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1. 发明申请

US20080085089A1 Wafer Scale Method Of Manufacturing Optical Waveguide Devices And The Waveguide Devices Made Thereby 有权
标题翻译：制造光波导器件的晶片刻度方法和由此制造的波导器件
公开(公告)号：US20080085089A1
公开(公告)日：2008-04-10
申请号：US11769070
申请日：2007-06-27
申请人： Benjamin Catching , Donald Friedrich , Charles Hulse , Marc Von Gunten , Jason Reed , Karl Kissa , Glen Drake , Julia Duncan , William Minford , Hiren Shah , Jerry Zieba , Jason Xu
发明人： Benjamin Catching , Donald Friedrich , Charles Hulse , Marc Von Gunten , Jason Reed , Karl Kissa , Glen Drake , Julia Duncan , William Minford , Hiren Shah , Jerry Zieba , Jason Xu
IPC分类号： G02B6/10 , B29D11/00
CPC分类号： G02F1/377 , G02B6/13 , G02B6/1342 , G02B2006/1204 , G02B2006/12097 , G02F2201/06 , G02F2201/07
摘要： The invention relates to a wafer scale process for the manufacture of optical waveguide devices, and particularly for the manufacture of ridge waveguide devices, and the improved waveguides made thereby. The present invention has found a process for achieving sub-micron control of an optical waveguiding layer thickness by providing a dimensionally stable wafer assembly into which adhesive can be introduced without altering the planar relationship between a carrier wafer and an optically transmissive wafer in wafer scale manufacture. This process permits wafer scale manufacture of optical waveguide devices including thin optically transmissive layers. A pattern of spacer pedestals is created by a deposition and etch back, or by a surface etch process to precisely reference surface information from a master surface to a carrier wafer to a thin optically transmissive wafer. The tolerance achievable in accordance with this process provides consistent yield across the wafer.
摘要翻译：本发明涉及一种用于制造光波导器件的晶片刻度工艺，特别涉及脊波导器件的制造以及由此制成的改进的波导。本发明已经发现了一种通过提供尺寸稳定的晶片组件来实现光学波导层厚度的亚微米控制的方法，其中可以引入粘合剂而不改变晶片规模制造中的载体晶片和光学透射晶片之间的平面关系。该方法允许晶圆级制造包括薄光学透射层的光波导器件。通过沉积和回蚀，或通过表面蚀刻工艺来产生间隔基座的图案，以将表面信息从主表面精确地参考到载体晶片到薄的光学透射晶片。根据该方法可实现的公差提供了跨晶片的一致产率。

2. 发明申请

US20050174641A1 Polarization conversion light integrator 审中-公开
标题翻译：极化转换光积分器
公开(公告)号：US20050174641A1
公开(公告)日：2005-08-11
申请号：US11098235
申请日：2005-04-04
申请人： Michael Greenberg , Anthony McGettigan , Markus Duelli , Curtis Hruska , Benjamin Catching
发明人： Michael Greenberg , Anthony McGettigan , Markus Duelli , Curtis Hruska , Benjamin Catching
IPC分类号： G02B27/28 , G02F1/13357 , H04N9/31 , G02F1/1335 , G02B5/30
CPC分类号： G02F1/13362 , G02B27/283 , H04N9/3117 , H04N9/315
摘要： A polarizing conversion system uses a polarizing beam splitter and reflector with a polarization conversion element to convert light from a lamp to a selected polarization state before providing the light to a light integrator, such as a light pipe or light tunnel. The light integrator provides homogenized polarized light to a light modulator. The polarization conversion system avoids increases efficiency compared to absorptive or simple reflective polarizers with fewer components than polarization conversion systems using patterned retarder plates and lenslet arrays. In one embodiment, the conversion elements are held to avoid adhesive or other bonds in the optical path. In other embodiments, high-temperature optical adhesive or optical contact bonding is used to assemble optical components for high-temperature operation. In a particular embodiment, a single-crystal quartz retarder plate is thermally matched to glass components in the polarization conversion system.
摘要翻译：偏振转换系统使用偏振分束器和具有偏振转换元件的反射器，以在将光提供给诸如光管或光通道的光积分器之前将来自灯的光转换为选定的偏振状态。光积分器向光调制器提供均匀的偏振光。与使用图案化延迟板和透镜阵列的偏光转换系统相比，具有较少成分的吸收性或简单的反射偏振器相比，偏振转换系统避免提高效率。在一个实施例中，保持转换元件以避免光路中的粘合剂或其它粘合。在其他实施例中，使用高温光学粘合剂或光学接触粘合来组装用于高温操作的光学部件。在特定实施例中，单晶石英延迟板与偏振转换系统中的玻璃部件热匹配。

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