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1. 发明申请

WO2008140728A3 SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM 审中-公开
标题翻译：使用机械开关机构的多个可移动臂的基板运输装置
公开(公告)号：WO2008140728A3
公开(公告)日：2009-12-30
申请号：PCT/US2008005884
申请日：2008-05-08
申请人： BROOKS AUTOMATION INC , HOFMEISTER CHRISTOPHER , KRUPYSHEV ALEXANDER , GILCHRIST ULYSSES , HOSEK MARTIN
发明人： HOFMEISTER CHRISTOPHER , KRUPYSHEV ALEXANDER , GILCHRIST ULYSSES , HOSEK MARTIN
IPC分类号： B66C23/00
CPC分类号： H01L21/68707 , H01L21/67742
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译：一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回组态。

2. 发明申请

WO2009003196A8 ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS 审中-公开
标题翻译：带有磁性主轴的机架式驱动装置
公开(公告)号：WO2009003196A8
公开(公告)日：2009-02-26
申请号：PCT/US2008068684
申请日：2008-06-28
申请人： BROOKS AUTOMATION INC , GILCHRIST ULYSSES , HOSEK MARTIN , MOURA JAIRO TERRA , KRISHNASAMY JAY
发明人： GILCHRIST ULYSSES , HOSEK MARTIN , MOURA JAIRO TERRA , KRISHNASAMY JAY
IPC分类号： H02K7/09
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
摘要翻译：一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子支承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置成接合所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平转子轴承部分。

3. 发明专利

JP2012232410A Device for generating time-optimum arm operation 有权
标题翻译：用于产生时间最佳ARM操作的设备
公开(公告)号：JP2012232410A
公开(公告)日：2012-11-29
申请号：JP2012172529
申请日：2012-08-03
申请人： Brooks Automation Inc , ブルックスオートメーションインコーポレイテッド
发明人： HOSEK MARTIN , ELMALI HAKAN
IPC分类号： B25J9/10 , B25J9/16 , B25J9/18 , G06F17/13 , G06F19/00
CPC分类号： B25J9/1664 , G05B2219/40395 , G05B2219/40454 , G05B2219/40519 , Y10S414/135 , Y10S414/136 , Y10S414/137
摘要： PROBLEM TO BE SOLVED: To provide a system for providing the reliability and efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for the simple and blended movement of single and multi-arm robotic manipulators.SOLUTION: A generic trajectory for a shape for moving along a straight line for a single-arm robot between points (2 and 3) is assumed. A time-optimum trajectory is the set of the position, velocity and acceleration profiles which describe the movement of a selected end effector along a given path in the shortest time possible without violating given constraints with a special case being an optimum abort trajectory which brings the moving arm into complete rest in the shortest time. The system also involves the blending of simple moves into a single trajectory by decomposing trajectories of the individual moves into their orthogonal components and overlapping them for a given time interval which results in a non-stop move along a smooth transfer path.
摘要翻译：要解决的问题：提供一种用于为单臂和多臂机器人操纵器的简单和混合运动提供易于轨道或连续加速曲线的可靠性和有效产生时间优化轨迹的系统。假设用于在点（2和3）之间沿着单臂机器人的直线移动的形状的通用轨迹。时间最优轨迹是位置，速度和加速度分布的集合，其描述了所选择的末端执行器沿着给定的路径在最短时间内的移动，而不违反给定的约束，特殊情况是最佳的中止轨迹，移动臂在最短的时间内完全休息。该系统还涉及通过将各个移动的轨迹分解成它们的正交分量并将它们重叠在给定的时间间隔上，将简单的移动混合到单个轨迹中，这导致沿着平滑的传递路径的不间断移动。版权所有（C）2013，JPO＆INPIT

4. 发明专利

AU7710701A Observer-corrector control system for systems with unmodeled dynamics 未知
公开(公告)号：AU7710701A
公开(公告)日：2002-03-13
申请号：AU7710701
申请日：2001-07-23
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN , MOURA JAIRO TERRA , ELMALI HAKAN
IPC分类号： G05B13/02
摘要： A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.

