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1. 发明授权

US4597003A Chemical etching of a semiconductive wafer by undercutting an etch stopped layer 失效
标题翻译：通过底切蚀刻停止层对半导体晶片进行化学蚀刻
公开(公告)号：US4597003A
公开(公告)日：1986-06-24
申请号：US556832
申请日：1983-12-01
申请人： Harry E. Aine , Barry Block
发明人： Harry E. Aine , Barry Block
IPC分类号： H01L21/306 , H01L21/308 , G01L1/22
CPC分类号： H01L21/3086 , H01L21/30608 , H01L21/3081 , Y10T29/49103
摘要： Three dimensional single crystalline structures, such as folded cantilever beams supported from a frame and supporting a central structure free to move relative to the frame, are fabricated by anisotropically etching through openings in etch stop layers on opposite sides of the substrate wafer. The openings are patterned and aligned so that the etch stop layers are undercut to define etch stop portions interconnected by unetched substrate material.
摘要翻译：通过各向异性蚀刻穿过衬底晶片的相对侧上的蚀刻停止层中的开口，制造三维单晶结构，例如从框架支撑并支撑相对于框架自由移动的中心结构的折叠悬臂梁。开口被图案化和对准，使得蚀刻停止层被底切以限定通过未蚀刻的衬底材料互连的蚀刻停止部分。

2. 发明授权

US4783237A Solid state transducer and method of making same 失效
标题翻译：固态传感器及其制作方法
公开(公告)号：US4783237A
公开(公告)日：1988-11-08
申请号：US873854
申请日：1986-06-11
申请人： Harry E. Aine , Barry Block
发明人： Harry E. Aine , Barry Block
IPC分类号： G01P15/08 , H01L21/02
CPC分类号： G01P15/0802 , G01P2015/0828 , Y10S438/97
摘要： Folded cantilever structures and solid state force transducers using same are made by chemical etching of a semiconductive wafer. In the chemical etching process, an etch stop layer is provided on a wafer of semiconductive material. The etch stop layer is opened in a certain pre-determined pattern and etchant is introduced through the opening in the etch stop layer to produce substantial undercut etching of portions of the etch stop layer. The opening is patterned to define a support structure (frame) for the folded cantilever portion which is undercut. The etch is terminated such that one end of the undercut folded cantilever structure is supported from the frame and the other end terminates on a structure such as a mass that is supported from the frame by means of the folded cantilever structure.
摘要翻译：通过化学蚀刻半导体晶片制造折叠的悬臂结构和使用它们的固态力传感器。在化学蚀刻工艺中，在半导体材料的晶片上提供蚀刻停止层。蚀刻停止层以特定的预定图案打开，并且蚀刻剂通过蚀刻停止层中的开口引入，以对蚀刻停止层的部分产生大量的底切蚀刻。将开口图案化以限定用于底切的折叠悬臂部分的支撑结构（框架）。蚀刻被终止，使得底切折叠的悬臂结构的一端从框架支撑，另一端终止于诸如通过折叠的悬臂结构从框架支撑的质量的结构上。

3. 发明授权

US4600934A Method of undercut anisotropic etching of semiconductor material 失效
标题翻译：半导体材料的底切各向异性蚀刻方法
公开(公告)号：US4600934A
公开(公告)日：1986-07-15
申请号：US573693
申请日：1984-01-25
申请人： Harry E. Aine , Barry Block
发明人： Harry E. Aine , Barry Block
IPC分类号： B81C1/00 , H01L21/306 , H01L21/308 , H01L29/84 , G01L1/22
CPC分类号： B81C1/0015 , H01L21/30608 , H01L21/30617 , H01L21/3083 , B81B2201/0235 , G01P15/00 , Y10T29/49103
摘要： An etch stopped layer portion overlying a (100) or (110) major face of a diamond cubic semiconductor material is undercut anisotropically etched by orienting a side edge of the etch stopped layer portion which is to be undercut, at an angle to the most nearly parallel {111} trace on the (100) or (110) face. The etch time is further reduced by slotting through the etch stopped layer with slots oriented at an angle to the {111} traces on the underlying (100) or (110) face. Undercut bridge structures are formed by undercutting quadrilateral etch stopped layer portions from opposite sides of the quadrilateral or from the sides plus slots forming diagonals of {111} trace quadrilaterals having combined areas coextensive with the area to be undercut.
摘要翻译：覆盖金刚石立方体半导体材料的（100）或（110）主面上的蚀刻停止层部分通过将要被切削的蚀刻停止层部分的侧边缘定向成最接近（100）或（110）面平行{111}迹线。蚀刻时间进一步减小，通过切槽穿过蚀刻停止层，其中槽以与底层（100）或（110）面上的{111}迹线成一定角度。底切桥结构通过从四边形或从侧面的相对侧或从侧面加上形成具有与要切削的区域共同延伸的组合区域的{111}跟踪四边形的对角线的槽形成四边形蚀刻停止层部分而形成。

