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1. 发明申请

WO2010106533A2 A METHOD AND APPARATUS FOR ACCURATE DETERMINATION OF PARAMETERS OF A STACK OF THIN FILMS 审中-公开
标题翻译：准确确定薄膜叠层参数的方法和设备
公开(公告)号：WO2010106533A2
公开(公告)日：2010-09-23
申请号：PCT/IL2010/000174
申请日：2010-03-03
申请人： BRIGHTVIEW SYSTEMS LTD. , FINAROV, Moshe
发明人： FINAROV, Moshe
IPC分类号： G01B9/08
CPC分类号： G01B11/0625 , G01B11/303 , G01N21/55 , G01N21/8422
摘要： A method for accurate determination of optical parameters of a stack of thin films with at least one of the films being an opaque film. The method includes measurement of the reflected or transmitted through the stack illumination and mutual correlation of the determined thin film parameters.
摘要翻译：用于精确确定薄膜堆叠的光学参数的方法，其中至少一个薄膜是不透明薄膜。该方法包括测量通过堆叠照明的反射或透射以及所确定的薄膜参数的相互关联。

2. 发明申请

WO2010079474A1 A SYSTEM AND METHOD FOR THIN FILM QUALITY ASSURANCE 审中-公开
标题翻译：薄膜质量保证的系统和方法
公开(公告)号：WO2010079474A1
公开(公告)日：2010-07-15
申请号：PCT/IL2009/001211
申请日：2009-12-23
申请人： BRIGHTVIEW SYSTEMS LTD , NOY, Noam , LIPSON, Ariel , FINAROV, Moshe
发明人： NOY, Noam , LIPSON, Ariel , FINAROV, Moshe
IPC分类号： G01N21/84
CPC分类号： G01N21/8422 , H02S50/15
摘要： A method of a photovoltaic panel (104) quality control, said method comprising: enabling a relative movement in at least one direction (112) between the photovoltaic panel (104) and a low-resolution scanning imaging unit (132) and capturing successive two-dimensional frames of the scanned area; analyzing the aquired image frames for presence of thin film production defects (144) and communicating to a high resolution image scanning unit (136) locations of said production defects; enabling a relative movement (148) between the photovoltaic panel and the high resolution scanning unit said, movement following the low-resolution unit movement and at least one additional direction parallel to the photovoltaic panel movement direction to aquire and classify the thin film production defects communicated by the low resolution scanning unit; and wherein the low and high resolution scanning units move simultaneously with the same speed (124) across the photovoltaic panel and the speed of the high resolution scanning unit moving in the direction parallel to the thin film movement direction is different from the speed at which the photovoltaic panel moves.
摘要翻译：一种光伏面板（104）质量控制的方法，所述方法包括：实现光伏面板（104）和低分辨率扫描成像单元（132）之间的至少一个方向（112）的相对运动，并捕获连续的两个扫描区域的三维帧; 分析所述彩色图像帧以存在薄膜生产缺陷（144）并与所述生产缺陷的位置的高分辨率图像扫描单元（136）通信; 使得能够在光伏面板和高分辨率扫描单元之间进行相对运动（148），所述运动遵循低分辨率单元运动和平行于光伏面板运动方向的至少一个附加方向，以产生并分类所传播的薄膜生产缺陷由低分辨率扫描单元; 并且其中所述低分辨率和高分辨率扫描单元以相同的速度（124）同时移动穿过所述光伏面板，并且所述高分辨率扫描单元在与所述薄膜移动方向平行的方向上移动的速度不同于光伏面板移动。

3. 发明申请

WO2010007617A3 METHOD AND APPARATUS FOR PHOTOVOLTAIC THIN FILM QUALITY CONTROL 审中-公开
公开(公告)号：WO2010007617A3
公开(公告)日：2010-01-21
申请号：PCT/IL2009/000684
申请日：2009-07-09
申请人： BRIGHTVIEW SYSTEMS LTD. , FINAROV, Moshe
发明人： FINAROV, Moshe
IPC分类号： G01N21/95 , G01N21/31
摘要： Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic illumination source. The source forms on the thin film a continuous illuminated line. Discrete sampled points located on the illuminated line are imaged onto a two dimensional optical switch. A concordance look-up-table between the coordinates of the above sampled points on the thin film and their coordinates on the two dimensional optical switch are generated. The spectral composition of the illumination reflected by the sampled points is determined and photovoltaic thin film parameters applicable to the quality control are derived from the spectral composition of reflected or transmitted by the photovoltaic thin film illumination.

