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    • 2. 发明申请
    • MICROMECHANICAL HEAT CONDUCTIVITY SENSOR HAVING A POROUS COVER
    • 带多孔盖的微机电热传导传感器
    • WO03025557A3
    • 2003-10-02
    • PCT/DE0203130
    • 2002-08-27
    • BOSCH GMBH ROBERTARNDT MICHAELLORENZ GERD
    • ARNDT MICHAELLORENZ GERD
    • G01N25/18G01N27/18G01N25/00
    • G01N27/18G01N25/18
    • The invention relates to a micromechanical heat conductivity sensor comprising a thermally insulated membrane forming a recess in a badly heat-conducting base plate, at least one heating element which is placed on said membrane, at least one temperature-dependent electric resistor placed on the membrane in order to measure the temperature of the membrane, and at least one other temperature-dependent electric resistor which is placed outside the membrane on the base plate in order to measure ambient temperature. The invention is characterized in that the membrane is covered on one or both sides thereof by a porous cover plate enabling gas exchange to occur by means of diffusion. A cavity is formed in between the membrane and the porous cover plate.
    • 本发明涉及一种微机械的热导率传感器,其具有通过凹陷差的热传导性基板形成的热绝缘膜,至少一个所施加的膜的加热元件上,施加至少一个在膜依赖于温度的电阻器用于测量所述膜的温度,和至少一个进一步外 包括在基板上的膜施加依赖于温度的电阻器用于测量环境温度,并且其特征在于该膜覆盖在其一个或两个侧面,允许通过扩散多孔盖板,其特征在于,腔被限定在膜和多孔盖板之间凹进的气体交换的 ,