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    • 6. 发明申请
    • MASK PLATE AND MANUFACTURING METHOD THEREOF
    • US20210301386A1
    • 2021-09-30
    • US16770183
    • 2019-11-12
    • BOE Technology Group Co., Ltd.
    • Shanshan BAI
    • C23C14/04C23C14/24
    • The disclosure provides a mask plate and a manufacturing method thereof, which belong to the field of display technology and can at least partially solve a problem that it is difficult to accurately control a shape and a position of a pattern opening when an existing mask plate, which is divided into a first opening region and a second opening region, is stretched. The mask plate includes at least one pattern region, each pattern region includes a first opening region and a second opening region which are adjacent to each other along a lengthwise direction of the mask plate, each of the first opening region and the second opening region has a plurality of pattern openings penetrating through the mask plate along a thickness direction of the mask plate, wherein, a ratio of a sum of areas of the pattern openings in the second opening region to a total area of the second opening region is greater than a ratio of a sum of areas of the pattern openings in the first opening region to a total area of the first opening region, and the first opening region has grooves not penetrating through the mask plate in the thickness direction of the mask plate therein.