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    • 4. 发明授权
    • Method for contactless testing of conducting paths in a substrate using
photo-assisted tunneling
    • 使用光辅助隧道对基板中的导电路径进行非接触测试的方法
    • US4868492A
    • 1989-09-19
    • US107441
    • 1987-10-09
    • Johannes G. BehaArmin U. BlachaRolf ClaubergHugo K. Seitz
    • Johannes G. BehaArmin U. BlachaRolf ClaubergHugo K. Seitz
    • H01L21/66G01N23/225G01R31/02G01R31/308H05K3/00
    • G01R31/308
    • For testing the integrity of conducting lines on or in a substrate, the following steps are executed: (I) Selected pads are irradiated by a focused optical beam so that they are positively charged due to photon-assisted tunneling of electrons from those pads. The charges propagate through existing conductors so that all selected pads and all pads connected to them assume a specific voltage. (II) The whole surface is irradiated by a flooding optical beam. Photon-assisted tunneling of electrons will now occur from those pads which were not charged previously. (III) The tunneling electrons excite an electroluminescent layer whose illumination reveals the spatial distribution of uncharged pads. This method is performed in air under atmospheric conditions and allows completely contactless testing of circuitry to detect line interruptions as well as shortcuts between separate lines. It is suited for surface lines, buried lines and for via connections.
    • 为了测试衬底上或衬底中的导线的完整性,执行以下步骤:(I)由聚焦光束照射所选择的焊盘,使得它们由于来自这些焊盘的电子的光子辅助隧穿而带正电荷。 电荷通过现有导体传播,使得所有选定的焊盘和连接到它们的所有焊盘都具有特定的电压。 (II)整个表面被淹没光束照射。 电子的光子辅助隧道现在将从以前没有充电的那些焊盘发生。 (III)隧道电子激发电致发光层,其照明显示不带电垫的空间分布。 该方法在大气条件下在空气中进行,并允许电路完全非接触测试,以检测线路中断以及分离线路之间的快捷方式。 适用于表面线,埋线和通孔连接。