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1. 发明申请

WO2010001399A1 A SCANNING ELECTRON MICROSCOPE, AN INTERFACE AND A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT 审中-公开
标题翻译：扫描电子显微镜，接口和在非真空环境中观察对象的方法
公开(公告)号：WO2010001399A1
公开(公告)日：2010-01-07
申请号：PCT/IL2009/000660
申请日：2009-07-02
申请人： B-NANO , SHACHAL, Dov , DE PICCIOTTO, Rafi
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/00
CPC分类号： G01N23/22 , G01N2223/079 , G01N2223/08 , H01J37/228 , H01J37/256 , H01J37/28 , H01J2237/164 , H01J2237/208 , H01J2237/244 , H01J2237/2608 , H01J2237/2808
摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.
摘要翻译：接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

2. 发明申请

WO2010035265A1 A VACUUMED DEVICE AND A SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：真空设备和扫描电子显微镜
公开(公告)号：WO2010035265A1
公开(公告)日：2010-04-01
申请号：PCT/IL2009/000926
申请日：2009-09-24
申请人： B-NANO LTD. , SHACHAL, Dov , DE PICCIOTTO, Rafi
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J37/16 , H01J37/18 , H01J2237/0245 , H01J2237/164 , Y10T29/4973
摘要： A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.
摘要翻译：一种真空装置，包括：密封壳体，电子束源，电子光学部件，薄膜和检测器。薄膜密封密封外壳的孔。密封的壳体限定了真空保持的真空空间。电子束源被配置为产生在真空空间内传播的电子束，与电子光学部件相互作用并通过薄膜。密封壳体的第一部分被成形为适合保持在非真空环境中的非真空扫描电子显微镜部件限定的空间。

3. 发明公开

EP2329252A1 A VACUUMED DEVICE AND A SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：和真空设备以及电子显微镜
公开(公告)号：EP2329252A1
公开(公告)日：2011-06-08
申请号：EP09815770.4
申请日：2009-09-24
申请人： B-Nano Ltd.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J37/16 , H01J37/18 , H01J2237/0245 , H01J2237/164 , Y10T29/4973
摘要： A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.

4. 发明公开

EP2959287A1 SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：EP2959287A1
公开(公告)日：2015-12-30
申请号：EP14754707.9
申请日：2014-02-18
申请人： B-Nano Ltd.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/04
CPC分类号： H01J37/18 , H01J37/244 , H01J37/28 , H01J2237/164 , H01J2237/188 , H01J2237/2002 , H01J2237/24445 , H01J2237/2605
摘要： A scanning electron microscope suitable for imaging samples in a non- vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

5. 发明申请

WO2014128699A1 SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：WO2014128699A1
公开(公告)日：2014-08-28
申请号：PCT/IL2014/050175
申请日：2014-02-18
申请人： B-NANO LTD.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/04
CPC分类号： H01J37/18 , H01J37/244 , H01J37/28 , H01J2237/164 , H01J2237/188 , H01J2237/2002 , H01J2237/24445 , H01J2237/2605
摘要： A scanning electron microscope suitable for imaging samples in a non- vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.
摘要翻译：一种适用于在非真空环境中成像样品的扫描电子显微镜，扫描电子显微镜包括位于保持在真空下的外壳内的电子源，设置在外壳开口处的电子透过膜，分隔外壳内的环境，维持在真空和外壳外部的环境，其不被保持在真空下，电渗透膜不被电接地，并且至少一个非接地电极用作电子检测器。

6. 发明申请

WO2013183057A1 A SYSTEM AND METHOD FOR PERFORMING ANALYSIS OF MATERIALS IN A NON-VACUUM ENVIRONMENT USING AN ELECTRON MICROSCOPE 审中-公开
标题翻译：使用电子显微镜对非真空环境中的材料进行分析的系统和方法
公开(公告)号：WO2013183057A1
公开(公告)日：2013-12-12
申请号：PCT/IL2013/050489
申请日：2013-06-05
申请人： B-NANO LTD.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N21/47
CPC分类号： G01N23/2252 , G01N2223/309
摘要： A method for performing analysis of materials when present in a non- vacuum environment using an electron microscope, the method including generating first and second characteristic spectrum for a material by directing an electron beam from the electron microscope onto the material in respective first and second non-vacuum environments, in which respective first and second amounts of scattering of the electron beam takes place, collecting respective first and second X-rays emitted from the material and performing spectral analysis on the first and second X-rays, comparing the first and second characteristic spectra and noting peaks whose intensity increases with increased scattering, generating a scattering-compensated characteristic spectrum for the material from at least one of the first and second characteristic spectra by eliminating at least one peak whose intensity increases with increased scattering.
摘要翻译：一种当使用电子显微镜存在于非真空环境中时进行材料分析的方法，该方法包括通过将电子束从电子显微镜引导到相应的第一和第二非离子表面上的材料上来产生材料的第一和第二特征谱真空环境，其中发生电子束的相应的第一和第二量的散射，收集从材料发射的相应的第一和第二X射线，并对第一和第二X射线进行光谱分析，比较第一和第二X射线特征光谱和注意峰，其强度随着散射的增加而增加，通过消除其强度随着增加的散射而增加的至少一个峰，从而从第一和第二特征光谱中的至少一个产生材料的散射补偿特性光谱。

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