会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明申请
    • Manufacturing Method of an Array Substrate
    • 阵列基板的制造方法
    • US20150348999A1
    • 2015-12-03
    • US14519480
    • 2014-10-21
    • BOE TECHNOLOGY GROUP CO., LTD.BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
    • Huibin GUOShoukun WANGXiaowei LIUYuchun FENGZongjie GUO
    • H01L27/12H01L29/45H01L29/49
    • H01L27/1262H01L27/1288H01L29/458H01L29/4908
    • Provided is a manufacturing method of an array substrate with an etching stop layer. The method includes: forming a pattern including a gate, a gate line and a common electrode line on a substrate through a first patterning process; forming a gate insulation layer, an active layer film and an etching stop layer through a second patterning process; wherein, the etching stop layer corresponds to a gap between a source and a drain which are to be formed, and a via hole exposing the common electrode line is formed above the common electrode line; forming at least an active layer, a pattern including source, drain and data line and a protection layer through a third patterning process; wherein, the protection layer exposes a part of the drain; and forming at least a pixel electrode through a fourth patterning process; wherein, the pixel electrode is electrically connected with the drain.
    • 提供了具有蚀刻停止层的阵列基板的制造方法。 该方法包括:通过第一图案化工艺在衬底上形成包括栅极,栅极线和公共电极线的图案; 通过第二图案化工艺形成栅极绝缘层,有源层膜和蚀刻停止层; 其中,所述蚀刻停止层对应于要形成的源极和漏极之间的间隙,并且在所述公共电极线上方形成暴露所述公共电极线的通孔; 通过第三图案化工艺形成至少有源层,包括源极,漏极和数据线的图案和保护层; 其中,所述保护层暴露所述漏极的一部分; 以及通过第四图案化工艺形成至少一个像素电极; 其中,像素电极与漏极电连接。