会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明授权
    • Method for forming metal wiring in semiconductor device
    • 在半导体器件中形成金属布线的方法
    • US07276443B2
    • 2007-10-02
    • US11134640
    • 2005-05-20
    • Soo Hyun KimJun Ki Kim
    • Soo Hyun KimJun Ki Kim
    • H01L21/44
    • H01L21/76877H01L21/28556H01L21/28562
    • Disclosed is a method for forming a metal wiring in a semiconductor device in order to improve the operational speed of the semiconductor device. The method includes the steps of depositing an interlayer dielectric film on a silicon substrate, in which the interlayer dielectric film has a contact hole for exposing a predetermined portion of the silicon substrate, depositing a barrier layer on the interlayer dielectric film having the contact hole, depositing a first tungsten layer on the barrier layer by using SiH4 as a reaction gas, depositing a second tungsten layer on the first tungsten layer by using B2H6 as a reaction gas, depositing a third tungsten layer on the second tungsten layer in such a manner that the contact hole is filled with the third tungsten layer, and selectively etching the third tungsten layer, the second tungsten layer, the first tungsten layer, and the barrier layer, thereby forming the metal wiring.
    • 公开了一种用于在半导体器件中形成金属布线以提高半导体器件的操作速度的方法。 该方法包括以下步骤:在硅衬底上沉积层间电介质膜,其中层间电介质膜具有用于暴露硅衬底的预定部分的接触孔,在具有接触孔的层间电介质膜上沉积阻挡层, 通过使用SiH 4 S作为反应气体在阻挡层上沉积第一钨层,通过使用B 2 H 2 H 2在第一钨层上沉积第二钨层, 作为反应气体,以这样的方式在第二钨层上沉积第三钨层,使得接触孔填充有第三钨层,并且选择性地蚀刻第三钨层,第二钨层, 第一钨层和阻挡层,从而形成金属布线。