4. 发明授权

US4019056A Infrared laser detector employing a pressure controlled differential optoacoustic detector 失效
标题翻译：红外激光探测器采用压力差分光电探测器
公开(公告)号：US4019056A
公开(公告)日：1977-04-19
申请号：US572013
申请日：1975-04-28
申请人： Barry Block , Harry E. Aine
发明人： Barry Block , Harry E. Aine
IPC分类号： G01N21/17 , G01J3/42
CPC分类号： G01N21/1702
摘要： An infrared laser absorption spectrometer is disclosed wherein a pair of detector cells are disposed serially along the laser beam path. The laser beam is modulated to produce a modulation of the absorption by the sample materials in the two cells. Modulated absorption by the samples produces an acoustic wave in each cell which is detected by a suitable microphone and subtracted so as to produce a difference signal corresponding to the difference in infrared absorption between the two cells so that undesired background effects common to both cells are cancelled. A pressure controller, which is responsive to the pressure difference between the sample pressure in the two cells at a frequency substantially below the beam modulation frequency is employed for controlling the pressure differential. In one embodiment the pressure controller includes a compliant membrane partitioning the two cells so that the membrane may move so as to equalize the pressures. In a second embodiment, deflection of the diaphragm of a differential microphone coupled into both cells is employed to derive an output utilized to control either the flow through the cells and/or the volume of the respective cells to control the pressure difference between the cells.
摘要翻译：公开了一种红外激光吸收光谱仪，其中一对检测器单元沿着激光束路径串联布置。调制激光束以产生两个单元中的样品材料的吸收的调制。样本的调制吸收在每个单元中产生声波，由合适的麦克风检测并减去，以产生对应于两个单元之间的红外吸收差的差信号，从而消除两个单元共同的不期望的背景效应。采用压力控制器，该压力控制器以基本上低于束调制频率的频率响应两个单元中的样品压力之间的压力差来控制压力差。在一个实施例中，压力控制器包括分隔两个电池的顺应膜，使得膜可以移动以便均衡压力。在第二实施例中，使用耦合到两个单元中的差分麦克风的隔膜的偏转来导出用于控制通过单元的流量和/或各个单元的体积以控制单元之间的压力差的输出。

5. 发明授权

US4733559A Thermal fluid flow sensing method and apparatus for sensing flow over a wide range of flow rates 失效
标题翻译：热流体流量检测方法和装置，用于检测大范围流量的流量
公开(公告)号：US4733559A
公开(公告)日：1988-03-29
申请号：US892111
申请日：1986-08-04
申请人： Harry E. Aine , Barry Block
发明人： Harry E. Aine , Barry Block
IPC分类号： G01F1/684 , G01F1/696 , G01F7/00 , G01F1/68
CPC分类号： G01F1/696 , G01F1/684 , G01F1/6845 , G01F1/6847 , G01F7/00
摘要： Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart. In one thermal flow sensor configuration, a flow heater is dispsoed inbetween first and second thermal flow sensors in heat exchanging relation therewith. A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor. In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow.
摘要翻译：通过在薄片材料上形成热流体流量传感器并将片材粘合在管道结构阵列上并将各个传感器和管道结构分开切割，从而以分批形式制造翼型的微型热流体流量传感器。在一个热流传感器配置中，流动加热器分布在与其交换热交换的第一和第二热流传感器之间。第三热流传感器设置在与加热器的热交换关系之外的其他热流传感器的上游，以在高于由第三传感器感测的温度的一定温度下操作加热器。在低流量状态下，通过第一和第二传感器的输出之间的差异测量流量，而在高流量状态下，维持加热器温度所需的功率用作流量的度量。

