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    • 2. 发明申请
    • SCANNING PROBE MICROSCOPE WITH IMPROVED FEATURE LOCATION CAPABILITIES
    • 扫描探针显微镜具有改进的特征位置能力
    • WO2013142489A1
    • 2013-09-26
    • PCT/US2013/032957
    • 2013-03-19
    • BRUKER NANO, INC.
    • MEYER, Charles
    • G01Q30/00G01Q40/00
    • G01Q10/00B82Y35/00G01Q30/02G01Q40/00G01Q60/38
    • An SPM assembly (20) includes an SPM (26) and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera (22) having wide field of view in excess of 12 mm, and a high magnification camera (24) having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.
    • SPM组件(20)包括SPM(26)和宽场图像采集装置,其可用于快速定位感兴趣区域并将该区域定位在100微米或更小的SPM扫描范围内。 宽视野图像采集装置可以包括具有超过12mm的宽视野的低分辨率相机(22)和具有单个mm范围内的视野的高倍率相机(24)。 或者,如果具有足够的变焦能力以具有与两个相机相称的功能,则可以使用单个相机。 配置优选用于协调低倍率和高倍率相机(如果使用分开的相机)之间以及高倍率相机和SPM之间的平移。
    • 7. 发明申请
    • METHOD AND APPARATUS FOR REDUCING LATERAL INTERACTIVE FORCES DURING OPERATION OF A PROBE-BASED INSTRUMENT
    • 在基于探针的仪器操作中减少横向交互力的方法和装置
    • WO2007127817A1
    • 2007-11-08
    • PCT/US2007/067451
    • 2007-04-26
    • VEECO INSTRUMENTS, INC.HUANG, LinMEYER, Charles
    • HUANG, LinMEYER, Charles
    • G12B21/20G12B21/08G01N13/16
    • G01Q10/065
    • A cantilever probe-based instrument is controlled to reduce the lateral loads imposed on the probe as a result of probe/sample interaction. The probe tip T and/or sample S are driven to move laterally relative to one another as a function of cantilever deflection in order to compensate for lateral tip motion that would otherwise be caused by cantilever deflection. In the case of a probe having a passive cantilever, the sample and/or the probe as a whole are driven to move laterally to obtain the desired magnitude of compensation as direct function of cantilever deflection. In the case of a probe having an active cantilever, the sample or probe may be moved as a function of cantilever drive signal, or the cantilever may be controlled to bend as a function of cantilever drive signal so that the tip moves to obtain the desired magnitude of compensation.
    • 控制基于探针的悬臂式仪器,以减少由于探针/样品相互作用而引起的探针横向载荷。 驱动探针尖端T和/或样品S作为悬臂偏转的函数相对于彼此横向移动,以便补偿否则将由悬臂偏转引起的横向顶端运动。 在具有被动悬臂的探针的情况下,样品和/或探针作为整体被驱动以横向移动,以获得作为悬臂偏转的直接函数的期望的补偿量。 在具有活性悬臂的探针的情况下,样品或探针可以作为悬臂驱动信号的函数移动,或者可以将悬臂控制为作为悬臂驱动信号的函数弯曲,使得尖端移动以获得期望的 赔偿金额。