4. 发明授权

EP1352211B1 A METHOD AND SYSTEM FOR MEASURING IN PATTERNED STRUCTURES 有权
公开(公告)号：EP1352211B1
公开(公告)日：2019-10-16
申请号：EP01999783.2
申请日：2001-12-07
申请人： Nova Measuring Instruments Limited , Brill, Boaz , Finarov, Moshe
发明人： BRILL, Boaz , FINAROV, Moshe
IPC分类号： G01B15/00 , G01N21/956 , G03F7/20 , G01N21/47 , G01N23/225 , H01J37/28

5. 发明公开

EP1352211A1 A METHOD AND SYSTEM FOR MEASURING IN PATTERNED STRUCTURES 有权
标题翻译：方法系统ZUR MESSUNG AN MUSTERSTRUKTUREN
公开(公告)号：EP1352211A1
公开(公告)日：2003-10-15
申请号：EP01999783.2
申请日：2001-12-07
申请人： Nova Measuring Instruments Limited , Brill, Boaz , Finarov, Moshe
发明人： BRILL, Boaz , FINAROV, Moshe
IPC分类号： G01B11/02 , G01N21/47 , G01N23/225 , H01J37/28 , H01L21/66
摘要： A measurement method and system are presented for measuring parameters of a patterned structure. Scatterometry and SEM measurements are applied to the structure, measured data indicative of, respectively, the structure parameters and lateral pattern dimensions of the structure are generated. The entire measured data are analyzed so as to enable using measurement results of either one of the scatterometry and SEM measurements for optimizing the other measurement results.
摘要翻译：提出了一种用于测量图案结构参数的测量方法和系统。对结构进行散射测量和SEM测量，产生分别表示结构参数和结构的横向图形尺寸的测量数据。分析整个测量数据，以便能够使用散射测量和SEM测量中的任一个的测量结果来优化其他测量结果。

6. 发明申请

WO2003014658A3 METHOD AND APPARATUS FOR PROCESS CONTROL IN THE SEMICONDUCTOR MANUFACTURING 审中-公开
公开(公告)号：WO2003014658A3
公开(公告)日：2003-02-20
申请号：PCT/IL2002/000656
申请日：2002-08-08
申请人： NOVA MEASURING INSTRUMENTS LTD. , FINAROV, Moshe
发明人： FINAROV, Moshe
IPC分类号： G01B11/24
摘要： An optical system is presented for use in a measurement system (OS) for measuring in patterned structures, which is particularly useful controlling processing of the structure progressing on a production line. The system comprises (OS) an illuminator unit (10) producing illuminating light to be directed to the structure to produce returned light, a detector unit comprising an imaging detector (26) and a spectrophotometer detector (30), and a light directing assembly (31). The light directing assembly (31) defines first and second optical paths for the light propagation. The optical elements accommodated in the first optical path affect the light to provide a relatively small measuring area of the structure's plane. The second optical path is located outside the first optical path, the light propagation through the second optical path providing a relatively large measuring area, as compared to that of the first optical path.

7. 发明申请

WO2003017322A3 A METHOD AND SYSTEM FOR MEASUREMENTS IN PATTERNED STRUCTURES 审中-公开
公开(公告)号：WO2003017322A3
公开(公告)日：2003-02-27
申请号：PCT/IL2002/000655
申请日：2002-08-08
申请人： NOVA MEASURING INSTRUMENTS LTD. , FINAROV, Moshe
发明人： FINAROV, Moshe
IPC分类号： H01L21/00 , G01R31/02
摘要： A method and system are presented for measuring in a patterned structure to thereby enabling to control a process. An image of at least a region of patterned structure formed by light returned from the illuminated region is acquired and analysed to determine sites of the structure to which electrical measurements are to be applied. Electrical measurements to the predetermined sites of the structure are applied and measured data indicative of at least one parameter of the structure is generated for adjusting operating conditions of the process.