5. 发明专利

AU2003301074A1 SYSTEM AND METHOD FOR ON-THE-FLY ECCENTRICITY RECOGNITION 未知
公开(公告)号：AU2003301074A1
公开(公告)日：2004-07-22
申请号：AU2003301074
申请日：2003-12-18
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN
IPC分类号： G03F7/20 , G03F9/00 , H01L21/00 , H01L21/68 , H01L21/687
摘要： A method of substrate eccentricity detection includes includes determining at least three positions on a perimeter of a first substrate, grouping the at least three perimeter positions to define one or more circles, estimating a location of a center of the first substrate as the location of a center of a predetermined circle approximated from the at least three perimeter positions, and determining an eccentricity vector as a difference between the estimated location and a reference position on a substrate transport mechanism on which the first substrate rests.

6. 发明专利

DE60118391D1 未知
公开(公告)号：DE60118391D1
公开(公告)日：2006-05-18
申请号：DE60118391
申请日：2001-07-23
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN , MOURA TERRA , ELMALI HAKAN
IPC分类号： G05B13/02
摘要： A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.

7. 发明专利

AT322036T 未知
公开(公告)号：AT322036T
公开(公告)日：2006-04-15
申请号：AT01954890
申请日：2001-07-23
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN , MOURA JAIRO TERRA , ELMALI HAKAN
IPC分类号： G05B13/02
摘要： A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.

8. 发明专利

AU2003301074A8 System and method for on-the-fly eccentricity recognition 未知
公开(公告)号：AU2003301074A8
公开(公告)日：2004-07-22
申请号：AU2003301074
申请日：2003-12-18
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN
IPC分类号： G03F7/20 , G03F9/00 , H01L21/00 , H01L21/68 , H01L21/687 , G05B19/18
摘要： A method of substrate eccentricity detection includes includes determining at least three positions on a perimeter of a first substrate, grouping the at least three perimeter positions to define one or more circles, estimating a location of a center of the first substrate as the location of a center of a predetermined circle approximated from the at least three perimeter positions, and determining an eccentricity vector as a difference between the estimated location and a reference position on a substrate transport mechanism on which the first substrate rests.

9. 发明专利

AU5017800A Robotic manipulators based on pre-defined time-optimum trajectory shape 未知
公开(公告)号：AU5017800A
公开(公告)日：2000-12-18
申请号：AU5017800
申请日：2000-05-15
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN , ELMALI HAKAN
IPC分类号： G06Q50/04 , B25J9/10 , B25J9/16 , B25J9/18 , G06F17/13 , G06F19/00 , G06Q10/06 , G05B19/04 , G05B19/18 , B66C23/00
摘要： A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single- and multi-arm robotic manipulators, such as an extension and retraction move along a straight line or a rotary move following a circular arc, with velocity, acceleration, jerk, and jerk rate constraints. A time-optimum trajectory is the set of the position, velocity, and acceleration profiles which describe the move of a selected end effector along a given path in the shortest time possible without violating given constraints, with a special case being an optimum abort trajectory, which brings the moving arm into complete rest in the shortest time. The invention involves firstly identifying the set of fundamental trajectory shapes which cover all possible combinations of constraints for a given category of moves, e.g., a move along a straight line or along a circular arc; next, decomposing the fundamental shapes into segments where a single constraint is active; and, then, determining the time optimum paths in the segments. As a result, a unique design of time-optimum trajectories is produced based on a set of pre-defined trajectory shapes. The invention also involves the blending of simple moves into a single trajectory by decomposing trajectories of the individual moves into their orthogonal components and overlapping them for a given time interval, which results in a non-stop move along a smooth transfer path.

10. 发明专利

DE60118391T2 未知
公开(公告)号：DE60118391T2
公开(公告)日：2006-11-30
申请号：DE60118391
申请日：2001-07-23
申请人： BROOKS AUTOMATION INC
发明人： HOSEK MARTIN , MOURA TERRA , ELMALI HAKAN
IPC分类号： G05B13/02
摘要： A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.

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