin film deposition on a substrate.
摘要翻译：本公开涉及一种用于形成用于蒸发并随后在基板上的薄膜沉积的液滴气溶胶的装置和方法。该装置包括一个控制流过该装置的液体流速的机构，该机构包括用于调节液体流速的压电致动器和从压缩气体源引出气体的雾化机构，使得当气体源与液体结合时，液体被雾化以形成悬浮在气体中的液滴，从而形成适用于随后的薄膜沉积在基底上的液滴气溶胶。该方法包括从压缩气体源抽取气体并从液体源抽取液体。液体和气体以同轴流动关系或径向流动关系或径向和同轴流动之间的角度关系结合，其中气体将液体接合以适应蒸发和随后的薄膜沉积在基底上的液滴。

7. 发明申请

US20090084315A1 METHOD AND APPARATUS FOR PARTICLE FILTRATION AND ENHANCING TOOL PERFORMANCE IN FILM DEPOSITION 有权
标题翻译：膜沉积过程中颗粒过滤和增强工具性能的方法和装置
公开(公告)号：US20090084315A1
公开(公告)日：2009-04-02
申请号：US12235114
申请日：2008-09-22
申请人： Benjamin Y.H. Liu , Yamin Ma , Thuc M. Dinh
发明人： Benjamin Y.H. Liu , Yamin Ma , Thuc M. Dinh
IPC分类号： C23C16/00 , B23P6/00
CPC分类号： C23C16/4402 , Y10T29/4973
摘要： This disclosure pertains to a method and apparatus to permit changing a filter on the input line to a vacuum deposition chamber without breaking or reducing the vacuum for the deposition chamber and other components in the deposition system. Isolation valves are provided at the inlet and outlet of the filter so the filter can be isolated from the source of vacuum and the deposition chamber for removal and replacement of the filter.
摘要翻译：本公开涉及一种允许将输入管线上的过滤器改变为真空沉积室而不破坏或减少沉积室和沉积系统中的其它部件的真空的方法和装置。在过滤器的入口和出口处提供隔离阀，因此过滤器可以与真空源和沉积室隔离，以移除和更换过滤器。

8. 发明授权

US09089800B2 Method and apparatus for vapor and gas filtration 有权
标题翻译：蒸汽和气体过滤的方法和装置
公开(公告)号：US09089800B2
公开(公告)日：2015-07-28
申请号：US13570364
申请日：2012-08-09
申请人： Benjamin Y.H. Liu , Yamin Ma , Thuc M. Dinh
发明人： Benjamin Y.H. Liu , Yamin Ma , Thuc M. Dinh
IPC分类号： B01D46/00 , B01D39/20 , B01D46/24 , C23C16/448
CPC分类号： B01D39/2044 , B01D46/0021 , B01D46/2403 , C23C16/448
摘要： A gas filtration apparatus and method comprises a housing with an inlet for gas to enter and an outlet for the gas to exit. The housing contains a filter comprised of sintered metal fibers having an active filtration area through which the gas flows to remove suspended particles from the gas. The filter is substantially uniform in thickness and porosity through the active filtration area. The filter media being sealed to a metal structure in the housing with the metal structure having an opening to permit gas to flow through. A method of making a vapor/gas mixture includes the steps of producing a vapor in a gas to form the vapor/gas mixture passing the vapor/gas mixture through an opening in a housing containing a filter comprised of sintered metal fibers through which the vapor/gas mixture flows.
摘要翻译：一种气体过滤装置和方法包括具有用于进入气体的入口和用于气体排出的出口的壳体。壳体包含由具有活性过滤区域的烧结金属纤维组成的过滤器，气体通过该过滤区域流动以从气体中除去悬浮颗粒。过滤器通过活性过滤区域的厚度和孔隙率基本上是均匀的。过滤介质被密封到壳体中的金属结构，金属结构具有开口以允许气体流过。制备蒸汽/气体混合物的方法包括以下步骤：在气体中产生蒸汽，以形成通过蒸气/气体混合物的蒸气/气体混合物通过包含烧结金属纤维的过滤器的开口的气体/气体混合物，蒸气/ /气体混合物流。

9. 发明申请

US20130295749A1 Apparatus for vapor condensation and recovery 有权
标题翻译：蒸气冷凝和回收装置
公开(公告)号：US20130295749A1
公开(公告)日：2013-11-07
申请号：US13680331
申请日：2012-11-19
申请人： Benjamin Y.H. Liu , Thuc M. Dinh , Yamin Ma
发明人： Benjamin Y.H. Liu , Thuc M. Dinh , Yamin Ma
IPC分类号： H01L21/02 , F25J1/00 , F25B21/02
CPC分类号： H01L21/02617 , B01D5/0042 , C23C16/4412 , F25B21/02 , F25B39/04 , F25J1/00 , H01L21/0228
摘要： Methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation.
摘要翻译：用于从沉积过程中使用的气体和前体蒸汽混合物中回收前体蒸汽的方法和装置。气体和前体蒸气混合物通过导热壳体中的大量传热表面，导致前体蒸汽冷凝。然后在冷凝后收集液体形式的前体蒸气。

10. 发明申请

US20130203264A1 Method and apparatus for vapor and gas filtration 有权
公开(公告)号：US20130203264A1
公开(公告)日：2013-08-08
申请号：US13570364
申请日：2012-08-09
申请人： Benjamin Y.H. Liu , Yamin Ma , Thuc M. Dinh
发明人： Benjamin Y.H. Liu , Yamin Ma , Thuc M. Dinh
IPC分类号： B01D39/20 , H01L21/302 , C23C16/455 , B01D46/00 , C23C16/50
CPC分类号： B01D39/2044 , B01D46/0021 , B01D46/2403 , C23C16/448
摘要： A gas filtration apparatus and method comprises a housing with an inlet for gas to enter and an outlet for the gas to exit. The housing contains a filter comprised of sintered metal fibers having an active filtration area through which the gas flows to remove suspended particles from the gas. The filter is substantially uniform in thickness and porosity through the active filtration area. The filter media being sealed to a metal structure in the housing with the metal structure having an opening to permit gas to flow through. A method of making a vapor/gas mixture includes the steps of producing a vapor in a gas to form the vapor/gas mixture passing the vapor/gas mixture through an opening in a housing containing a filter comprised of sintered metal fibers through which the vapor/gas mixture flows.

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