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    • 3. 发明申请
    • Substrate Carrying Apparatus and Sputtering Device Comprising the Same
    • 基板搬运装置及其溅射装置
    • US20160362779A1
    • 2016-12-15
    • US15131929
    • 2016-04-18
    • BOE TECHNOLOGY GROUP CO., LTD.HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    • Jun LiuXu ShiDongqing Li
    • C23C14/50C23C14/34
    • C23C14/505C23C14/34C23C14/50
    • The present invention relates to a technical field of display, and discloses a substrate carrying apparatus. The apparatus comprises: a vertical bearing plate and an upper holding base; one side surface of the vertical bearing plate is a bearing surface, the upper holding base is provided at the upside of the bearing surface; the upper holding base is provided with a plurality of holder for holding the substrate; the left and right sides of the bearing surface are provided with a plurality of positioning clips for positioning the substrate from the left and right ends of the substrate. The substrate carrying apparatus of the present invention provides a holder on the upper holding base, and during loading of the substrate, after the substrate is transported in place by a manipulator, the substrate is held and hanged by the holder, and the substrate would not undergo a falling process, reducing the risk of substrate damage. The present invention further provides a sputtering device comprising one or more of the substrate carrying apparatuses.
    • 本发明涉及显示技术领域,并公开了一种基板输送装置。 该装置包括:垂直轴承板和上保持基座; 垂直轴承板的一个侧面是轴承面,上部保持基座设置在轴承面的上侧; 上保持基座设置有用于保持基板的多个保持器; 轴承表面的左侧和右侧设置有多个定位夹,用于从衬底的左端和右端定位衬底。 本发明的基板承载装置在上保持基座上设置保持器,并且在基板的装载期间,在通过机械手将基板输送到适当位置之后,基板被保持架保持并悬挂,基板不会 经历下降过程,降低底物损伤的风险。 本发明还提供一种溅射装置,其包括一个或多个基板输送装置。