6. 发明授权

US4585209A Miniature valve and method of making same 失效
标题翻译：微型阀及其制作方法
公开(公告)号：US4585209A
公开(公告)日：1986-04-29
申请号：US545907
申请日：1983-10-27
申请人： Harry E. Aine , Barry Block
发明人： Harry E. Aine , Barry Block
IPC分类号： F15C5/00 , F16K31/02 , F16K99/00 , G05D7/06
CPC分类号： F16K99/0001 , F15C5/00 , F16K31/02 , F16K99/0007 , F16K99/0051 , F16K99/0057 , G05D7/0694 , F16K2099/0074 , F16K2099/008 , F16K99/0034 , Y10T137/7891
摘要： In a miniature valve, a valve seat is formed by aperturing a plate. A cantilever leaf spring is disposed overlying the apertured plate for controlling the flow of fluid therethrough. An electrostatic potential applied between the cantilever leaf spring and the valve plate pulls the leaf spring over the apertured plate for variably controlling flow through the valve in accordance with the magnitude of the applied potential. In a preferred embodiment, the cantilever leaf springs are made in batch form by etching a silicon wafer. A flow controller is provided by measuring the electrical capacitance of the valve, comparing it with a reference voltage and deriving a feedback voltage applied to the valve for controlling flow therethrough. In one embodiment, the width of the cantilever leaf spring valve member is narrowed toward its free end for finer control of flow.
摘要翻译：在微型阀中，通过打开板形成阀座。悬臂板簧设置在多孔板上，用于控制流体的流动。施加在悬臂板弹簧和阀板之间的静电势将片簧拉动在孔板上，用于根据施加电位的大小可变地控制通过阀的流量。在优选实施例中，悬臂板弹簧通过蚀刻硅晶片而成批制成。通过测量阀的电容量来提供流量控制器，将其与参考电压进行比较，并得出施加到阀门的反馈电压，以控制流过其中的流量。在一个实施例中，悬臂弹簧阀构件的宽度朝向其自由端变窄以更精细地控制流量。

7. 发明授权

US4633578A Miniature thermal fluid flow sensors and batch methods of making same 失效
标题翻译：微型热流体流量传感器和批量制造方法
公开(公告)号：US4633578A
公开(公告)日：1987-01-06
申请号：US556800
申请日：1983-12-01
申请人： Harry E. Aine , Barry Block
发明人： Harry E. Aine , Barry Block
IPC分类号： G01F1/684 , G01F1/696 , G01F7/00 , H01C17/06 , G01F1/68
CPC分类号： G01F1/684 , G01F1/6845 , G01F1/6847 , G01F1/696 , G01F7/00 , Y10T29/49085 , Y10T29/49099
摘要： Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart. In another embodiment, thin carrier sheet portions of a wafer bearing the thermal fluid flow sensors of the airfoil or grid type are supported by surrounding frame portions of the wafer. The wafer is diced to separate the individual sensing chips. The respective chips are mounted across respective fluid flow ducts. For the airfoil type sensor, portions of the frame are broken away for undisturbed flow over the thin carrier and sensor. In one thermal flow sensor configuration, a flow heater is disposed in between first and second thermal flow sensors in heat exchanging relation therewith. A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor. In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow.
摘要翻译：通过在薄片材料上形成热流体流量传感器并将片材粘合在管道结构阵列上并将各个传感器和管道结构分开切割，从而以分批形式制造翼型的微型热流体流量传感器。在另一个实施例中，承载翼型或格栅型热流体流量传感器的晶片的薄载体片部分由晶片的周围框架部分支撑。切割晶片以分离各个感测芯片。相应的芯片安装在相应的流体流动管道上。对于翼型传感器，框架的部分被分离，以便在薄的载体和传感器上不受干扰地流动。在一个热流传感器构造中，流动加热器设置在与其热交换关系的第一和第二热流传感器之间。第三热流传感器设置在与加热器的热交换关系之外的其他热流传感器的上游，以在高于由第三传感器感测的温度的一定温度下操作加热器。在低流量状态下，通过第一和第二传感器的输出之间的差异测量流量，而在高流量状态下，维持加热器温度所需的功率用作流量的度量。

