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    • 3. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20120068227A1
    • 2012-03-22
    • US13231514
    • 2011-09-13
    • Masahiro HIKITAManabu YANAGIHARA
    • Masahiro HIKITAManabu YANAGIHARA
    • H01L29/778
    • H01L29/42316H01L29/1066H01L29/2003H01L29/518H01L29/7786
    • A normally off semiconductor device with a reduced off-state leakage current, which is applicable to a power switching element, includes: a substrate; an undoped GaN layer formed above the substrate; an undoped AlGaN layer formed on the undoped GaN layer; a source electrode and a drain electrode, formed on the undoped GaN layer or the undoped AlGaN layer; a P-type GaN layer formed on the undoped AlGaN layer and disposed between the source electrode and the drain electrode; and a gate electrode formed on the P-type GaN layer, wherein the undoped GaN layer includes an active region including a channel and an inactive region not including the channel, and the P-type GaN layer is disposed to surround the source electrode.
    • 具有减小的截止状态漏电流的常闭半导体器件,其适用于功率开关元件,包括:衬底; 在衬底上形成未掺杂的GaN层; 在未掺杂的GaN层上形成未掺杂的AlGaN层; 源电极和漏电极,形成在未掺杂的GaN层或未掺杂的AlGaN层上; 形成在未掺杂的AlGaN层上并设置在源电极和漏电极之间的P型GaN层; 以及形成在所述P型GaN层上的栅电极,其中所述未掺杂的GaN层包括包括沟道的有源区和不包括所述沟道的非活性区,并且所述P型GaN层设置为围绕所述源电极。