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    • 3. 发明授权
    • Bonding for a micro-electro-mechanical system (MEMS) and MEMS based devices
    • 用于微机电系统(MEMS)和基于MEMS的器件的接合
    • US06793829B2
    • 2004-09-21
    • US10083978
    • 2002-02-27
    • William P. PlattCarol M. Ford
    • William P. PlattCarol M. Ford
    • H01L21302
    • B81C1/00269B81C2203/0109B81C2203/038H01L2224/48247
    • A method of bonding and packaging components of Micro-Electro-Mechanical Systems (MEMS) and MEMS based devices using a Solid-Liquid InterDiffusion (SLID) process is provided. A micro-machine is bonded to a micro-machine chip using bonding materials. A layer of chromium is first deposited onto surfaces of the micro-machine and the micro-machine chip followed by a layer of gold. Subsequently, a layer of indium is deposited between the layers of gold, and the surface of the micro-machine is pressed against the surface of the micro-machine chip forming a gold-indium alloy to serve as a bond between the micro-machine and the micro-machine chip. In addition, a cover is bonded to the micro-machine chip in the same manner providing a hermetic seal for the MEMS based device.
    • 提供了使用固体 - 液体互扩散(SLID)工艺来结合和封装微机电系统(MEMS)和基于MEMS的器件的组件的方法。 使用接合材料将微机器结合到微机芯片。 首先将一层铬沉积在微机器和微机芯片的表面上,之后是一层金。 随后,在金层之间沉积一层铟层,微机的表面压在形成金铟合金的微机芯片的表面上,作为微机与 微机芯片。 此外,以与以MEMS为基础的装置提供气密密封相同的方式将盖结合到微机芯片。
    • 5. 发明授权
    • Reduced start time for MEMS gyroscope
    • 降低MEMS陀螺仪的启动时间
    • US06769304B2
    • 2004-08-03
    • US10114968
    • 2002-04-02
    • William P. PlattMark W. Weber
    • William P. PlattMark W. Weber
    • G01P15125
    • G01C19/5719
    • By applying a first value of voltage to a first side of a MEMS gyroscope and applying a second value of voltage to a second side of the MEMS gyroscope, the start time of the MEMS gyroscope may be improved. The first and second value of voltage may be provided by a bias power source, such as a battery or a super capacitor. The first value of voltage may be substantially equal in magnitude to and opposite in polarity to the second value of voltage. The bias power source may also be applied to drive electronics connected to the MEMS gyroscope. The bias power source may prevent amplifiers within the drive electronics from saturating during the start time.
    • 通过将第一电压值施加到MEMS陀螺仪的第一侧并将第二电压值施加到MEMS陀螺仪的第二侧,可以提高MEMS陀螺仪的开始时间。 电压的第一和第二值可以由诸如电池或超级电容器的偏置电源来提供。 电压的第一值可以在大小上相当于与第二电压值极性相反。 偏置电源也可以应用于驱动连接到MEMS陀螺仪的电子设备。 偏置电源可能会阻止驱动器电子器件内的放大器在启动时间内饱和。
    • 10. 发明申请
    • RAPID READOUT LOGIC FOR MEMS GYROSCOPE
    • 用于MEMS陀螺仪的快速读取逻辑
    • US20080103725A1
    • 2008-05-01
    • US11554890
    • 2006-10-31
    • William P. Platt
    • William P. Platt
    • G01P3/00
    • G01C19/5719
    • A system and method for deriving an angular rate includes receiving a motor pick off signal received from a motor pick off of from a MEMS gyroscope. Receiving a sensing pick off signal received from a sensing pick off from the MEMS gyroscope allows the determining of a phase relationship between the motor pick off signal and the sensing pick off signal. Determining an angular rate is based upon an amplitude of the sensing pick off signal. Determining the whether the sign of the rotational rate is positive or negative is based upon the phase relationship of the sensing pick off signal from a MEMS gyroscope relative to the motor pick off signal received from the motor pick off.
    • 用于导出角速率的系统和方法包括从MEMS陀螺仪接收从电机拾取器接收的电机拾取信号。 从MEMS陀螺仪接收从感测拾取器接收的感测拾取信号允许确定电动机拾取信号和感测拾取信号之间的相位关系。 确定角速度是基于感测拾取信号的振幅。 确定旋转速率的符号是正还是负是基于来自MEMS陀螺仪的感测拾取信号相对于从电机拾取接收的电动机拾取信号的相位关系。