8. 发明授权

US5000817A Batch method of making miniature structures assembled in wafer form 失效
标题翻译：以晶圆形式组装的微型结构的批量方法
公开(公告)号：US5000817A
公开(公告)日：1991-03-19
申请号：US145465
申请日：1988-01-19
申请人： Harry E. Aine
发明人： Harry E. Aine
IPC分类号： B01L3/00 , G01L1/14 , G01P15/08 , G01P15/125 , H01L21/78
CPC分类号： H01L21/78 , B81C1/00142 , G01L1/148 , G01P15/0802 , G01P15/125 , B01L3/5027 , B81B2201/0235 , B81B2203/0109 , G01P2015/0828
摘要： A batch method for fabricating semiconductor capacitive force transducers is disclosed wherein a first wafer of silicon or fused silica is recessed by etching to define an array of force transducer structures, each including a deflectable portion supported from a surrounding frame portion. The first wafer is thermoelectrically bonded between a pair of glass or quartz plates, each plate having an array of electrode structures for capacitively sensing deflection of the individual force transducers. Each electrode structure includes a lead portion passing over the frame portion of the transducers and being spaced from the frame to provide a gas communication passageway through the frame to the capacitive gap between the electrode structure and the deflectable portion of each transducer. The composite assembled wafers are notched along cleave lines generally outlining the individual transducer structures. The notching along the cleave lines is preferably performed by sawing or scribing with the saw kerf or scribe lines extending only partially through the plates so as not to contaminate the individual transducer devices. The individual transducer structures are then cleaved from the composite wafer so as not to introduce contaminants into the individual transducers.
摘要翻译：公开了一种用于制造半导体电容力换能器的分批方法，其中硅或熔融石英的第一晶片通过蚀刻凹陷以限定力传感器结构的阵列，每个力传感器结构包括从周围框架部分支撑的可偏转部分。第一晶片被热电接合在一对玻璃或石英板之间，每个板具有电极结构阵列，用于电容地感测各个力传感器的偏转。每个电极结构包括穿过换能器的框架部分并且与框架间隔开的引导部分，以提供穿过框架的气体连通通道到电极结构和每个换能器的可偏转部分之间的电容间隙。复合组装的晶片沿着通常概述各个换能器结构的解剖线切口。沿着切割线的切口优选通过锯切或划线来实现，锯切或划线仅部分延伸穿过板，以便不污染各个换能器装置。然后将各个换能器结构从复合晶片切割成不会将污染物引入各个换能器中。