8. 发明申请

WO2011089592A4 A METHOD OF LASER PROCESSING 审中-公开
公开(公告)号：WO2011089592A4
公开(公告)日：2011-07-28
申请号：PCT/IL2011/000041
申请日：2011-01-13
申请人： FINAROV, Moshe , DISHON, Giora , TIROSH, Ehud
发明人： FINAROV, Moshe , DISHON, Giora , TIROSH, Ehud
IPC分类号： B23K26/00
摘要： A method of manufacturing a waveguide within a substrate by local modification of substrate material structure. The modification is performed by high power density laser radiation applied through the most distant surface of the substrate.

9. 发明申请

WO2010041262A3 SOLAR CELLS AND METHOD OF MANUFACTURING THEREOF 审中-公开
公开(公告)号：WO2010041262A3
公开(公告)日：2010-04-15
申请号：PCT/IL2009/000976
申请日：2009-10-12
申请人： UTILIGHT LTD. , FINAROV, Moshe , MATUSOVSKY, Mikhael , NOY, Amir
发明人： FINAROV, Moshe , MATUSOVSKY, Mikhael , NOY, Amir
IPC分类号： H01L31/0224 , H01L31/18
摘要： A photovoltaic cell (400), the cell comprising: a silicon substrate (410) of bulk silicon material having front and rear surfaces; an emitter layer (450) on the rear surface of said substrate; elongate channels (456) through the emitter layer; elongate contacts (480) to the bulk of the silicon substrate within at least some of the elongate channels, wherein the contacts are narrower than the channels; and gaps (454) in the emitter between at least some of the elongate contacts and the emitter layer on the sides (457) of the contacts.

10. 发明申请

WO2005119225A1 DEVICE AND METHOD FOR OPTICAL REFLECTOMETRY UNDER OBLIQUE ANGLE 审中-公开
标题翻译：用于反射角度下的光学反射测量的装置和方法
公开(公告)号：WO2005119225A1
公开(公告)日：2005-12-15
申请号：PCT/IL2005/000563
申请日：2005-05-31
申请人： NOVA MEASURING INSTRUMENTS LTD. , FINAROV, Moshe
发明人： FINAROV, Moshe
IPC分类号： G01N21/956
CPC分类号： G01N21/956 , G01N21/211 , G01N21/8806
摘要： A system (1) and method are presented for measurement on an article (w). The system comprises an illuminator (2) for producing light of at least one predetermined wavelength range; an optical system (4); a displacement arrangement (5); and a control system (6). The optical system is configured to define at least a measurement channel, and comprises a light directing assembly for directing an input light beam, propagating along an input light path from the illuminator, onto the article and directing a light beam returned from the illuminated region of the article to at least one light detector. The displacement arrangement is associated with at least the light directing assembly of the optical system, and is configured and operable by the control system to rotate said at least light directing assembly of the optical system with respect to a stage (10) supporting the article about a rotational axis (OA) substantially normal to the stage.
摘要翻译：提供了一种用于物品（w）上的测量的系统（1）和方法。该系统包括用于产生至少一个预定波长范围的光的照明器（2）光学系统（4）; 位移布置（5）; 和控制系统（6）。光学系统被配置为至少限定测量通道，并且包括光导组件，用于将输入光束沿着从照明器的输入光路传播到物品上并引导从照明区域的光束返回的光束该物品至少有一个光检测器。所述位移布置与至少所述光学系统的所述光导组件相关联，并且被所述控制系统配置和操作以使所述光学系统的所述至少光导向组件相对于支撑所述制品的台架（10）旋转基本上垂直于平台的旋转轴线（OA）。

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