9. 发明授权

US4601072A Swimming pool cover 失效
标题翻译：游泳池盖
公开(公告)号：US4601072A
公开(公告)日：1986-07-22
申请号：US640867
申请日：1984-08-15
申请人： Harry E. Aine
发明人： Harry E. Aine
IPC分类号： E04H4/08 , F24J2/04 , E04H3/19
CPC分类号： F24J2/0472 , E04H4/08 , E04H4/088 , Y02E10/44
摘要： A thermally insulative buoyant swimming pool cover floats on the surface of the pool for covering the pool and for retaining the heat within the pool. Sinking means, such as weights or a mechanical pull-down structure, may be secured to the pool cover along certain predetermined action lines such as fold lines. In one embodiment, an inflatable and deflatable bladder is coupled to the weights. The bladder is dimensioned relative to the weights such that when inflated it overcomes the negative buoyancy of the weights to retain the pool cover in the fully covered position. However, when the bladder is deflated, the weights overcome the positive buoyancy of the cover along the certain fold lines causing the cover to be at least partially pulled below the surface of the pool and folded while at the same time being retracted against one of the side walls of the pool. Pool water is circulated over or through channels of the pool cover to provide solar heating. Pool water is circulated over the top of the cover for cleaning thereof. The weights, in one embodiment, are hollow to receive the inflatable bladders. Air permeable structures are contained within the bladders to obtain more uniform inflation thereof. The lip of the cover contains additional positive buoyancy for additional support at the lip. In an alternative embodiment, air and water are fed into a container or conduit portion of the cover, the ratio by volume of air to water is changed for switching the cover between a pool covering and a pool uncovering state. Air is injected via a venturi into the pool return line which is connected to the cover. The air and water mixture is fed through solar heating channels of the cover for solar heating of the pool water.
摘要翻译：一个隔热浮游泳池盖漂浮在游泳池的表面，用于覆盖游泳池，并保持游泳池内的热量。诸如重物或机械下拉结构的下沉装置可以沿着某些预定的作用线（例如折叠线）固定到池盖。在一个实施例中，可充气和可放气的囊联接到重物。膀胱的尺寸相对于重物的尺寸，使得当膨胀时，它克服了重物的负浮力，以将池盖保持在完全覆盖的位置。然而，当气囊收缩时，重量克服了盖沿着某些折叠线的正向浮力，导致盖至少部分地被拉到池的表面下方并折叠，同时与其中一个游泳池的侧壁。游泳池水在池盖的通道上或通过泳池盖的通道循环，以提供太阳能加热。池水循环在盖的顶部以进行清洁。在一个实施例中，重物是中空的以容纳可膨胀囊。透气结构包含在气囊内以获得更均匀的充气。盖子的唇缘还包含额外的积极浮力，以增加唇部的支撑。在替代实施例中，空气和水被输送到盖的容器或管道部分中，改变空气与水的体积比以在池盖和池露出状态之间切换盖。空气通过文氏管被注入连接到盖的池返回管线。空气和水的混合物通过太阳能加热通道进入太阳能加热池的水。

10. 发明授权

US4058725A Infrared absorption spectrometer employing a dual optoacoustic detector 失效
标题翻译：红外线吸收光谱仪采用双光电探测器
公开(公告)号：US4058725A
公开(公告)日：1977-11-15
申请号：US565008
申请日：1975-04-04
申请人： Harry E. Aine
发明人： Harry E. Aine
IPC分类号： G01N21/17
CPC分类号： G01N21/1702
摘要： An infrared laser absorption spectrometer is disclosed wherein a pair of detector cells are disposed in series relative to the laser beam path, such beam path preferably being within the optical cavity of the laser. The laser beam is modulated to produce a modulation of the absorption, if any, by the sample materials in the two cells. Modulated absorption by the sample or samples produces an acoustic wave in each cell which is detected by a suitable microphone and subtracted so as to produce a difference signal corresponding to the difference in absorption between the two cells so that undesired background effects are cancelled, such as window heating, absorption by a carrier gas or the like which is common to both cells. A mirror placed over one end of one of the cells allows a two cell optoacoustic detector geometry having only two windows therein. The dual optoacoustic cell is particularly useful for monitoring the output of a gas chromatograph since the background associated with the carrier stream can be cancelled.
摘要翻译：公开了一种红外激光吸收光谱仪，其中一对检测器单元相对于激光束路径串联布置，这种光束路径优选地位于激光器的光腔内。调制激光束以产生由两个电池中的样品材料的吸收（如果有的话）的调制。样品或样品的调制吸收在每个单元格中产生声波，由适当的麦克风检测并减去，以产生对应于两个单元之间的吸收差的差信号，从而消除不期望的背景效应，例如窗口加热，由两个电池共同的载气等的吸收。放置在其中一个单元的一端的反射镜允许两单元光声检测器几何形状在其中只有两个窗口。双光电池特别适用于监测气相色谱仪的输出，因为可以取消与载体流相关的背景。

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